ATE298668T1 - Tintenstrahlaufzeichnungskopf und diesen kopf tragende tintenstrahlaufzeichnungsvorrichtung - Google Patents

Tintenstrahlaufzeichnungskopf und diesen kopf tragende tintenstrahlaufzeichnungsvorrichtung

Info

Publication number
ATE298668T1
ATE298668T1 AT99114856T AT99114856T ATE298668T1 AT E298668 T1 ATE298668 T1 AT E298668T1 AT 99114856 T AT99114856 T AT 99114856T AT 99114856 T AT99114856 T AT 99114856T AT E298668 T1 ATE298668 T1 AT E298668T1
Authority
AT
Austria
Prior art keywords
inkjet recording
head
pressure generating
piezoelectric
piezoelectric elements
Prior art date
Application number
AT99114856T
Other languages
English (en)
Inventor
Masato Shimada
Shinri Sakai
Yoshinao Miyata
Souichi Moriya
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1767399A external-priority patent/JP3543933B2/ja
Priority claimed from JP5022399A external-priority patent/JP3485014B2/ja
Priority claimed from JP5467099A external-priority patent/JP3512067B2/ja
Priority claimed from JP7330599A external-priority patent/JP2000263785A/ja
Priority claimed from JP7989499A external-priority patent/JP3769415B2/ja
Priority claimed from JP7993499A external-priority patent/JP2000272125A/ja
Priority claimed from JP7994499A external-priority patent/JP2000272126A/ja
Priority claimed from JP11199881A external-priority patent/JP3114808B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of ATE298668T1 publication Critical patent/ATE298668T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Facsimile Heads (AREA)
  • Ink Jet (AREA)
AT99114856T 1998-07-29 1999-07-29 Tintenstrahlaufzeichnungskopf und diesen kopf tragende tintenstrahlaufzeichnungsvorrichtung ATE298668T1 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP21419398 1998-07-29
JP31365998 1998-11-04
JP1767399A JP3543933B2 (ja) 1999-01-26 1999-01-26 インクジェット式記録ヘッド及びインクジェット式記録装置
JP5022399A JP3485014B2 (ja) 1999-02-26 1999-02-26 インクジェット式記録ヘッド及びインクジェット式記録装置
JP5467099A JP3512067B2 (ja) 1999-03-02 1999-03-02 インクジェット式記録ヘッド及びインクジェット式記録装置
JP7330599A JP2000263785A (ja) 1999-03-18 1999-03-18 アクチュエータ装置及びその製造方法並びにインクジェット式記録ヘッド及びインクジェット式記録装置
JP7989499A JP3769415B2 (ja) 1999-03-24 1999-03-24 アクチュエータ装置及びその製造方法並びにインクジェット式記録ヘッド及びインクジェット式記録装置
JP7993499A JP2000272125A (ja) 1999-03-24 1999-03-24 アクチュエータ装置及びその製造方法並びにインクジェット式記録ヘッド及びインクジェット式記録装置
JP7994499A JP2000272126A (ja) 1999-03-24 1999-03-24 アクチュエータ装置及びその製造方法並びにインクジェット式記録ヘッド及びインクジェット式記録装置
JP11199881A JP3114808B2 (ja) 1998-07-29 1999-07-14 インクジェット式記録ヘッド及びインクジェット式記録装置

Publications (1)

Publication Number Publication Date
ATE298668T1 true ATE298668T1 (de) 2005-07-15

Family

ID=27579682

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99114856T ATE298668T1 (de) 1998-07-29 1999-07-29 Tintenstrahlaufzeichnungskopf und diesen kopf tragende tintenstrahlaufzeichnungsvorrichtung

Country Status (4)

