ATE314490T1 - Mikroelektronischer detektor auf einem chip - Google Patents

Mikroelektronischer detektor auf einem chip

Info

Publication number
ATE314490T1
ATE314490T1 AT02024303T AT02024303T ATE314490T1 AT E314490 T1 ATE314490 T1 AT E314490T1 AT 02024303 T AT02024303 T AT 02024303T AT 02024303 T AT02024303 T AT 02024303T AT E314490 T1 ATE314490 T1 AT E314490T1
Authority
AT
Austria
Prior art keywords
microchannel
substrate
chip
micro
electrodes
Prior art date
Application number
AT02024303T
Other languages
English (en)
Inventor
Dae-Sung Yoon
Yoon-Kyoung Cho
Seong-Ho Kang
Young-Sun Lee
Geun-Bae Lim
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of ATE314490T1 publication Critical patent/ATE314490T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416Systems
    • G01N27/447Systems using electrophoresis
    • G01N27/44756Apparatus specially adapted therefor
    • G01N27/44791Microapparatus
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226Construction of measuring vessels; Electrodes therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416Systems
    • G01N27/447Systems using electrophoresis
    • G01N27/44704Details; Accessories
    • G01N27/44717Arrangements for investigating the separated zones, e.g. localising zones
    • G01N27/4473Arrangements for investigating the separated zones, e.g. localising zones by electric means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Optical Measuring Cells (AREA)
  • Drying Of Semiconductors (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
AT02024303T 2001-11-08 2002-10-31 Mikroelektronischer detektor auf einem chip ATE314490T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2001-0069502A KR100438828B1 (ko) 2001-11-08 2001-11-08 칩 상의 전기적 미세 검출기

Publications (1)

Publication Number Publication Date
ATE314490T1 true ATE314490T1 (de) 2006-01-15

Family

ID=36580467

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02024303T ATE314490T1 (de) 2001-11-08 2002-10-31 Mikroelektronischer detektor auf einem chip

Country Status (7)

