ATE247124T1 - Herstellung von metallkomplexen durch komproportionierung - Google Patents

Herstellung von metallkomplexen durch komproportionierung

Info

Publication number
ATE247124T1
ATE247124T1 AT00111836T AT00111836T ATE247124T1 AT E247124 T1 ATE247124 T1 AT E247124T1 AT 00111836 T AT00111836 T AT 00111836T AT 00111836 T AT00111836 T AT 00111836T AT E247124 T1 ATE247124 T1 AT E247124T1
Authority
AT
Austria
Prior art keywords
metal
sup
comproportioning
production
metal complexes
Prior art date
Application number
AT00111836T
Other languages
English (en)
Inventor
John Anthony Thomas Norman
Yoshihide Senzaki
David Allen Roberts
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Application granted granted Critical
Publication of ATE247124T1 publication Critical patent/ATE247124T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
    • C07F1/08—Copper compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
    • C07F1/005—Compounds containing elements of Groups 1 or 11 of the Periodic Table without C-Metal linkages
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
AT00111836T 1999-06-10 2000-06-07 Herstellung von metallkomplexen durch komproportionierung ATE247124T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/329,417 US6096913A (en) 1999-06-10 1999-06-10 Production of metal-ligand complexes

Publications (1)

Publication Number Publication Date
ATE247124T1 true ATE247124T1 (de) 2003-08-15

Family

ID=23285285

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00111836T ATE247124T1 (de) 1999-06-10 2000-06-07 Herstellung von metallkomplexen durch komproportionierung

Country Status (8)

Country Link
US (1) US6096913A (de)
EP (1) EP1059295B1 (de)
JP (2) JP2001048827A (de)
KR (1) KR100379312B1 (de)
CN (1) CN1145630C (de)
AT (1) ATE247124T1 (de)
DE (1) DE60004439T2 (de)
TW (1) TWI229675B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6096913A (en) * 1999-06-10 2000-08-01 Air Products And Chemicals, Inc. Production of metal-ligand complexes
US6391385B1 (en) * 1999-10-18 2002-05-21 Advanced Technology Materials, Inc. Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents
US6340768B1 (en) * 2000-12-04 2002-01-22 Research Foundation Of State University Of New York MOCVD precursors based on organometalloid ligands
KR100807947B1 (ko) * 2001-01-30 2008-02-28 삼성전자주식회사 비대칭형 β-케토이미네이트 리간드 화합물의 제조방법
US6537361B2 (en) 2001-03-30 2003-03-25 Sharp Laboratories Of America, Inc. Method of the synthesis and control of PGO spin-coating precursor solutions
US6534666B1 (en) * 2001-12-27 2003-03-18 Air Products And Chemicals, Inc. Use of water and acidic water to purify liquid MOCVD precursors
JP4529434B2 (ja) * 2003-12-11 2010-08-25 東ソー株式会社 多置換ビニルシラン化合物を含んで成る銅錯体及び銅錯体組成物
US6838573B1 (en) 2004-01-30 2005-01-04 Air Products And Chemicals, Inc. Copper CVD precursors with enhanced adhesion properties

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5817196B2 (ja) * 1973-06-25 1983-04-05 三菱油化株式会社 １ カドウサクカゴウブツ ノ セイホウ
JPS50135035A (de) * 1974-04-17 1975-10-25
US4279874A (en) * 1980-04-17 1981-07-21 Exxon Research & Engineering Co. Cu(1) Acetylacetonate complexes for CO separation
US4385005A (en) * 1981-07-13 1983-05-24 Exxon Research And Engineering Co. Process for separating unsaturated hydrocarbons using copper or silver complexes with fluorinated diketonates
US4425281A (en) * 1981-07-13 1984-01-10 Exxon Research And Engineering Co. Copper or silver complexes with fluorinated diketones and unsaturated ligands
US4471152A (en) * 1983-05-06 1984-09-11 Exxon Research And Engineering Co. Separation of olefin mixtures by Cu (I) complexation
US4434317A (en) * 1983-05-06 1984-02-28 Exxon Research And Engineering Company Separation and recovery of unsaturated hydrocarbons by copper (I) complexes
US5085731A (en) * 1991-02-04 1992-02-04 Air Products And Chemicals, Inc. Volatile liquid precursors for the chemical vapor deposition of copper
JP3230389B2 (ja) * 1993-09-20 2001-11-19 三菱マテリアル株式会社 銅薄膜形成用有機銅化合物とそれを用いた銅薄膜選択成長法
JP2876980B2 (ja) * 1994-03-11 1999-03-31 三菱マテリアル株式会社 蒸気圧の高い有機金属化学蒸着による銅薄膜形成用有機銅化合物
JP2622671B2 (ja) * 1995-03-07 1997-06-18 株式会社トリケミカル研究所 銅のβ−ジケトネート錯体の製造方法
US6096913A (en) * 1999-06-10 2000-08-01 Air Products And Chemicals, Inc. Production of metal-ligand complexes

Also Published As

Publication number Publication date
US6096913A (en) 2000-08-01
EP1059295A1 (de) 2000-12-13
KR100379312B1 (ko) 2003-04-10
DE60004439T2 (de) 2004-06-24
JP2010031060A (ja) 2010-02-12
EP1059295B1 (de) 2003-08-13
KR20010049504A (ko) 2001-06-15
TWI229675B (en) 2005-03-21
JP2001048827A (ja) 2001-02-20
CN1145630C (zh) 2004-04-14
CN1277966A (zh) 2000-12-27
DE60004439D1 (de) 2003-09-18

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Legal Events

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