ATE247836T1 - Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiter - Google Patents

Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiter

Info

Publication number
ATE247836T1
ATE247836T1 AT00931398T AT00931398T ATE247836T1 AT E247836 T1 ATE247836 T1 AT E247836T1 AT 00931398 T AT00931398 T AT 00931398T AT 00931398 T AT00931398 T AT 00931398T AT E247836 T1 ATE247836 T1 AT E247836T1
Authority
AT
Austria
Prior art keywords
core
glass
layer
intended
fillets
Prior art date
Application number
AT00931398T
Other languages
English (en)
Inventor
David Carnegie Rogers
Graeme Douglas Maxwell
Alistair James Poustie
Original Assignee
British Telecomm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP99303961A external-priority patent/EP1058135A1/de
Priority claimed from EP99303962A external-priority patent/EP1058136A1/de
Priority claimed from EP99303964A external-priority patent/EP1054272A1/de
Application filed by British Telecomm filed Critical British Telecomm
Application granted granted Critical
Publication of ATE247836T1 publication Critical patent/ATE247836T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12159—Interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G02F1/0113—Glass-based, e.g. silica-based, optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Silicon Compounds (AREA)
AT00931398T 1999-05-21 2000-05-19 Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiter ATE247836T1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP99303961A EP1058135A1 (de) 1999-05-21 1999-05-21 Planarer optischer Siliziumdioxid Wellenleiter zwischen zwei Nuten
EP99303962A EP1058136A1 (de) 1999-05-21 1999-05-21 Planarer optischer Siliziumdioxid-Wellenleiter mit Nuten
EP99303963 1999-05-21
EP99303964A EP1054272A1 (de) 1999-05-21 1999-05-21 Wellenleiter- Array -Gitter mit Nuten
PCT/GB2000/001915 WO2000072060A1 (en) 1999-05-21 2000-05-19 Making grooves in planar silica optical waveguides

Publications (1)

Publication Number Publication Date
ATE247836T1 true ATE247836T1 (de) 2003-09-15

Family

ID=27443843

Family Applications (3)

Application Number Title Priority Date Filing Date
AT00931398T ATE247836T1 (de) 1999-05-21 2000-05-19 Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiter
AT00935273T ATE282837T1 (de) 1999-05-21 2000-05-19 Wellenleiter-array-gitter
AT00935272T ATE243853T1 (de) 1999-05-21 2000-05-19 Planare optische wellenleiter mit zwei nuten

Family Applications After (2)

Application Number Title Priority Date Filing Date
AT00935273T ATE282837T1 (de) 1999-05-21 2000-05-19 Wellenleiter-array-gitter
AT00935272T ATE243853T1 (de) 1999-05-21 2000-05-19 Planare optische wellenleiter mit zwei nuten

Country Status (7)

Country Link
US (3) US6773615B1 (de)
EP (3) EP1181592B1 (de)
AT (3) ATE247836T1 (de)
AU (4) AU779758B2 (de)
CA (3) CA2373546C (de)
DE (3) DE60003551T2 (de)
WO (4) WO2000072066A1 (de)