Country Link
US (1) US6502928B1 (de)
EP (1) EP0976560B1 (de)
AT (1) ATE298668T1 (de)
DE (1) DE69925960T2 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4403353B2 (ja) 2000-02-18 2010-01-27 富士フイルム株式会社 インクジェット記録ヘッドの製造方法及びプリンタ装置
JP3491688B2 (ja) * 2000-10-16 2004-01-26 セイコーエプソン株式会社 インクジェット式記録ヘッド
EP1199171A3 (de) * 2000-10-16 2003-04-09 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Tintenstrahlaufzeichnungsapparat
US6705708B2 (en) 2001-02-09 2004-03-16 Seiko Espon Corporation Piezoelectric thin-film element, ink-jet head using the same, and method for manufacture thereof
JP3728623B2 (ja) * 2001-03-02 2005-12-21 日本碍子株式会社 圧電／電歪膜型素子
JP4182329B2 (ja) 2001-09-28 2008-11-19 セイコーエプソン株式会社 圧電体薄膜素子およびその製造方法、ならびにこれを用いた液体吐出ヘッド及び液体吐出装置
US6620237B2 (en) * 2001-11-15 2003-09-16 Spectra, Inc. Oriented piezoelectric film
JP4296738B2 (ja) * 2001-11-30 2009-07-15 ブラザー工業株式会社 インクジェットヘッド
DE60324489D1 (de) * 2002-02-18 2008-12-18 Brother Ind Ltd Tintenstrahldruckkopf und damit versehene Druckvorrichtung
JP4058691B2 (ja) 2002-09-17 2008-03-12 セイコーエプソン株式会社 液体吐出ヘッド及び液体吐出装置
JP4138592B2 (ja) 2003-06-30 2008-08-27 ブラザー工業株式会社 インクジェットヘッドおよび印刷装置
WO2005028207A1 (ja) * 2003-09-24 2005-03-31 Seiko Epson Corporation 液体噴射ヘッド及びその製造方法並びに液体噴射装置
US7533972B2 (en) * 2004-02-06 2009-05-19 Fujifilm Corporation Inkjet head and manufacturing method thereof
KR100528350B1 (ko) * 2004-02-27 2005-11-15 삼성전자주식회사 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
GB0526381D0 (en) * 2005-12-23 2006-02-08 Rue De Int Ltd Transducer
US7654651B2 (en) * 2006-01-17 2010-02-02 Canon Kabushiki Kaisha Liquid discharge head and manufacturing method of the same
US7608983B2 (en) * 2006-07-18 2009-10-27 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator, liquid transporting apparatus, and liquid-droplet jetting apparatus
EP2099704B1 (de) * 2007-01-05 2010-09-01 De La Rue International Limited Verfahren zur überwachung einer dokumentsequenz
JP4300431B2 (ja) * 2007-01-15 2009-07-22 セイコーエプソン株式会社 アクチュエータ装置及びそれを用いた液体噴射ヘッド
JP5007823B2 (ja) * 2008-02-25 2012-08-22 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
US8164234B2 (en) * 2009-02-26 2012-04-24 Fujifilm Corporation Sputtered piezoelectric material
JP5196184B2 (ja) * 2009-03-11 2013-05-15 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター
JP5447829B2 (ja) * 2009-12-21 2014-03-19 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5402611B2 (ja) * 2009-12-22 2014-01-29 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP5413598B2 (ja) * 2010-03-11 2014-02-12 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2012016900A (ja) * 2010-07-08 2012-01-26 Seiko Epson Corp 液滴吐出ヘッド及び液滴吐出装置
JP5724432B2 (ja) * 2011-02-17 2015-05-27 セイコーエプソン株式会社 圧電アクチュエーター、液体噴射ヘッド、および液体噴射装置
US8939556B2 (en) * 2011-06-09 2015-01-27 Hewlett-Packard Development Company, L.P. Fluid ejection device
JP2013154611A (ja) * 2012-01-31 2013-08-15 Seiko Epson Corp 液体噴射ヘッドおよび液体噴射装置
JP2014034114A (ja) * 2012-08-07 2014-02-24 Seiko Epson Corp 液体噴射ヘッド、及び、液体噴射装置
JP6094143B2 (ja) 2012-10-25 2017-03-15 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置及び圧電素子
JP6252013B2 (ja) 2013-07-29 2017-12-27 セイコーエプソン株式会社 液体吐出ヘッド、及び、液体吐出装置
JP6233581B2 (ja) * 2013-12-26 2017-11-22 セイコーエプソン株式会社 超音波センサー及びその製造方法
JP6233164B2 (ja) 2014-04-15 2017-11-22 株式会社デンソー 圧電素子、及び、光走査装置
JP6439331B2 (ja) 2014-09-08 2018-12-19 ブラザー工業株式会社 液体吐出装置の製造方法、及び、液体吐出装置
JP6413803B2 (ja) 2015-01-29 2018-10-31 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
JP6846888B2 (ja) * 2016-08-04 2021-03-24 ローム株式会社 圧電素子利用装置およびその製造方法
JP7677076B2 (ja) * 2021-08-31 2025-05-15 セイコーエプソン株式会社 液体噴射ヘッド、および液体噴射装置
JP2024063654A (ja) * 2022-10-26 2024-05-13 東芝テック株式会社 液体吐出ヘッド及び液体吐出装置

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JPS57167272A (en) 1981-04-08 1982-10-15 Hitachi Ltd Ink drop jetting device
JPS58175314A (ja) 1982-03-11 1983-10-14 Nec Corp 薄膜圧電振動子
JP2665106B2 (ja) 1992-03-17 1997-10-22 日本碍子株式会社 圧電／電歪膜型素子
JPH05286131A (ja) 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JP3151644B2 (ja) 1993-03-08 2001-04-03 日本碍子株式会社 圧電／電歪膜型素子
JPH08127124A (ja) 1994-11-02 1996-05-21 Mita Ind Co Ltd インクジェット記録ヘッド
US5933167A (en) * 1995-04-03 1999-08-03 Seiko Epson Corporation Printer head for ink jet recording
JP3405050B2 (ja) 1996-03-13 2003-05-12 三菱マテリアル株式会社 誘電体薄膜及びその形成方法
JPH09286103A (ja) 1996-04-19 1997-11-04 Seiko Epson Corp インクジェット式記録ヘッド
JP3384958B2 (ja) 1996-10-29 2003-03-10 松下電器産業株式会社 インクジェット記録装置とその製造方法
EP1199173B1 (de) 1996-10-29 2009-04-29 Panasonic Corporation Tintenstrahlaufzeichnungsgerät und Verfahren zu seiner Herstellung
JP3414227B2 (ja) * 1997-01-24 2003-06-09 セイコーエプソン株式会社 インクジェット式記録ヘッド
JPH10226068A (ja) 1997-02-17 1998-08-25 Minolta Co Ltd インクジェットヘッド
DE69805457T2 (de) * 1997-02-21 2003-01-16 Seiko Epson Corp., Tokio/Tokyo Tintenstrahlaufzeichnungskopf
EP0875381B1 (de) * 1997-04-30 2003-01-15 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf
EP0890440B1 (de) 1997-07-10 2004-04-07 Seiko Epson Corporation Tintenstrahldruckkopf
US5984459A (en) * 1997-09-01 1999-11-16 Seiko Epson Corporation Ink-jet printing head and ink-jet printing apparatus using same

Also Published As

Publication number Publication date
US6502928B1 (en) 2003-01-07
EP0976560A3 (de) 2000-05-10
DE69925960T2 (de) 2005-12-22
EP0976560A2 (de) 2000-02-02
DE69925960D1 (de) 2005-08-04
EP0976560B1 (de) 2005-06-29

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