ATE257277T1 - Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen - Google Patents

Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen

Info

Publication number
ATE257277T1
ATE257277T1 AT00123714T AT00123714T ATE257277T1 AT E257277 T1 ATE257277 T1 AT E257277T1 AT 00123714 T AT00123714 T AT 00123714T AT 00123714 T AT00123714 T AT 00123714T AT E257277 T1 ATE257277 T1 AT E257277T1
Authority
AT
Austria
Prior art keywords
disk
liquid treatment
shaped objects
mask
disc
Prior art date
Application number
AT00123714T
Other languages
English (en)
Inventor
Philipp Dipl-Ing Engesser
Original Assignee
Sez Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sez Ag filed Critical Sez Ag
Application granted granted Critical
Publication of ATE257277T1 publication Critical patent/ATE257277T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0422—Apparatus for fluid treatment for etching for wet etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Coating Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • ing And Chemical Polishing (AREA)
  • Photographic Processing Devices Using Wet Methods (AREA)
  • Chemically Coating (AREA)
AT00123714T 2000-10-31 2000-10-31 Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen ATE257277T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00123714A EP1202326B1 (de) 2000-10-31 2000-10-31 Vorrichtung zur Flüssigkeitsbehandlung von scheibenförmigen Gegenständen

Publications (1)

Publication Number Publication Date
ATE257277T1 true ATE257277T1 (de) 2004-01-15

Family

ID=8170251

Family Applications (2)

Application Number Title Priority Date Filing Date
AT00123714T ATE257277T1 (de) 2000-10-31 2000-10-31 Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen
AT03018179T ATE417356T1 (de) 2000-10-31 2000-10-31 Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT03018179T ATE417356T1 (de) 2000-10-31 2000-10-31 Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen

Country Status (8)

Country Link
US (3) US7172674B2 (de)
EP (3) EP1202326B1 (de)
JP (2) JP4911849B2 (de)
KR (2) KR100796709B1 (de)
CN (1) CN1175476C (de)
AT (2) ATE257277T1 (de)
DE (2) DE50015481D1 (de)
SG (1) SG128415A1 (de)

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ATE211855T1 (de) * 1999-04-28 2002-01-15 Sez Semiconduct Equip Zubehoer Vorrichtung und verfahren zur flüssigkeitsbehandlung von scheibenförmigen gegenständen
EP1202326B1 (de) * 2000-10-31 2004-01-02 Sez Ag Vorrichtung zur Flüssigkeitsbehandlung von scheibenförmigen Gegenständen
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AT411335B (de) 2002-03-06 2003-12-29 Sez Ag Verfahren zum nassbehandeln von scheibenförmigen gegenständen
AT500984B1 (de) * 2002-06-25 2007-05-15 Sez Ag Vorrichtung zur flüssigkeitsbehandlung von scheibenförmigen gegenständen
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US9147593B2 (en) * 2012-10-10 2015-09-29 Lam Research Ag Apparatus for liquid treatment of wafer shaped articles
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US9589818B2 (en) * 2012-12-20 2017-03-07 Lam Research Ag Apparatus for liquid treatment of wafer shaped articles and liquid control ring for use in same
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JP2014030045A (ja) * 2013-09-24 2014-02-13 Dainippon Screen Mfg Co Ltd 基板周縁処理装置および基板周縁処理方法
JP6090113B2 (ja) * 2013-10-30 2017-03-08 東京エレクトロン株式会社 液処理装置
JP6121962B2 (ja) * 2014-09-22 2017-04-26 株式会社Ｓｃｒｅｅｎホールディングス 基板周縁処理方法
KR102490886B1 (ko) * 2015-10-16 2023-01-25 삼성디스플레이 주식회사 박막 증착용 마스크 인장 용접 장치
US11342215B2 (en) 2017-04-25 2022-05-24 Veeco Instruments Inc. Semiconductor wafer processing chamber
CN109411402B (zh) * 2018-08-08 2021-03-30 中芯集成电路（宁波）有限公司 湿法清洗设备
CN109887871B (zh) * 2019-03-26 2021-02-02 上海华力集成电路制造有限公司 晶圆洗边装置其使用方法及一保护罩
TWI748560B (zh) * 2020-07-15 2021-12-01 弘塑科技股份有限公司 自動晶圓定位總成
WO2022126403A1 (en) * 2020-12-16 2022-06-23 Acm Research (Shanghai) , Inc. Substrate supporting apparatus
CN116264153A (zh) * 2021-12-14 2023-06-16 盛美半导体设备(上海)股份有限公司 晶圆背面清洗方法
KR102656188B1 (ko) * 2022-02-21 2024-04-11 (주)디바이스이엔지 기판 식각 처리장치 및 기판 가장자리의 식각 제어 방법

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Also Published As

Publication number Publication date
KR20070100210A (ko) 2007-10-10
JP5396456B2 (ja) 2014-01-22
CN1351368A (zh) 2002-05-29
JP4911849B2 (ja) 2012-04-04
DE50004935D1 (de) 2004-02-05
US7988818B2 (en) 2011-08-02
EP1372186B1 (de) 2008-12-10
KR20020033527A (ko) 2002-05-07
CN1175476C (zh) 2004-11-10
US20070084561A1 (en) 2007-04-19
US7172674B2 (en) 2007-02-06
JP2002246364A (ja) 2002-08-30
SG128415A1 (en) 2007-01-30
US20050026448A1 (en) 2005-02-03
KR100789337B1 (ko) 2007-12-28
JP2012080113A (ja) 2012-04-19
EP1372186A2 (de) 2003-12-17
EP1369904B1 (de) 2009-01-21
US20020050244A1 (en) 2002-05-02
US7799695B2 (en) 2010-09-21
EP1202326B1 (de) 2004-01-02
DE50015481D1 (de) 2009-01-22
EP1369904A2 (de) 2003-12-10
EP1202326A1 (de) 2002-05-02
ATE417356T1 (de) 2008-12-15
EP1369904A3 (de) 2005-10-26
KR100796709B1 (ko) 2008-01-21
EP1372186A3 (de) 2005-10-26

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