ATE286623T1 - Verfahren zur doppelseitigen strukturierung von supraleitenden hochtemperatur-schaltungen - Google Patents
Verfahren zur doppelseitigen strukturierung von supraleitenden hochtemperatur-schaltungenInfo
- Publication number
- ATE286623T1 ATE286623T1 AT99938739T AT99938739T ATE286623T1 AT E286623 T1 ATE286623 T1 AT E286623T1 AT 99938739 T AT99938739 T AT 99938739T AT 99938739 T AT99938739 T AT 99938739T AT E286623 T1 ATE286623 T1 AT E286623T1
- Authority
- AT
- Austria
- Prior art keywords
- double
- patterns
- reference mark
- superconducting high
- temperature circuits
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000000059 patterning Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9368898P | 1998-07-22 | 1998-07-22 | |
| PCT/US1999/015932 WO2000005770A1 (en) | 1998-07-22 | 1999-07-14 | Method for double-sided patterning of high temperature superconducting circuits |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE286623T1 true ATE286623T1 (de) | 2005-01-15 |
Family
ID=22240225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99938739T ATE286623T1 (de) | 1998-07-22 | 1999-07-14 | Verfahren zur doppelseitigen strukturierung von supraleitenden hochtemperatur-schaltungen |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6566146B1 (de) |
| EP (1) | EP1105925B1 (de) |
| JP (1) | JP2002521824A (de) |
| AT (1) | ATE286623T1 (de) |
| AU (1) | AU5315299A (de) |
| DE (1) | DE69923072D1 (de) |
| TW (1) | TW465138B (de) |
| WO (1) | WO2000005770A1 (de) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7113258B2 (en) * | 2001-01-15 | 2006-09-26 | Asml Netherlands B.V. | Lithographic apparatus |
| KR100579603B1 (ko) * | 2001-01-15 | 2006-05-12 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 |
| CN103985663A (zh) * | 2014-05-15 | 2014-08-13 | 中国电子科技集团公司第四十一研究所 | 一种用于超薄石英基片上光刻刻蚀双面薄膜电路图形的方法 |
| CN104714373B (zh) * | 2015-03-23 | 2016-10-19 | 上海新微技术研发中心有限公司 | 硅片正背面图形高精度转移的方法 |
| CN117891302B (zh) * | 2024-03-11 | 2024-05-31 | 西南交通大学 | 一种基于双面高温超导薄膜的稳流器及其稳流方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03286601A (ja) * | 1990-04-03 | 1991-12-17 | Res Dev Corp Of Japan | マイクロ波共振器 |
| US5215959A (en) * | 1990-09-21 | 1993-06-01 | University Of California, Berkeley | Devices comprised of discrete high-temperature superconductor chips disposed on a surface |
| JPH07105194B2 (ja) | 1991-09-24 | 1995-11-13 | 岩崎電気株式会社 | ランプ用ガラス管封止工程のファジイ制御装置 |
| DE69232432T2 (de) * | 1991-11-20 | 2002-07-18 | Canon K.K., Tokio/Tokyo | Verfahren zur Herstellung einer Halbleiteranordnung |
| US5472935A (en) * | 1992-12-01 | 1995-12-05 | Yandrofski; Robert M. | Tuneable microwave devices incorporating high temperature superconducting and ferroelectric films |
| US5710105A (en) * | 1995-05-11 | 1998-01-20 | E. I. Du Pont De Nemours And Company | TM0i0 mode high power high temperature superconducting filters |
| US5750473A (en) | 1995-05-11 | 1998-05-12 | E. I. Du Pont De Nemours And Company | Planar high temperature superconductor filters with backside coupling |
| JPH0945971A (ja) * | 1995-08-02 | 1997-02-14 | Oki Electric Ind Co Ltd | ジョセフソン素子の為のマスクアライメント方法及び装置 |
| US5914296A (en) * | 1997-01-30 | 1999-06-22 | E. I. Du Pont De Nemours And Company | Resonators for high power high temperature superconducting devices |
-
1999
- 1999-07-14 AT AT99938739T patent/ATE286623T1/de not_active IP Right Cessation
- 1999-07-14 WO PCT/US1999/015932 patent/WO2000005770A1/en not_active Ceased
- 1999-07-14 JP JP2000561665A patent/JP2002521824A/ja active Pending
- 1999-07-14 US US09/743,082 patent/US6566146B1/en not_active Expired - Fee Related
- 1999-07-14 DE DE69923072T patent/DE69923072D1/de not_active Expired - Lifetime
- 1999-07-14 AU AU53152/99A patent/AU5315299A/en not_active Abandoned
- 1999-07-14 EP EP99938739A patent/EP1105925B1/de not_active Expired - Lifetime
- 1999-07-28 TW TW088112451A patent/TW465138B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW465138B (en) | 2001-11-21 |
| DE69923072D1 (de) | 2005-02-10 |
| WO2000005770A1 (en) | 2000-02-03 |
| AU5315299A (en) | 2000-02-14 |
| EP1105925B1 (de) | 2005-01-05 |
| US6566146B1 (en) | 2003-05-20 |
| JP2002521824A (ja) | 2002-07-16 |
| EP1105925A1 (de) | 2001-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |