ATE373257T1 - Verfahren zur erkennung eines anormalen durchflusses in einem durchflussregler für ein unter druck stehendes fluidum - Google Patents

Verfahren zur erkennung eines anormalen durchflusses in einem durchflussregler für ein unter druck stehendes fluidum

Info

Publication number
ATE373257T1
ATE373257T1 AT00948265T AT00948265T ATE373257T1 AT E373257 T1 ATE373257 T1 AT E373257T1 AT 00948265 T AT00948265 T AT 00948265T AT 00948265 T AT00948265 T AT 00948265T AT E373257 T1 ATE373257 T1 AT E373257T1
Authority
AT
Austria
Prior art keywords
flow rate
pressure
testing
amplitude
signal
Prior art date
Application number
AT00948265T
Other languages
English (en)
Inventor
Tadahiro Ohmi
Seiichi Iida
Satoshi Kagatsume
Jun Hirose
Kazuo Fukasawa
Hiroshi Koizumi
Hideki Nagaoka
Tomio Uno
Kouji Nishino
Nobukazu Ikeda
Ryousuke Dohi
Eiji Ideta
Original Assignee
Tokyo Electron Ltd
Fujikin Kk
Tadahiro Ohmi
Seiichi Iida
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Kk, Tadahiro Ohmi, Seiichi Iida filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of ATE373257T1 publication Critical patent/ATE373257T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/20—Excess-flow valves
    • F16K17/22—Excess-flow valves actuated by the difference of pressure between two places in the flow line
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/0227—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions
    • G05B23/0235—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions based on a comparison with predetermined threshold or range, e.g. "classical methods", carried out during normal operation; threshold adaptation or choice; when or how to compare with the threshold
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0256—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults injecting test signals and analyzing monitored process response, e.g. injecting the test signal while interrupting the normal operation of the monitored system; superimposing the test signal onto a control signal during normal operation of the monitored system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
AT00948265T 1999-08-10 2000-07-27 Verfahren zur erkennung eines anormalen durchflusses in einem durchflussregler für ein unter druck stehendes fluidum ATE373257T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22602399A JP3554509B2 (ja) 1999-08-10 1999-08-10 圧力式流量制御装置における流量異常検知方法

Publications (1)

Publication Number Publication Date
ATE373257T1 true ATE373257T1 (de) 2007-09-15

Family

ID=16838585

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00948265T ATE373257T1 (de) 1999-08-10 2000-07-27 Verfahren zur erkennung eines anormalen durchflusses in einem durchflussregler für ein unter druck stehendes fluidum

Country Status (11)

Country Link
US (1) US6450190B2 (de)
EP (1) EP1126347B1 (de)
JP (1) JP3554509B2 (de)
KR (1) KR100432632B1 (de)
CN (2) CN1156738C (de)
AT (1) ATE373257T1 (de)
CA (1) CA2345097C (de)
DE (1) DE60036362T2 (de)
IL (1) IL141448A0 (de)
TW (1) TW463076B (de)
WO (1) WO2001013191A1 (de)

