ATE265058T1 - Apparat in einem laser-belichtungsgerät für komplexe mikrolithographiemuster mit einem verzögerungsschaltkreis - Google Patents

Apparat in einem laser-belichtungsgerät für komplexe mikrolithographiemuster mit einem verzögerungsschaltkreis

Info

Publication number
ATE265058T1
ATE265058T1 AT98950562T AT98950562T ATE265058T1 AT E265058 T1 ATE265058 T1 AT E265058T1 AT 98950562 T AT98950562 T AT 98950562T AT 98950562 T AT98950562 T AT 98950562T AT E265058 T1 ATE265058 T1 AT E265058T1
Authority
AT
Austria
Prior art keywords
writing
clock
complex
delay circuit
delay time
Prior art date
Application number
AT98950562T
Other languages
English (en)
Inventor
Torbjoern Sandstroem
Leif Odselius
Original Assignee
Micronic Laser Systems Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronic Laser Systems Ab filed Critical Micronic Laser Systems Ab
Application granted granted Critical
Publication of ATE265058T1 publication Critical patent/ATE265058T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N2201/00—Indexing scheme relating to scanning, transmission or reproduction of documents or the like, and to details thereof
    • H04N2201/04—Scanning arrangements
    • H04N2201/047—Detection, control or error compensation of scanning velocity or position
    • H04N2201/04753—Control or error compensation of scanning position or velocity
    • H04N2201/04758—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area
    • H04N2201/04767—Control or error compensation of scanning position or velocity by controlling the position of the scanned image area by controlling the timing of the signals, e.g. by controlling the frequency o phase of the pixel clock
    • H04N2201/04781—Controlling the phase of the signals
    • H04N2201/04784—Controlling the phase of the signals using one or more clock signals selected from a number of clock signals of different phases

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Pulse Circuits (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
AT98950562T 1997-10-13 1998-10-13 Apparat in einem laser-belichtungsgerät für komplexe mikrolithographiemuster mit einem verzögerungsschaltkreis ATE265058T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9703700A SE511189C2 (sv) 1997-10-13 1997-10-13 Metod och anordning för en laserskrivare för komplexa mikrolitografiska mönster med en fördröjingskrets
PCT/SE1998/001835 WO1999019772A1 (en) 1997-10-13 1998-10-13 Apparatus for a laser writer for complex microlithographic patterns with a delay circuit

Publications (1)

Publication Number Publication Date
ATE265058T1 true ATE265058T1 (de) 2004-05-15

Family

ID=20408569

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98950562T ATE265058T1 (de) 1997-10-13 1998-10-13 Apparat in einem laser-belichtungsgerät für komplexe mikrolithographiemuster mit einem verzögerungsschaltkreis

Country Status (7)

Country Link
EP (1) EP1023638B1 (de)
JP (1) JP2001520407A (de)
AT (1) ATE265058T1 (de)
AU (1) AU9657098A (de)
DE (1) DE69823375T2 (de)
SE (1) SE511189C2 (de)
WO (1) WO1999019772A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8941085B2 (en) 2013-03-14 2015-01-27 Taiwan Semiconductor Manufacturing Company, Ltd. Electron beam lithography systems and methods including time division multiplex loading

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4549222A (en) * 1982-03-04 1985-10-22 Ing. C. Olivetti & C., S.P.A. Dot matrix printing method and printer therefor
US5635976A (en) * 1991-07-17 1997-06-03 Micronic Laser Systems Ab Method and apparatus for the production of a structure by focused laser radiation on a photosensitively coated substrate

Also Published As

Publication number Publication date
JP2001520407A (ja) 2001-10-30
SE511189C2 (sv) 1999-08-23
DE69823375D1 (de) 2004-05-27
EP1023638A1 (de) 2000-08-02
SE9703700D0 (sv) 1997-10-13
EP1023638B1 (de) 2004-04-21
WO1999019772A1 (en) 1999-04-22
SE9703700L (sv) 1999-04-14
AU9657098A (en) 1999-05-03
DE69823375T2 (de) 2005-05-04

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Legal Events

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