CA2303124C - Tool having a protective layer system - Google Patents

Tool having a protective layer system Download PDF

Info

Publication number
CA2303124C
CA2303124C CA002303124A CA2303124A CA2303124C CA 2303124 C CA2303124 C CA 2303124C CA 002303124 A CA002303124 A CA 002303124A CA 2303124 A CA2303124 A CA 2303124A CA 2303124 C CA2303124 C CA 2303124C
Authority
CA
Canada
Prior art keywords
tool
layer
voltage
titanium
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002303124A
Other languages
English (en)
French (fr)
Other versions
CA2303124A1 (en
Inventor
Hans Braendle
Nobuhiko Shima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Trading AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading AG Truebbach filed Critical Oerlikon Trading AG Truebbach
Priority claimed from PCT/IB1997/001090 external-priority patent/WO1999014392A1/en
Publication of CA2303124A1 publication Critical patent/CA2303124A1/en
Application granted granted Critical
Publication of CA2303124C publication Critical patent/CA2303124C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Materials For Medical Uses (AREA)
  • Drilling Tools (AREA)
  • Chemical Vapour Deposition (AREA)
CA002303124A 1997-09-12 1997-09-12 Tool having a protective layer system Expired - Fee Related CA2303124C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB1997/001090 WO1999014392A1 (en) 1997-09-12 1997-09-12 Tool having a protective layer system

Publications (2)

Publication Number Publication Date
CA2303124A1 CA2303124A1 (en) 1999-03-25
CA2303124C true CA2303124C (en) 2007-09-25

Family

ID=11004604

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002303124A Expired - Fee Related CA2303124C (en) 1997-09-12 1997-09-12 Tool having a protective layer system

Country Status (8)

Country Link
JP (1) JP2001516655A (cs)
KR (1) KR100470826B1 (cs)
AT (1) ATE226647T1 (cs)
CA (1) CA2303124C (cs)
CZ (1) CZ301431B6 (cs)
DE (1) DE69716651T2 (cs)
SK (1) SK287369B6 (cs)
TR (1) TR200000710T2 (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4711107B2 (ja) * 2004-04-08 2011-06-29 三菱マテリアル株式会社 高硬度鋼の高速断続切削加工で硬質被覆層がすぐれた耐チッピング性および耐熱塑性変形性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
JP4711106B2 (ja) * 2004-04-09 2011-06-29 三菱マテリアル株式会社 難削材の高速断続切削加工ですぐれた耐チッピング性を発揮する表面被覆立方晶窒化硼素系焼結材料製切削工具
KR101089528B1 (ko) * 2004-04-19 2011-12-05 피보트 에이.에스. 경질 내마모성 질화알루미늄계 코팅
CN109128391A (zh) * 2018-11-22 2019-01-04 上海电气集团股份有限公司 一种齿轮加工方法

Also Published As

Publication number Publication date
CZ2000904A3 (cs) 2001-01-17
CA2303124A1 (en) 1999-03-25
DE69716651D1 (de) 2002-11-28
KR20010030596A (ko) 2001-04-16
KR100470826B1 (ko) 2005-03-07
DE69716651T2 (de) 2003-06-18
CZ301431B6 (cs) 2010-03-03
SK287369B6 (sk) 2010-08-09
TR200000710T2 (tr) 2000-09-21
SK3472000A3 (en) 2001-07-10
JP2001516655A (ja) 2001-10-02
ATE226647T1 (de) 2002-11-15

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Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20170912