ATE221891T1 - Verfahren zur reinigung von tetraethoxysilan - Google Patents

Verfahren zur reinigung von tetraethoxysilan

Info

Publication number
ATE221891T1
ATE221891T1 AT96940369T AT96940369T ATE221891T1 AT E221891 T1 ATE221891 T1 AT E221891T1 AT 96940369 T AT96940369 T AT 96940369T AT 96940369 T AT96940369 T AT 96940369T AT E221891 T1 ATE221891 T1 AT E221891T1
Authority
AT
Austria
Prior art keywords
tetraethoxysilane
pure
purifying
purified
column
Prior art date
Application number
AT96940369T
Other languages
English (en)
Inventor
Thomas M Potts
Original Assignee
Eagle Picher Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eagle Picher Ind Inc filed Critical Eagle Picher Ind Inc
Application granted granted Critical
Publication of ATE221891T1 publication Critical patent/ATE221891T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/04—Esters of silicic acids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
  • Separation Of Gases By Adsorption (AREA)
AT96940369T 1995-11-16 1996-11-14 Verfahren zur reinigung von tetraethoxysilan ATE221891T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/558,682 US5840953A (en) 1995-11-16 1995-11-16 Purified tetraethoxysilane and method of purifying
PCT/US1996/018067 WO1997018219A1 (en) 1995-11-16 1996-11-14 Purified tetraethoxysilane and method of purifying

Publications (1)

Publication Number Publication Date
ATE221891T1 true ATE221891T1 (de) 2002-08-15

Family

ID=24230519

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96940369T ATE221891T1 (de) 1995-11-16 1996-11-14 Verfahren zur reinigung von tetraethoxysilan

Country Status (9)

Country Link
US (1) US5840953A (de)
EP (1) EP0970092B1 (de)
JP (1) JP2000500457A (de)
AT (1) ATE221891T1 (de)
AU (1) AU7726696A (de)
DE (1) DE69622893T2 (de)
DK (1) DK0970092T3 (de)
ES (1) ES2176517T3 (de)
WO (1) WO1997018219A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6660875B1 (en) 1998-06-09 2003-12-09 Ppt Technologies, Llc Ion exchange purification of dielectric condensate precursor fluids and silicate esters such as tetraethylorthosilicate (TEOS)
JP4288130B2 (ja) * 2003-09-30 2009-07-01 東京エレクトロン株式会社 電気的接合部材及びプラズマ処理装置
DE102004025766A1 (de) 2004-05-26 2005-12-22 Degussa Ag Herstellung von Organosilanestern
JP4212106B2 (ja) * 2005-04-19 2009-01-21 オルガノ株式会社 ガス分離装置及びガス分離方法
JP5868977B2 (ja) 2010-08-10 2016-02-24 アイデックス ヘルス アンド サイエンス エルエルシー 液体クロマトグラフィシステム用の生体適合性管
CN103772424B (zh) * 2013-12-31 2016-01-27 贵州威顿晶磷电子材料股份有限公司 一种电子级正硅酸四乙酯的制备方法
US20170023235A1 (en) * 2015-07-21 2017-01-26 Apple Inc. Sublimator/vaporizer
EP3894044B1 (de) * 2018-11-29 2025-09-24 Fluitec N.V. Filtergehäuse, reinigungskufen und verwendungsverfahren dafür
CN109459539B (zh) * 2018-12-29 2024-03-22 金宏气体股份有限公司 一种高纯正硅酸乙酯中微量水分的检测方法及检测系统

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB802339A (en) * 1955-05-17 1958-10-01 Union Carbide Corp Preparation of orthosilicates
US3041141A (en) * 1955-09-06 1962-06-26 Baker Chem Co J T Process of purifying silane
US3002583A (en) * 1957-06-10 1961-10-03 Phillips Petroleum Co Fluid separation by gas chromatography
US2972626A (en) * 1958-01-15 1961-02-21 Monsanto Chemicals Purification of organo-silicate condensation products
US3019087A (en) * 1958-09-29 1962-01-30 Merck & Co Inc Purification of silane
US3118947A (en) * 1960-06-22 1964-01-21 Exxon Research Engineering Co Epoxide conversion process
US3267646A (en) * 1963-03-04 1966-08-23 Hewlett Packard Co Automatic preparative gas chromatograph
JPS5315477B2 (de) * 1972-09-30 1978-05-25
US4003257A (en) * 1974-03-12 1977-01-18 Nasa Analysis of volatile organic compounds
US4070444A (en) * 1976-07-21 1978-01-24 Motorola Inc. Low cost, high volume silicon purification process
US4159966A (en) * 1977-12-27 1979-07-03 The Dow Chemical Company Chromatographic column packing
US4537759A (en) * 1981-08-24 1985-08-27 Eagle-Picher Industries, Inc. Production of elemental silicon from impure silane feed
JPS5930711A (ja) * 1982-08-12 1984-02-18 Showa Denko Kk モノシランの精製法
US4447632A (en) * 1983-04-18 1984-05-08 Union Carbide Corporation Process for production of alkyl silicates from silicon metal
US4532120A (en) * 1983-12-28 1985-07-30 Ethyl Corporation Silane purification process
US4772296A (en) * 1987-05-12 1988-09-20 Eagle-Picher Industries, Inc. Method of purifying and depositing group IIIa and group Va compounds to produce epitaxial films
US5069690A (en) * 1991-02-21 1991-12-03 Air Products And Chemicals, Inc. Process for kinetic gas-solid chromatographic separations
DE4130643A1 (de) * 1991-09-14 1993-03-18 Degussa Verfahren zur reinigung von alkoxysilanen
JPH0586069A (ja) * 1991-09-26 1993-04-06 Asahi Denka Kogyo Kk 有機珪素化合物の精製法

Also Published As

Publication number Publication date
AU7726696A (en) 1997-06-05
ES2176517T3 (es) 2002-12-01
EP0970092B1 (de) 2002-08-07
DE69622893T2 (de) 2002-12-12
EP0970092A1 (de) 2000-01-12
WO1997018219A1 (en) 1997-05-22
DK0970092T3 (da) 2002-09-02
US5840953A (en) 1998-11-24
JP2000500457A (ja) 2000-01-18
DE69622893D1 (de) 2002-09-12

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee