ATE258690T1 - Einrichtung zur doppelseitigen belichtung eines gedruckten schaltkreises mit masken - Google Patents

Einrichtung zur doppelseitigen belichtung eines gedruckten schaltkreises mit masken

Info

Publication number
ATE258690T1
ATE258690T1 AT97401068T AT97401068T ATE258690T1 AT E258690 T1 ATE258690 T1 AT E258690T1 AT 97401068 T AT97401068 T AT 97401068T AT 97401068 T AT97401068 T AT 97401068T AT E258690 T1 ATE258690 T1 AT E258690T1
Authority
AT
Austria
Prior art keywords
masks
printed circuit
double
mask
sided exposure
Prior art date
Application number
AT97401068T
Other languages
English (en)
Inventor
Alain Sorel
Serge Charbonnier
Original Assignee
Automa Tech Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9492165&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE258690(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Automa Tech Sa filed Critical Automa Tech Sa
Application granted granted Critical
Publication of ATE258690T1 publication Critical patent/ATE258690T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2032—Simultaneous exposure of the front side and the backside
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
AT97401068T 1996-05-15 1997-05-14 Einrichtung zur doppelseitigen belichtung eines gedruckten schaltkreises mit masken ATE258690T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9606062A FR2748887B1 (fr) 1996-05-15 1996-05-15 Installation d'exposition a la lumiere d'une plaque de circuit imprime double face a travers des cliches

Publications (1)

Publication Number Publication Date
ATE258690T1 true ATE258690T1 (de) 2004-02-15

Family

ID=9492165

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97401068T ATE258690T1 (de) 1996-05-15 1997-05-14 Einrichtung zur doppelseitigen belichtung eines gedruckten schaltkreises mit masken

Country Status (7)

Country Link
US (2) US5880820A (de)
EP (1) EP0807856B1 (de)
JP (1) JP4121584B2 (de)
CN (1) CN1093945C (de)
AT (1) ATE258690T1 (de)
DE (1) DE69727336T2 (de)
FR (1) FR2748887B1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19851575A1 (de) * 1998-11-09 2000-05-11 Mania Gmbh Verfahren und Vorrichtung zum Ausrichten zweier Fotomasken zueinander und gegebenenfalls eines unbelichteten Leiterplatten-Rohlings und zum anschließenden simultanen Belichten bei der Herstellung von doppelseitigen Leiterplatten
US6396561B1 (en) 1998-11-10 2002-05-28 Maniabarco N.V. Method and device for exposing both sides of a sheet
US6215548B1 (en) * 1999-03-11 2001-04-10 Olec Corporation Nested glass exposure tool registration device
DE19925175C1 (de) * 1999-05-27 2000-05-25 Jenoptik Jena Gmbh Einrichtung und Verfahren zur Übertragung von Mikrostrukturen
FR2796168B1 (fr) * 1999-07-08 2001-09-28 Automa Tech Sa Installation d'exposition a la lumiere d'une carte de circuit imprime double face
FR2822966B1 (fr) * 2001-03-28 2003-12-12 Automa Tech Sa Chassis d'exposition a la lumiere d'un circuit imprime
FR2861251B1 (fr) * 2003-10-17 2006-02-03 Automa Tech Sa Ensemble d'exposition a la lumiere d'un panneau de circuit imprime double face et installation comportant au moins un tel ensemble d'exposition
CN102395250B (zh) * 2011-11-01 2013-08-21 深南电路有限公司 一种电路板抽真空的装置和方法
JP6217101B2 (ja) * 2013-03-22 2017-10-25 富士電機株式会社 半導体装置の製造方法及び取り付け治具
JP6149214B2 (ja) * 2013-03-26 2017-06-21 サンエー技研株式会社 露光装置、露光方法
CN113207231B (zh) * 2021-04-29 2022-06-28 东莞市多普光电设备有限公司 一种夹取升降装置
CN115248537B (zh) * 2022-08-12 2024-11-12 杭州新诺微电子有限公司 一种双面曝光光刻机的夹持机构及其控制方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4827316A (en) * 1988-03-08 1989-05-02 Silas Brown Printing frame
US5272502A (en) * 1991-07-31 1993-12-21 Minoru Saiki Double-surface concurrent exposure device
US5337151A (en) * 1992-07-28 1994-08-09 Optical Radiation Corporation Double-sided circuit board exposure machine and method with optical registration and material variation compensation
FR2703558B1 (fr) * 1993-03-31 1995-06-30 Automa Tech Sa Installation d'exposition à la lumière d'une plaque de circuit imprimé double face à travers les clichés.
US5403684A (en) * 1993-08-11 1995-04-04 Cray Research, Inc. PCB tooling apparatus and method for forming patterns in registration on both sides of a substrate
US5871764A (en) * 1996-02-29 1999-02-16 Johnson & Johnson Consumer Products, Inc. Skin toning formulation

Also Published As

Publication number Publication date
EP0807856B1 (de) 2004-01-28
CN1170149A (zh) 1998-01-14
FR2748887A1 (fr) 1997-11-21
DE69727336D1 (de) 2004-03-04
CN1093945C (zh) 2002-11-06
JP4121584B2 (ja) 2008-07-23
FR2748887B1 (fr) 1998-08-21
JPH1063005A (ja) 1998-03-06
EP0807856A1 (de) 1997-11-19
DE69727336T2 (de) 2004-10-07
US5880820A (en) 1999-03-09
US5995205A (en) 1999-11-30

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