Country Link
US (1) US20030085719A1 (de)
EP (1) EP1312683B1 (de)
JP (1) JP2003202321A (de)
KR (1) KR100438828B1 (de)
CN (1) CN100378451C (de)
AT (1) ATE314490T1 (de)
DE (1) DE60208313T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1986186A1 (de) 2002-12-20 2008-10-29 Mitsubishi Kagaku Media Co., Ltd. Aufzeichnungsverfahren für das optische Aufzeichnungsmedium
AU2004229440B2 (en) 2003-04-10 2010-08-12 President And Fellows Of Harvard College Formation and control of fluidic species
KR100647277B1 (ko) 2003-08-14 2006-11-17 삼성전자주식회사 B형 간염 검사용 pcr 프라이머 세트 및 이를 포함하는 b형 간염 검사 키트
WO2005021151A1 (en) 2003-08-27 2005-03-10 President And Fellows Of Harvard College Electronic control of fluidic species
KR100946644B1 (ko) * 2003-12-19 2010-03-09 (주)아모레퍼시픽 에멀젼의 상 변이 측정을 위한 전자 칩의 구조 및 측정 방법
JP2005285254A (ja) 2004-03-30 2005-10-13 Mitsubishi Electric Corp 光ディスクの記録方法及び光ディスク
JP4735119B2 (ja) * 2004-08-09 2011-07-27 日本精工株式会社 反応器及びその製造方法
CA2598508A1 (fr) * 2005-02-25 2006-08-31 Commissariat A L'energie Atomique Procede et dispositif pour separer des cibles moleculaires dans un melange complexe
KR100918025B1 (ko) * 2007-12-05 2009-09-18 한국전자통신연구원 검출 소자
KR100969667B1 (ko) * 2008-03-24 2010-07-14 디지탈 지노믹스(주) 생리활성물질을 전기적으로 검출하는 방법 및 이를 위한바이오칩
JP2010204013A (ja) * 2009-03-05 2010-09-16 Kyushu Univ 粒状物質密度測定装置及び粒状物質密度測定方法
KR101065493B1 (ko) * 2009-10-13 2011-09-16 광주과학기술원 미세유체소자 및 이를 포함하는 미세유체 검사 장치
US9194838B2 (en) 2010-03-03 2015-11-24 Osaka University Method and device for identifying nucleotide, and method and device for determining nucleotide sequence of polynucleotide
US8940148B2 (en) 2010-06-22 2015-01-27 International Business Machines Corporation Nano-fluidic field effective device to control DNA transport through the same
US8598018B2 (en) 2010-06-22 2013-12-03 International Business Machines Corporation Forming an electrode having reduced corrosion and water decomposition on surface using a custom oxide layer
US8354336B2 (en) 2010-06-22 2013-01-15 International Business Machines Corporation Forming an electrode having reduced corrosion and water decomposition on surface using an organic protective layer
KR101696665B1 (ko) * 2010-09-16 2017-01-16 삼성전자주식회사 체적 음향 공진기 센서
WO2012128841A2 (en) 2011-03-24 2012-09-27 Anpac Bio-Medical Science Co., Ltd. Micro-devices for disease detection
JP2013156167A (ja) * 2012-01-30 2013-08-15 Osaka Univ 物質の移動速度の制御方法および制御装置、並びに、これらの利用
GB201207583D0 (en) * 2012-05-01 2012-06-13 Isis Innovation Electrochemical detection method and related aspects
JP6029366B2 (ja) * 2012-07-23 2016-11-24 株式会社日立ハイテクノロジーズ 前処理・電気泳動用一体型カートリッジ、前処理一体型キャピラリ電気泳動装置及び前処理一体型キャピラリ電気泳動方法
KR20150041146A (ko) 2012-08-17 2015-04-15 오사카 유니버시티 시료의 분석 방법
EP2899546A4 (de) * 2012-09-19 2016-04-27 Nec Corp Analysechip und analysevorrichtung
JP6282036B2 (ja) 2012-12-27 2018-02-21 クオンタムバイオシステムズ株式会社 物質の移動速度の制御方法および制御装置
EP3047282B1 (de) 2013-09-18 2019-05-15 Quantum Biosystems Inc. Biomolekülsequenzierungsvorrichtungen, -systeme und -verfahren
JP2015077652A (ja) 2013-10-16 2015-04-23 クオンタムバイオシステムズ株式会社 ナノギャップ電極およびその製造方法
DE102013112687A1 (de) * 2013-11-18 2015-05-21 Osram Opto Semiconductors Gmbh Verfahren zur Herstellung einer multifunktionellen Schicht, Elektrophorese-Substrat, Konverterplättchen und optoelektronisches Bauelement
US10438811B1 (en) 2014-04-15 2019-10-08 Quantum Biosystems Inc. Methods for forming nano-gap electrodes for use in nanosensors
CN104888675A (zh) * 2015-06-08 2015-09-09 南京理工大学 集成传热单元和检测单元的微流体反应器
KR101754239B1 (ko) 2015-12-28 2017-07-06 한국과학기술연구원 수용체와 표적 생체물질의 반응을 이용한 교차 전극 바이오센서
KR20190075010A (ko) 2016-04-27 2019-06-28 퀀텀 바이오시스템즈 가부시키가이샤 생체분자의 측정 및 시퀀싱을 위한 시스템 및 방법
JP7173731B2 (ja) * 2017-12-15 2022-11-16 株式会社 堀場アドバンスドテクノ 電磁気センサ
WO2019236682A1 (en) * 2018-06-05 2019-12-12 Chronus Health, Inc. Devices, cartridge, and sensors for controlling liquid movement and analyzing biological samples
IT201800006083A1 (it) * 2018-06-06 2019-12-06 Dispositivo microfluidico per la concentrazione di particelle tramite centrifugazione, e relativo dispositivo di centrifugazione e/o rilevazione
CN109847817B (zh) * 2019-01-09 2020-11-10 中国科学院半导体研究所 一种微流控芯片及其制备方法
KR102579071B1 (ko) 2021-02-18 2023-09-15 고려대학교 산학협력단 포어 구조를 구비하는 핵산 검출용 미세 유동장치

