ATE282837T1 - Wellenleiter-array-gitter - Google Patents

Wellenleiter-array-gitter

Info

Publication number
ATE282837T1
ATE282837T1 AT00935273T AT00935273T ATE282837T1 AT E282837 T1 ATE282837 T1 AT E282837T1 AT 00935273 T AT00935273 T AT 00935273T AT 00935273 T AT00935273 T AT 00935273T AT E282837 T1 ATE282837 T1 AT E282837T1
Authority
AT
Austria
Prior art keywords
core
glass
layer
intended
cladding
Prior art date
Application number
AT00935273T
Other languages
English (en)
Inventor
David Carnegie Rogers
Graeme Douglas Maxwell
Alistair James Poustie
Original Assignee
British Telecomm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP99303962A external-priority patent/EP1058136A1/de
Priority claimed from EP99303961A external-priority patent/EP1058135A1/de
Priority claimed from EP99303964A external-priority patent/EP1054272A1/de
Application filed by British Telecomm filed Critical British Telecomm
Application granted granted Critical
Publication of ATE282837T1 publication Critical patent/ATE282837T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12159—Interferometer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G02F1/0113—Glass-based, e.g. silica-based, optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Silicon Compounds (AREA)
AT00935273T 1999-05-21 2000-05-19 Wellenleiter-array-gitter ATE282837T1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP99303962A EP1058136A1 (de) 1999-05-21 1999-05-21 Planarer optischer Siliziumdioxid-Wellenleiter mit Nuten
EP99303961A EP1058135A1 (de) 1999-05-21 1999-05-21 Planarer optischer Siliziumdioxid Wellenleiter zwischen zwei Nuten
EP99303964A EP1054272A1 (de) 1999-05-21 1999-05-21 Wellenleiter- Array -Gitter mit Nuten
EP99303963 1999-05-21
PCT/GB2000/001919 WO2000072066A1 (en) 1999-05-21 2000-05-19 Arrayed waveguide gratings

Publications (1)

Publication Number Publication Date
ATE282837T1 true ATE282837T1 (de) 2004-12-15

Family

ID=27443843

Family Applications (3)

Application Number Title Priority Date Filing Date
AT00931398T ATE247836T1 (de) 1999-05-21 2000-05-19 Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiter
AT00935273T ATE282837T1 (de) 1999-05-21 2000-05-19 Wellenleiter-array-gitter
AT00935272T ATE243853T1 (de) 1999-05-21 2000-05-19 Planare optische wellenleiter mit zwei nuten

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT00931398T ATE247836T1 (de) 1999-05-21 2000-05-19 Herstellung von hohlkehlen in planarem optischen siliziumdioxid-wellenleiter

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT00935272T ATE243853T1 (de) 1999-05-21 2000-05-19 Planare optische wellenleiter mit zwei nuten

Country Status (7)

Country Link
US (3) US6773615B1 (de)
EP (3) EP1181592B1 (de)
AT (3) ATE247836T1 (de)
AU (4) AU779759B2 (de)
CA (3) CA2373546C (de)
DE (3) DE60015961T2 (de)
WO (4) WO2000072062A1 (de)

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US6580843B2 (en) * 2001-04-05 2003-06-17 Fujitsu Limited Optical device
US6709105B2 (en) 2001-04-10 2004-03-23 Johnson & Johnson Vision Care, Inc. Progressive addition lenses
JP2003075666A (ja) * 2001-06-22 2003-03-12 Furukawa Electric Co Ltd:The アレイ導波路回折格子型光合分波器
DE10164872B4 (de) 2001-11-26 2008-04-03 Hegla Fahrzeug- Und Maschinenbau Gmbh & Co. Kg Vorrichtung und Verfahren zum Konturenschneiden in Verbundglas
JP2004287093A (ja) * 2003-03-20 2004-10-14 Fujitsu Ltd 光導波路、光デバイスおよび光導波路の製造方法
US7609931B2 (en) * 2003-04-18 2009-10-27 Enablence, Inc. Planar waveguide structure with tightly curved waveguides
US7218812B2 (en) 2003-10-27 2007-05-15 Rpo Pty Limited Planar waveguide with patterned cladding and method for producing the same
DE102005016435A1 (de) * 2005-04-05 2006-10-12 Würth Elektronik Rot am See GmbH & Co. KG Optische Leiterplatte und Verfahren zu ihrer Herstellung
KR100687742B1 (ko) * 2005-06-03 2007-02-27 한국전자통신연구원 온도 무관 폴리머 광도파로열격자 소자 및 제조 방법
GB0707304D0 (en) * 2007-04-16 2007-05-23 Univ Southampton Evanescent field optical waveguide devices
JP2012523580A (ja) * 2009-04-10 2012-10-04 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 曲面スリット付き光ガイド曲がり
JP5488226B2 (ja) * 2010-06-10 2014-05-14 富士通オプティカルコンポーネンツ株式会社 マッハツェンダ型の光変調器
JP5180341B2 (ja) * 2011-04-19 2013-04-10 日本電信電話株式会社 光部品
CN102183821A (zh) * 2011-05-17 2011-09-14 武汉光迅科技股份有限公司 一种阵列波导光栅波分复用器
WO2016125747A1 (ja) * 2015-02-04 2016-08-11 日本碍子株式会社 光導波路基板
JP2017129744A (ja) * 2016-01-20 2017-07-27 フォトンリサーチ株式会社 光合波装置
WO2017135436A1 (ja) * 2016-02-04 2017-08-10 古河電気工業株式会社 光素子及びその製造方法、並びに光変調器
JP7002092B2 (ja) * 2016-07-13 2022-02-04 学校法人法政大学 屈曲部を有する誘電体光導波路
WO2019082347A1 (ja) * 2017-10-26 2019-05-02 フォトンリサーチ株式会社 導光装置、光導波装置、マルチ波長光源モジュール、及び光導波装置の製造方法
KR102877061B1 (ko) * 2018-05-22 2025-10-27 플럭서스, 인크. 도파로 구조체의 제조
US11067751B2 (en) * 2019-10-09 2021-07-20 Globalfoundries U.S. Inc. Trench-based optical components for photonics chips
JP7298076B2 (ja) * 2020-01-24 2023-06-27 日本電信電話株式会社 導波路型光スイッチ回路の駆動方法
JP7717466B2 (ja) * 2021-02-12 2025-08-04 古河電気工業株式会社 光半導体装置
JPWO2024079860A1 (de) * 2022-10-13 2024-04-18

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Also Published As

Publication number Publication date
AU4935400A (en) 2000-12-12
EP1183561A1 (de) 2002-03-06
ATE247836T1 (de) 2003-09-15
DE60004664D1 (de) 2003-09-25
US6773615B1 (en) 2004-08-10
AU779758B2 (en) 2005-02-10
EP1181591B1 (de) 2003-06-25
AU776921C (en) 2005-07-14
WO2000072066A1 (en) 2000-11-30
DE60015961D1 (de) 2004-12-23
US6625371B1 (en) 2003-09-23
ATE243853T1 (de) 2003-07-15
EP1181592A1 (de) 2002-02-27
DE60003551T2 (de) 2004-04-29
EP1183561B1 (de) 2003-08-20
WO2000072062A1 (en) 2000-11-30
DE60003551D1 (de) 2003-07-31
EP1181591A1 (de) 2002-02-27
WO2000072061A1 (en) 2000-11-30
US6571037B1 (en) 2003-05-27
AU779759B2 (en) 2005-02-10
DE60015961T2 (de) 2005-11-03
AU5083000A (en) 2000-12-12
CA2372401C (en) 2005-05-17
AU5084000A (en) 2000-12-12
WO2000072060A1 (en) 2000-11-30
CA2372581A1 (en) 2000-11-30
DE60004664T2 (de) 2004-06-24
CA2372581C (en) 2005-05-17
EP1181592B1 (de) 2004-11-17
CA2372401A1 (en) 2000-11-30
AU5082900A (en) 2000-12-12
AU776921B2 (en) 2004-09-23
CA2373546A1 (en) 2000-11-30
CA2373546C (en) 2007-05-01

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