ATE323893T1 - Kinematische linsenhalterung - Google Patents

Kinematische linsenhalterung

Info

Publication number
ATE323893T1
ATE323893T1 AT00116461T AT00116461T ATE323893T1 AT E323893 T1 ATE323893 T1 AT E323893T1 AT 00116461 T AT00116461 T AT 00116461T AT 00116461 T AT00116461 T AT 00116461T AT E323893 T1 ATE323893 T1 AT E323893T1
Authority
AT
Austria
Prior art keywords
mounts
flexure
radial
lens
soft
Prior art date
Application number
AT00116461T
Other languages
English (en)
Inventor
Douglas C Watson
Thomas W Novak
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of ATE323893T1 publication Critical patent/ATE323893T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70241—Optical aspects of refractive lens systems, i.e. comprising only refractive elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Epidemiology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Lens Barrels (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Fuel Cell (AREA)
  • Prostheses (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
AT00116461T 1999-08-31 2000-07-29 Kinematische linsenhalterung ATE323893T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/386,255 US6239924B1 (en) 1999-08-31 1999-08-31 Kinematic lens mounting with distributed support and radial flexure

Publications (1)

Publication Number Publication Date
ATE323893T1 true ATE323893T1 (de) 2006-05-15

Family

ID=23524830

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00116461T ATE323893T1 (de) 1999-08-31 2000-07-29 Kinematische linsenhalterung

Country Status (7)

Country Link
US (1) US6239924B1 (de)
EP (1) EP1081521B1 (de)
JP (1) JP4622058B2 (de)
KR (1) KR100654117B1 (de)
AT (1) ATE323893T1 (de)
DE (1) DE60027371T2 (de)
TW (1) TW490599B (de)

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CN109387918B (zh) * 2018-12-03 2024-06-25 长春奥普光电技术股份有限公司 一种主三一体镜定位组合装置及方法
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CN110568576B (zh) * 2019-09-09 2021-04-06 中国科学院长春光学精密机械与物理研究所 一种透镜柔性支撑装置
CN112068277B (zh) * 2020-08-31 2021-08-20 中国科学院长春光学精密机械与物理研究所 大口径光学透镜的多级柔性支撑结构
CN112128546B (zh) * 2020-09-30 2021-11-05 中国科学院国家天文台南京天文光学技术研究所 用于大尺寸拼接光学元件的支撑结构及其安装方法
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CN115421271B (zh) * 2022-10-01 2025-05-23 昆明理工大学 一种透镜柔性支撑结构
CN121232392A (zh) * 2024-06-21 2025-12-30 深圳引望智能技术有限公司 一种光学镜头、发射模组、探测装置及终端设备

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Also Published As

Publication number Publication date
KR100654117B1 (ko) 2006-12-05
TW490599B (en) 2002-06-11
EP1081521B1 (de) 2006-04-19
EP1081521A2 (de) 2001-03-07
JP2001074991A (ja) 2001-03-23
DE60027371T2 (de) 2007-06-21
DE60027371D1 (de) 2006-05-24
EP1081521A3 (de) 2004-01-02
JP4622058B2 (ja) 2011-02-02
US6239924B1 (en) 2001-05-29
KR20010020912A (ko) 2001-03-15

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