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5766934A (en) * 1989-03-13 1998-06-16 Guiseppi-Elie; Anthony Chemical and biological sensors having electroactive polymer thin films attached to microfabricated devices and possessing immobilized indicator moieties
DE4314755C2 (de) * 1993-05-05 1995-03-02 Meinhard Prof Dr Knoll Kapillarelektrophoretisches Trennverfahren sowie Vorrichtung zur Durchführung von chemischen oder biochemischen Analysen
US5856174A (en) * 1995-06-29 1999-01-05 Affymetrix, Inc. Integrated nucleic acid diagnostic device
JP3725591B2 (ja) * 1995-09-27 2005-12-14 オリンパス株式会社 小型電気泳動装置
US5906723A (en) * 1996-08-26 1999-05-25 The Regents Of The University Of California Electrochemical detector integrated on microfabricated capillary electrophoresis chips
US5858187A (en) * 1996-09-26 1999-01-12 Lockheed Martin Energy Systems, Inc. Apparatus and method for performing electrodynamic focusing on a microchip
US5958791A (en) * 1996-09-27 1999-09-28 Innovative Biotechnologies, Inc. Interdigitated electrode arrays for liposome-enhanced immunoassay and test device
US5976336A (en) * 1997-04-25 1999-11-02 Caliper Technologies Corp. Microfluidic devices incorporating improved channel geometries
WO1998049549A1 (en) * 1997-04-30 1998-11-05 Orion Research, Inc. Capillary electrophoretic separation system
US6126804A (en) * 1997-09-23 2000-10-03 The Regents Of The University Of California Integrated polymerase chain reaction/electrophoresis instrument
US6169394B1 (en) * 1998-09-18 2001-01-02 University Of The Utah Research Foundation Electrical detector for micro-analysis systems
US6261431B1 (en) * 1998-12-28 2001-07-17 Affymetrix, Inc. Process for microfabrication of an integrated PCR-CE device and products produced by the same
US6361671B1 (en) * 1999-01-11 2002-03-26 The Regents Of The University Of California Microfabricated capillary electrophoresis chip and method for simultaneously detecting multiple redox labels
US6372484B1 (en) * 1999-01-25 2002-04-16 E.I. Dupont De Nemours And Company Apparatus for integrated polymerase chain reaction and capillary electrophoresis
US6878255B1 (en) * 1999-11-05 2005-04-12 Arrowhead Center, Inc. Microfluidic devices with thick-film electrochemical detection
WO2001069226A1 (en) * 2000-03-10 2001-09-20 Dna Sciences, Inc. Cross channel device for serial sample injection
US6939451B2 (en) * 2000-09-19 2005-09-06 Aclara Biosciences, Inc. Microfluidic chip having integrated electrodes
CN1131428C (zh) * 2001-04-23 2003-12-17 清华大学 用于化学分析的毛细管电泳芯片的制备方法

Also Published As

Publication number Publication date
DE60208313D1 (de) 2006-02-02
CN1417574A (zh) 2003-05-14
KR20030038084A (ko) 2003-05-16
JP2003202321A (ja) 2003-07-18
EP1312683B1 (de) 2005-12-28
US20030085719A1 (en) 2003-05-08
EP1312683A3 (de) 2003-06-04
KR100438828B1 (ko) 2004-07-05
CN100378451C (zh) 2008-04-02
EP1312683A2 (de) 2003-05-21
DE60208313T2 (de) 2006-06-29

Similar Documents

Publication Publication Date Title
ATE314490T1 (de) Mikroelektronischer detektor auf einem chip
EP1634052A4 (de) Sensorchip und vorrichtung für berührung und/oder fluss
WO2002082253A3 (en) A touch input system
ATE500526T1 (de) Hermetische elektrowettingvorrichtung
ATE298631T1 (de) Analytisches system und verfahren
DE59803940D1 (de) Analytisches testelement mit kapillarkanal
DE50109411D1 (de) System zur Bestimmung von Analytkonzentrationen in Körperflüssigkeiten
EP1245926A3 (de) Laserzielvorrichtung mit Neigungsmessvorrichtung
IT1320357B1 (it) Dispositivo ottico di rilevamento del livello di un fluido in uncontenitore.
FR2694630B1 (fr) Capteur en optique intégrée, notamment pour substances chimiques.
FR2709189B1 (fr) Amplificateur optique à semiconducteur, présentant une non-linéarité réduite.
ATE295581T1 (de) Chipkarte
ITMI20020367A1 (it) Applicatore di un campione di fluido ad un substrato
DE602004017844D1 (de) Auf spule prüfbares doppelschnittstellenmikromodul
DK1310765T3 (da) Markeringselement til måling af bygningsværker
DE59901099D1 (de) Wasserwaage
SE0003102D0 (sv) An optical sensor
IT1321062B1 (it) Dispositivo sensore del livello di un liquido.
FR2829576B1 (fr) Procede et dispositif d'isolement et/ou determination d'un analyte
FR2716022B1 (fr) Module à semi-conducteur sans contact.
ITTO20010867A0 (it) Dispositivo sensore del livello di un liquido.
WO2003034001A3 (de) Aufnahmevorrichtung für einen ph-sensor
IT231335Y1 (it) Dispositivo misuratore di livello per fluidi, ad esempio per autoveicoli.
FR2719302B1 (fr) Borne de distribution de fluide à carte électronique autorisant le puisage.
ATE222355T1 (de) Sensor in dünnfilmbauweise

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties