ATE252741T1 - Verfahren zur erkennung einer verstopfung in einem druckmessenden durchflussre- gler und ein für diesen zweck verwendeter sensor - Google Patents

Verfahren zur erkennung einer verstopfung in einem druckmessenden durchflussre- gler und ein für diesen zweck verwendeter sensor

Info

Publication number
ATE252741T1
ATE252741T1 AT99935120T AT99935120T ATE252741T1 AT E252741 T1 ATE252741 T1 AT E252741T1 AT 99935120 T AT99935120 T AT 99935120T AT 99935120 T AT99935120 T AT 99935120T AT E252741 T1 ATE252741 T1 AT E252741T1
Authority
AT
Austria
Prior art keywords
pressure
flow rate
orifice
attenuation data
upstream
Prior art date
Application number
AT99935120T
Other languages
English (en)
Inventor
Tadahiro Ohmi
Seiichi Iida
Satoshi Kagatsume
Nirasaki-Shi Fujiicho
Jun Hirose
Kouji Nishino
Nobukazu Ikeda
Michio Yamaji
Ryousuke Dohi
Kazuhiro Yoshikawa
Nishi-Ku
Mutsunori Koyomogi
Tomio Uno
Eiji Ideta
Takashi Hirose
Original Assignee
Fujikin Kk
Tokyo Electron Ltd
Tadahiro Ohmi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk, Tokyo Electron Ltd, Tadahiro Ohmi filed Critical Fujikin Kk
Application granted granted Critical
Publication of ATE252741T1 publication Critical patent/ATE252741T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Measuring Fluid Pressure (AREA)
  • Control Of Fluid Pressure (AREA)
  • Measuring Volume Flow (AREA)
AT99935120T 1998-08-24 1999-08-09 Verfahren zur erkennung einer verstopfung in einem druckmessenden durchflussre- gler und ein für diesen zweck verwendeter sensor ATE252741T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23665398 1998-08-24
PCT/JP1999/004310 WO2000011531A1 (en) 1998-08-24 1999-08-09 Method for detecting plugging of pressure flow-rate controller and sensor used therefor

Publications (1)

Publication Number Publication Date
ATE252741T1 true ATE252741T1 (de) 2003-11-15

Family

ID=17003806

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99935120T ATE252741T1 (de) 1998-08-24 1999-08-09 Verfahren zur erkennung einer verstopfung in einem druckmessenden durchflussre- gler und ein für diesen zweck verwendeter sensor

Country Status (8)

Country Link
US (1) US6302130B1 (de)
EP (1) EP1035457B1 (de)
KR (1) KR100348853B1 (de)
CN (1) CN1114847C (de)
AT (1) ATE252741T1 (de)
DE (1) DE69912239T2 (de)
TW (1) TW432267B (de)
WO (1) WO2000011531A1 (de)

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JP5754853B2 (ja) * 2012-01-30 2015-07-29 株式会社フジキン 半導体製造装置のガス分流供給装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5847106B2 (ja) 2013-03-25 2016-01-20 株式会社フジキン 流量モニタ付圧力式流量制御装置。
EP2905094A1 (de) * 2014-02-07 2015-08-12 Primetals Technologies Austria GmbH Überwachung eines Kühlleitungssystems
US9904296B2 (en) * 2014-04-01 2018-02-27 Honeywell International Inc. Controlling flow in a fluid distribution system
US10219506B2 (en) * 2014-06-10 2019-03-05 Cnh Industrial America Llc Device and method for detecting blockages in an agricultural sprayer
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KR102152048B1 (ko) * 2016-03-29 2020-09-04 가부시키가이샤 후지킨 압력식 유량 제어 장치 및 유량 자기 진단 방법
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JP6753791B2 (ja) * 2017-02-07 2020-09-09 アズビル株式会社 メンテナンス時期予測装置、流量制御装置およびメンテナンス時期予測方法
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Also Published As

Publication number Publication date
US6302130B1 (en) 2001-10-16
EP1035457B1 (de) 2003-10-22
CN1275218A (zh) 2000-11-29
DE69912239T2 (de) 2004-07-29
EP1035457A1 (de) 2000-09-13
EP1035457A4 (de) 2001-10-17
WO2000011531A1 (en) 2000-03-02
DE69912239D1 (de) 2003-11-27
TW432267B (en) 2001-05-01
KR20010031332A (ko) 2001-04-16
CN1114847C (zh) 2003-07-16
KR100348853B1 (ko) 2002-08-17

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