ATE231239T1 - Analyse geladener teilchen - Google Patents

Analyse geladener teilchen

Info

Publication number
ATE231239T1
ATE231239T1 AT98903130T AT98903130T ATE231239T1 AT E231239 T1 ATE231239 T1 AT E231239T1 AT 98903130 T AT98903130 T AT 98903130T AT 98903130 T AT98903130 T AT 98903130T AT E231239 T1 ATE231239 T1 AT E231239T1
Authority
AT
Austria
Prior art keywords
source
electrodes
charged particles
pair
detector
Prior art date
Application number
AT98903130T
Other languages
English (en)
Inventor
Gareth E Derbyshire
Edmond J Bateman
Original Assignee
Council Cent Lab Res Councils
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Council Cent Lab Res Councils filed Critical Council Cent Lab Res Councils
Application granted granted Critical
Publication of ATE231239T1 publication Critical patent/ATE231239T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/06Proportional counter tubes
    • H01J47/062Multiwire proportional counter tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
AT98903130T 1997-02-14 1998-02-03 Analyse geladener teilchen ATE231239T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9703024.1A GB9703024D0 (en) 1997-02-14 1997-02-14 Charged particle analysis
PCT/GB1998/000348 WO1998036268A1 (en) 1997-02-14 1998-02-03 Charged particle analysis

Publications (1)

Publication Number Publication Date
ATE231239T1 true ATE231239T1 (de) 2003-02-15

Family

ID=10807621

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98903130T ATE231239T1 (de) 1997-02-14 1998-02-03 Analyse geladener teilchen

Country Status (10)

Country Link
US (1) US6452401B1 (de)
EP (1) EP1012587B1 (de)
JP (1) JP3830978B2 (de)
AT (1) ATE231239T1 (de)
AU (1) AU5995898A (de)
DE (1) DE69810785T2 (de)
DK (1) DK1012587T3 (de)
ES (1) ES2190061T3 (de)
GB (1) GB9703024D0 (de)
WO (1) WO1998036268A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6255126B1 (en) * 1998-12-02 2001-07-03 Formfactor, Inc. Lithographic contact elements
JP3741006B2 (ja) * 2001-08-08 2006-02-01 株式会社日立製作所 荷電粒子測定装置およびその測定方法
GB0321039D0 (en) * 2003-09-09 2003-10-08 Council Cent Lab Res Councils Ionising particle analyser
GB0506203D0 (en) * 2005-03-29 2005-05-04 Council Cent Lab Res Councils Radiation detector
DE102015004458B4 (de) 2014-06-26 2016-05-12 Elmos Semiconductor Aktiengesellschaft Vorrichtung und Verfahren für einen klassifizierenden, rauchkammerlosen Luftzustandssensor zur Prognostizierung eines folgenden Betriebszustands
DE102014019773B4 (de) 2014-12-17 2023-12-07 Elmos Semiconductor Se Vorrichtung und Verfahren zur Unterscheidung von festen Objekten, Kochdunst und Rauch mittels des Displays eines Mobiltelefons
DE102014019172B4 (de) 2014-12-17 2023-12-07 Elmos Semiconductor Se Vorrichtung und Verfahren zur Unterscheidung von festen Objekten, Kochdunst und Rauch mit einem kompensierenden optischen Messsystem
EP3261110A1 (de) * 2016-06-21 2017-12-27 Excillum AB Röntgenstrahlenquelle mit ionisierungswerkzeug

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH666135A5 (de) * 1982-12-03 1988-06-30 Slm Investissements S A Brandmelder.
JPH0225737A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd 表面分析方法および装置
FR2639436B1 (fr) 1988-10-28 1994-07-01 Schlumberger Ind Sa Procede et dispositif de localisation de particules neutres, a haute resolution
US5254861A (en) * 1992-09-29 1993-10-19 The United States Of America As Represented By The Secretary Of The Air Force Biological aerosol particle detector and method having an electronic pulse detection means
US5584938A (en) * 1993-12-10 1996-12-17 Texas Instruments Incorporated Electrostatic particle removal and characterization

Also Published As

Publication number Publication date
DE69810785T2 (de) 2003-10-23
DE69810785D1 (de) 2003-02-20
AU5995898A (en) 1998-09-08
GB9703024D0 (en) 1997-04-02
JP2001512571A (ja) 2001-08-21
EP1012587A1 (de) 2000-06-28
WO1998036268A1 (en) 1998-08-20
EP1012587B1 (de) 2003-01-15
ES2190061T3 (es) 2003-07-16
JP3830978B2 (ja) 2006-10-11
US6452401B1 (en) 2002-09-17
DK1012587T3 (da) 2003-05-05

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