TR200000710T2 - Koruyucu bir katman sistemine sahip bir gereç. - Google Patents

Koruyucu bir katman sistemine sahip bir gereç.

Info

Publication number
TR200000710T2
TR200000710T2 TR2000/00710T TR200000710T TR200000710T2 TR 200000710 T2 TR200000710 T2 TR 200000710T2 TR 2000/00710 T TR2000/00710 T TR 2000/00710T TR 200000710 T TR200000710 T TR 200000710T TR 200000710 T2 TR200000710 T2 TR 200000710T2
Authority
TR
Turkey
Prior art keywords
tool
layer system
layer
theta
mex
Prior art date
Application number
TR2000/00710T
Other languages
English (en)
Turkish (tr)
Inventor
Braendle Hans
Shima Nobuhika
Original Assignee
Balzers Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Aktiengesellschaft filed Critical Balzers Aktiengesellschaft
Priority claimed from PCT/IB1997/001090 external-priority patent/WO1999014392A1/en
Publication of TR200000710T2 publication Critical patent/TR200000710T2/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568Transferring the substrates through a series of coating stations
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/548Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Materials For Medical Uses (AREA)
  • Drilling Tools (AREA)
  • Chemical Vapour Deposition (AREA)
TR2000/00710T 1997-09-12 1997-09-12 Koruyucu bir katman sistemine sahip bir gereç. TR200000710T2 (tr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1997/001090 WO1999014392A1 (en) 1997-09-12 1997-09-12 Tool having a protective layer system

Publications (1)

Publication Number Publication Date
TR200000710T2 true TR200000710T2 (tr) 2000-09-21

Family

ID=11004604

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2000/00710T TR200000710T2 (tr) 1997-09-12 1997-09-12 Koruyucu bir katman sistemine sahip bir gereç.

Country Status (8)

Country Link
JP (1) JP2001516655A (cs)
KR (1) KR100470826B1 (cs)
AT (1) ATE226647T1 (cs)
CA (1) CA2303124C (cs)
CZ (1) CZ301431B6 (cs)
DE (1) DE69716651T2 (cs)
SK (1) SK287369B6 (cs)
TR (1) TR200000710T2 (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4711107B2 (ja) * 2004-04-08 2011-06-29 三菱マテリアル株式会社 高硬度鋼の高速断続切削加工で硬質被覆層がすぐれた耐チッピング性および耐熱塑性変形性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
JP4711106B2 (ja) * 2004-04-09 2011-06-29 三菱マテリアル株式会社 難削材の高速断続切削加工ですぐれた耐チッピング性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
KR101089528B1 (ko) * 2004-04-19 2011-12-05 피보트 에이.에스. 경질 내마모성 질화알루미늄계 코팅
CN109128391A (zh) * 2018-11-22 2019-01-04 上海电气集团股份有限公司 一种齿轮加工方法

Also Published As

Publication number Publication date
CZ2000904A3 (cs) 2001-01-17
CA2303124A1 (en) 1999-03-25
DE69716651D1 (de) 2002-11-28
KR20010030596A (ko) 2001-04-16
KR100470826B1 (ko) 2005-03-07
DE69716651T2 (de) 2003-06-18
CZ301431B6 (cs) 2010-03-03
SK287369B6 (sk) 2010-08-09
SK3472000A3 (en) 2001-07-10
JP2001516655A (ja) 2001-10-02
ATE226647T1 (de) 2002-11-15
CA2303124C (en) 2007-09-25

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