ES2190061T3 - Analisis de particulas cargadas. - Google Patents

Analisis de particulas cargadas.

Info

Publication number
ES2190061T3
ES2190061T3 ES98903130T ES98903130T ES2190061T3 ES 2190061 T3 ES2190061 T3 ES 2190061T3 ES 98903130 T ES98903130 T ES 98903130T ES 98903130 T ES98903130 T ES 98903130T ES 2190061 T3 ES2190061 T3 ES 2190061T3
Authority
ES
Spain
Prior art keywords
source
electrodes
pair
detector
charged particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98903130T
Other languages
English (en)
Inventor
Gareth E Derbyshire
Edmond J Bateman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Science and Technology Facilities Council
Original Assignee
Science and Technology Facilities Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Science and Technology Facilities Council filed Critical Science and Technology Facilities Council
Application granted granted Critical
Publication of ES2190061T3 publication Critical patent/ES2190061T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/06—Proportional counter tubes
    • H01J47/062—Multiwire proportional counter tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

Un analizador de partículas cargadas que comprende una fuente (1) de partículas cargadas y un detector (3) de partículas cargadas separado de la fuente (1) e inmerso con la fuente (1) en un gas ionizable, comprendiendo el detector al menos un par de electrodos (4), caracterizado porque el par de electrodos (4) están separados por una distancia que es substancialmente menor que la separación entre la fuente (1) y el detector (3), los electrodos del par (4) están mantenidos a diferentes potenciales, y la fuente (1) es mantenida a un potencial diferente de los potenciales de los electrodos (4), estando los potenciales seleccionados de manera que las partículas cargadas emitidas por la fuente (1) son atraídas de la fuente (1) hacia cada uno del par de electrodos (4), y de manera que las partículas cargadas adyacentes al detector (3) son aceleradas hasta unas energías suficientes para ionizar el gas.
ES98903130T 1997-02-14 1998-02-03 Analisis de particulas cargadas. Expired - Lifetime ES2190061T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9703024.1A GB9703024D0 (en) 1997-02-14 1997-02-14 Charged particle analysis

Publications (1)

Publication Number Publication Date
ES2190061T3 true ES2190061T3 (es) 2003-07-16

Family

ID=10807621

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98903130T Expired - Lifetime ES2190061T3 (es) 1997-02-14 1998-02-03 Analisis de particulas cargadas.

Country Status (10)

Country Link
US (1) US6452401B1 (es)
EP (1) EP1012587B1 (es)
JP (1) JP3830978B2 (es)
AT (1) ATE231239T1 (es)
AU (1) AU5995898A (es)
DE (1) DE69810785T2 (es)
DK (1) DK1012587T3 (es)
ES (1) ES2190061T3 (es)
GB (1) GB9703024D0 (es)
WO (1) WO1998036268A1 (es)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6255126B1 (en) * 1998-12-02 2001-07-03 Formfactor, Inc. Lithographic contact elements
JP3741006B2 (ja) * 2001-08-08 2006-02-01 株式会社日立製作所 荷電粒子測定装置およびその測定方法
GB0321039D0 (en) * 2003-09-09 2003-10-08 Council Cent Lab Res Councils Ionising particle analyser
GB0506203D0 (en) * 2005-03-29 2005-05-04 Council Cent Lab Res Councils Radiation detector
DE102015004458B4 (de) 2014-06-26 2016-05-12 Elmos Semiconductor Aktiengesellschaft Vorrichtung und Verfahren für einen klassifizierenden, rauchkammerlosen Luftzustandssensor zur Prognostizierung eines folgenden Betriebszustands
DE102014019773B4 (de) 2014-12-17 2023-12-07 Elmos Semiconductor Se Vorrichtung und Verfahren zur Unterscheidung von festen Objekten, Kochdunst und Rauch mittels des Displays eines Mobiltelefons
DE102014019172B4 (de) 2014-12-17 2023-12-07 Elmos Semiconductor Se Vorrichtung und Verfahren zur Unterscheidung von festen Objekten, Kochdunst und Rauch mit einem kompensierenden optischen Messsystem
EP3261110A1 (en) * 2016-06-21 2017-12-27 Excillum AB X-ray source with ionisation tool

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH666135A5 (de) * 1982-12-03 1988-06-30 Slm Investissements S A Brandmelder.
JPH0225737A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd 表面分析方法および装置
FR2639436B1 (fr) 1988-10-28 1994-07-01 Schlumberger Ind Sa Procede et dispositif de localisation de particules neutres, a haute resolution
US5254861A (en) * 1992-09-29 1993-10-19 The United States Of America As Represented By The Secretary Of The Air Force Biological aerosol particle detector and method having an electronic pulse detection means
US5584938A (en) * 1993-12-10 1996-12-17 Texas Instruments Incorporated Electrostatic particle removal and characterization

Also Published As

Publication number Publication date
DE69810785T2 (de) 2003-10-23
DE69810785D1 (de) 2003-02-20
AU5995898A (en) 1998-09-08
GB9703024D0 (en) 1997-04-02
JP2001512571A (ja) 2001-08-21
EP1012587A1 (en) 2000-06-28
WO1998036268A1 (en) 1998-08-20
EP1012587B1 (en) 2003-01-15
JP3830978B2 (ja) 2006-10-11
US6452401B1 (en) 2002-09-17
DK1012587T3 (da) 2003-05-05
ATE231239T1 (de) 2003-02-15

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