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DE60208563T2 (de) * 2001-08-24 2006-07-13 Bs & B Safety Systems Ltd. Überwachungssystem für einen Druckbehälter
US6810308B2 (en) 2002-06-24 2004-10-26 Mks Instruments, Inc. Apparatus and method for mass flow controller with network access to diagnostics
US20030234045A1 (en) * 2002-06-24 2003-12-25 Ali Shajii Apparatus and method for mass flow controller with on-line diagnostics
US7004191B2 (en) * 2002-06-24 2006-02-28 Mks Instruments, Inc. Apparatus and method for mass flow controller with embedded web server
US7552015B2 (en) * 2002-06-24 2009-06-23 Mks Instruments, Inc. Apparatus and method for displaying mass flow controller pressure
US20030234047A1 (en) * 2002-06-24 2003-12-25 Ali Shajii Apparatus and method for dual processor mass flow controller
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US7809473B2 (en) * 2002-06-24 2010-10-05 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US6948508B2 (en) 2002-06-24 2005-09-27 Mks Instruments, Inc. Apparatus and method for self-calibration of mass flow controller
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US7136767B2 (en) * 2002-06-24 2006-11-14 Mks Instruments, Inc. Apparatus and method for calibration of mass flow controller
US6868862B2 (en) * 2002-06-24 2005-03-22 Mks Instruments, Inc. Apparatus and method for mass flow controller with a plurality of closed loop control code sets
WO2004010234A2 (en) * 2002-07-19 2004-01-29 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
US20040084087A1 (en) * 2002-10-30 2004-05-06 Sanfilippo John E. Apparatus and method for controlling and distributing gas flow
DE10257910B3 (de) * 2002-12-11 2004-08-12 Siemens Ag Verfahren zur Überwachung einer Rohrleitung sowie Stellungsregler für ein Regelventil
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JP4086057B2 (ja) * 2004-06-21 2008-05-14 日立金属株式会社 質量流量制御装置及びこの検定方法
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7198206B2 (en) * 2004-08-02 2007-04-03 Clear Lam, Inc. Compact gassing lance
US20060213153A1 (en) * 2005-03-03 2006-09-28 Sanfilippo James J Device and system for modified atmosphere packaging
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US9383758B2 (en) 2005-06-27 2016-07-05 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
US9921089B2 (en) 2005-06-27 2018-03-20 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
KR100725098B1 (ko) * 2005-11-17 2007-06-04 삼성전자주식회사 반도체 제조설비의 유량조절기 오동작 감지장치 및 그 방법
JP4820698B2 (ja) * 2006-07-03 2011-11-24 株式会社フジキン 圧力式流量制御装置の絞り機構下流側バルブの作動異常検出方法
JP4112594B2 (ja) * 2006-07-27 2008-07-02 ファナック株式会社 減速機異常診断方法及び減速機異常診断装置
US7880624B2 (en) * 2008-01-08 2011-02-01 Baxter International Inc. System and method for detecting occlusion using flow sensor output
JP5216632B2 (ja) * 2009-03-03 2013-06-19 東京エレクトロン株式会社 流体制御装置
JP5548208B2 (ja) * 2009-09-04 2014-07-16 大陽日酸株式会社 太陽電池用セレン化水素混合ガスの供給方法及び供給装置
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US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN103697214B (zh) * 2013-12-23 2017-02-08 沃尔达环境技术江苏股份有限公司 一种智慧阀门及其控制方法
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WO2017051520A1 (ja) * 2015-09-24 2017-03-30 株式会社フジキン 圧力式流量制御装置及びその異常検知方法
KR102020811B1 (ko) * 2015-10-28 2019-09-11 가부시키가이샤 후지킨 유량 신호 보정 방법 및 이것을 사용한 유량 제어 장치
CN108369425B (zh) * 2015-12-25 2021-03-02 株式会社富士金 流量控制装置以及使用流量控制装置的异常检测方法
JP6706121B2 (ja) * 2016-03-30 2020-06-03 株式会社フジキン 圧力制御装置および圧力制御システム
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US12421100B2 (en) * 2022-07-19 2025-09-23 7-Eleven, Inc. Anomaly detection and controlling fuel dispensing operations using fuel volume determinations
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Also Published As

Publication number Publication date
KR20010074890A (ko) 2001-08-09
CA2345097A1 (en) 2001-02-22
WO2001013191A1 (fr) 2001-02-22
US6450190B2 (en) 2002-09-17
TW463076B (en) 2001-11-11
KR100432632B1 (ko) 2004-05-22
EP1126347A4 (de) 2004-11-03
CA2345097C (en) 2004-05-11
DE60036362T2 (de) 2008-06-12
IL141448A0 (en) 2002-03-10
JP3554509B2 (ja) 2004-08-18
EP1126347A1 (de) 2001-08-22
US20020005785A1 (en) 2002-01-17
DE60036362D1 (de) 2007-10-25
CN1282848C (zh) 2006-11-01
CN1156738C (zh) 2004-07-07
CN1320230A (zh) 2001-10-31
CN1506607A (zh) 2004-06-23
JP2001051724A (ja) 2001-02-23
EP1126347B1 (de) 2007-09-12

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