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US6580843B2 (en) * 2001-04-05 2003-06-17 Fujitsu Limited Optical device
US6709105B2 (en) 2001-04-10 2004-03-23 Johnson & Johnson Vision Care, Inc. Progressive addition lenses
JP2003075666A (ja) * 2001-06-22 2003-03-12 Furukawa Electric Co Ltd:The アレイ導波路回折格子型光合分波器
DE10164872B4 (de) 2001-11-26 2008-04-03 Hegla Fahrzeug- Und Maschinenbau Gmbh & Co. Kg Vorrichtung und Verfahren zum Konturenschneiden in Verbundglas
JP2004287093A (ja) * 2003-03-20 2004-10-14 Fujitsu Ltd 光導波路、光デバイスおよび光導波路の製造方法
US7609931B2 (en) * 2003-04-18 2009-10-27 Enablence, Inc. Planar waveguide structure with tightly curved waveguides
US7218812B2 (en) 2003-10-27 2007-05-15 Rpo Pty Limited Planar waveguide with patterned cladding and method for producing the same
DE102005016435A1 (de) * 2005-04-05 2006-10-12 Würth Elektronik Rot am See GmbH & Co. KG Optische Leiterplatte und Verfahren zu ihrer Herstellung
KR100687742B1 (ko) * 2005-06-03 2007-02-27 한국전자통신연구원 온도 무관 폴리머 광도파로열격자 소자 및 제조 방법
GB0707304D0 (en) 2007-04-16 2007-05-23 Univ Southampton Evanescent field optical waveguide devices
CN102388328A (zh) * 2009-04-10 2012-03-21 皇家飞利浦电子股份有限公司 具有弯曲狭缝的光导弯曲
JP5488226B2 (ja) * 2010-06-10 2014-05-14 富士通オプティカルコンポーネンツ株式会社 マッハツェンダ型の光変調器
JP5180341B2 (ja) * 2011-04-19 2013-04-10 日本電信電話株式会社 光部品
CN102183821A (zh) * 2011-05-17 2011-09-14 武汉光迅科技股份有限公司 一种阵列波导光栅波分复用器
WO2016125747A1 (ja) * 2015-02-04 2016-08-11 日本碍子株式会社 光導波路基板
JP2017129744A (ja) * 2016-01-20 2017-07-27 フォトンリサーチ株式会社 光合波装置
JP6839661B2 (ja) 2016-02-04 2021-03-10 古河電気工業株式会社 光素子及びその製造方法、並びに光変調器
JP7002092B2 (ja) * 2016-07-13 2022-02-04 学校法人法政大学 屈曲部を有する誘電体光導波路
CN111465879A (zh) * 2017-10-26 2020-07-28 光研公司 导光装置、光波导装置、多波长光源模块及光波导装置的制造方法
JP7623278B2 (ja) * 2018-05-22 2025-01-28 フルクサス，インク． 導波路構造体を製造するための方法、および導波路構造体
US11067751B2 (en) * 2019-10-09 2021-07-20 Globalfoundries U.S. Inc. Trench-based optical components for photonics chips
US20230244037A1 (en) * 2020-01-24 2023-08-03 Nippon Telegraph And Telephone Corporation Waveguide Type Optical Switching Circuit and Driving Method Thereof
JP7717466B2 (ja) * 2021-02-12 2025-08-04 古河電気工業株式会社 光半導体装置
JPWO2024079860A1 (de) * 2022-10-13 2024-04-18

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Also Published As

Publication number Publication date
ATE243853T1 (de) 2003-07-15
DE60004664T2 (de) 2004-06-24
DE60015961D1 (de) 2004-12-23
AU779759B2 (en) 2005-02-10
EP1183561B1 (de) 2003-08-20
EP1181592B1 (de) 2004-11-17
AU4935400A (en) 2000-12-12
EP1183561A1 (de) 2002-03-06
DE60003551D1 (de) 2003-07-31
DE60015961T2 (de) 2005-11-03
AU776921C (en) 2005-07-14
CA2372401C (en) 2005-05-17
AU5084000A (en) 2000-12-12
DE60003551T2 (de) 2004-04-29
EP1181591A1 (de) 2002-02-27
WO2000072062A1 (en) 2000-11-30
CA2373546A1 (en) 2000-11-30
CA2372581A1 (en) 2000-11-30
US6625371B1 (en) 2003-09-23
EP1181591B1 (de) 2003-06-25
WO2000072060A1 (en) 2000-11-30
CA2372401A1 (en) 2000-11-30
ATE282837T1 (de) 2004-12-15
CA2372581C (en) 2005-05-17
US6571037B1 (en) 2003-05-27
AU5082900A (en) 2000-12-12
EP1181592A1 (de) 2002-02-27
DE60004664D1 (de) 2003-09-25
US6773615B1 (en) 2004-08-10
AU5083000A (en) 2000-12-12
CA2373546C (en) 2007-05-01
AU776921B2 (en) 2004-09-23
WO2000072066A1 (en) 2000-11-30
WO2000072061A1 (en) 2000-11-30
AU779758B2 (en) 2005-02-10

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