ATE228101T1 - Rückgewinnung von edelgasen - Google Patents

Rückgewinnung von edelgasen

Info

Publication number: ATE228101T1
Authority: AT; Austria
Prior art keywords: noble gas; gas; recycled; purge gas; process chamber
Prior art date: 1996-08-27

Application number

AT97305948T

Other languages

English (en)

Inventor

Ravi Jain

Walter H Whitlock

Original Assignee

Boc Group Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-08-27

Filing date

1997-08-05

Publication date

2002-12-15

1997-08-05 Application filed by Boc Group Inc filed Critical Boc Group Inc

2002-12-15 Application granted granted Critical

2002-12-15 Publication of ATE228101T1 publication Critical patent/ATE228101T1/de

Links

229910052756 noble gas Inorganic materials 0.000 title abstract 6
150000002835 noble gases Chemical class 0.000 title 1
238000011084 recovery Methods 0.000 title 1
239000007789 gas Substances 0.000 abstract 5
238000010926 purge Methods 0.000 abstract 5
238000000034 method Methods 0.000 abstract 4
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
229910052739 hydrogen Inorganic materials 0.000 abstract 2
239000001257 hydrogen Substances 0.000 abstract 2
239000012528 membrane Substances 0.000 abstract 2
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
150000002431 hydrogen Chemical class 0.000 abstract 1
239000012535 impurity Substances 0.000 abstract 1
229910052743 krypton Inorganic materials 0.000 abstract 1
DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 abstract 1
239000000203 mixture Substances 0.000 abstract 1
229910052754 neon Inorganic materials 0.000 abstract 1
GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 abstract 1
229910052763 palladium Inorganic materials 0.000 abstract 1
238000000926 separation method Methods 0.000 abstract 1
229910052724 xenon Inorganic materials 0.000 abstract 1
FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0094—Combined chemical and physical processing
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/11—Noble gases
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0009—Physical processing
- C01B2210/001—Physical processing by making use of membranes
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0009—Physical processing
- C01B2210/0014—Physical processing by adsorption in solids
- C01B2210/0015—Physical processing by adsorption in solids characterised by the adsorbent
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0029—Obtaining noble gases
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0029—Obtaining noble gases
- C01B2210/0032—Neon

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
General Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Engineering & Computer Science (AREA)
Inorganic Chemistry (AREA)
Oil, Petroleum & Natural Gas (AREA)
Separation Using Semi-Permeable Membranes (AREA)
Hydrogen, Water And Hydrids (AREA)
Separation Of Gases By Adsorption (AREA)
Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Solid-Sorbent Or Filter-Aiding Compositions (AREA)

AT97305948T 1996-08-27 1997-08-05 Rückgewinnung von edelgasen ATE228101T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US70371196A	1996-08-27	1996-08-27
US88442197A	1997-06-27	1997-06-27

Publications (1)

Publication Number	Publication Date
ATE228101T1 true ATE228101T1 (de)	2002-12-15

Family

ID=27107192

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT97305948T ATE228101T1 (de)	1996-08-27	1997-08-05	Rückgewinnung von edelgasen

Country Status (6)

Country	Link
EP (1)	EP0826629B1 (de)
JP (1)	JP3913327B2 (de)
AT (1)	ATE228101T1 (de)
DE (1)	DE69717215T2 (de)
ES (1)	ES2183091T3 (de)
PL (1)	PL191279B1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6089282A (en) *	1998-05-08	2000-07-18	Aeronex, Inc.	Method for recovery and reuse of gas
US6408849B1 (en) *	1999-06-18	2002-06-25	Aeronex, Inc.	Recovery and purification of gases used in medical processes
JP4769350B2 (ja) *	2000-09-22	2011-09-07	大陽日酸株式会社	希ガスの回収方法及び装置
JP2002308605A (ja) *	2001-04-11	2002-10-23	Japan Pionics Co Ltd	水素ガスの精製方法
JP3572548B2 (ja)	2002-05-24	2004-10-06	日本酸素株式会社	ガス精製方法及び装置
US6770895B2 (en)	2002-11-21	2004-08-03	Asml Holding N.V.	Method and apparatus for isolating light source gas from main chamber gas in a lithography tool
US6919573B2 (en)	2003-03-20	2005-07-19	Asml Holding N.V	Method and apparatus for recycling gases used in a lithography tool
US7094036B2 (en) *	2003-09-24	2006-08-22	The Boc Group Plc	Vacuum pumping system
DE102006034601B3 (de) *	2006-07-26	2008-02-07	Schmidt, Klaus, Prof. Dr.	Rückhaltung von Edelgasen im Atemgas bei beatmeten Patienten mit Hilfe von Membranseparation
WO2009073029A1 (en) *	2007-12-06	2009-06-11	Uop Llc	Process for safe membrane operation
JP5134588B2 (ja) *	2009-06-12	2013-01-30	住友精化株式会社	アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置
JP5287663B2 (ja) *	2009-10-30	2013-09-11	パナソニック株式会社	ガス放電表示パネルおよびガスリサイクル方法
WO2014094139A1 (en)	2012-12-22	2014-06-26	Dmf Medical Incorporated	An anesthetic circuit having a hollow fiber membrane
JP7020951B2 (ja) *	2018-02-09	2022-02-16	東京エレクトロン株式会社	プラズマ処理システムおよびプラズマ処理方法
US11420869B2 (en) *	2019-02-22	2022-08-23	Uop Llc	Process for removing oxygen from a hydrogen stream
US11619442B2 (en) *	2021-04-19	2023-04-04	Praxair Technology, Inc.	Method for regenerating a pre-purification vessel
CN116573611B (zh) *	2023-07-13	2025-03-11	杭氧集团股份有限公司	一种发电、碳捕获与惰性组分回收耦合的装置及使用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE69518710T2 (de) *	1994-09-27	2001-05-23	Applied Materials Inc	Verfahren zum Behandeln eines Substrats in einer Vakuumbehandlungskammer
FR2730790B1 (fr) *	1995-02-17	1997-05-23	Air Liquide	Procede d'introduction d'un gaz de remplissage dans une enceinte et installation de mise en oeuvre

1997
- 1997-08-05 AT AT97305948T patent/ATE228101T1/de not_active IP Right Cessation
- 1997-08-05 EP EP97305948A patent/EP0826629B1/de not_active Expired - Lifetime
- 1997-08-05 ES ES97305948T patent/ES2183091T3/es not_active Expired - Lifetime
- 1997-08-05 DE DE69717215T patent/DE69717215T2/de not_active Expired - Lifetime
- 1997-08-20 JP JP22333097A patent/JP3913327B2/ja not_active Expired - Fee Related
- 1997-08-26 PL PL321797A patent/PL191279B1/pl not_active IP Right Cessation

Also Published As

Publication number	Publication date
DE69717215T2 (de)	2003-07-24
EP0826629B1 (de)	2002-11-20
JP3913327B2 (ja)	2007-05-09
ES2183091T3 (es)	2003-03-16
PL191279B1 (pl)	2006-04-28
EP0826629A3 (de)	1998-11-04
JPH10273307A (ja)	1998-10-13
DE69717215D1 (de)	2003-01-02
PL321797A1 (en)	1998-03-02
EP0826629A2 (de)	1998-03-04

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Legal Events

Date	Code	Title	Description
2003-05-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties