ATE356098T1 - Verbindungsverfahren und produkt - Google Patents

Verbindungsverfahren und produkt

Info

Publication number
ATE356098T1
ATE356098T1 AT02747799T AT02747799T ATE356098T1 AT E356098 T1 ATE356098 T1 AT E356098T1 AT 02747799 T AT02747799 T AT 02747799T AT 02747799 T AT02747799 T AT 02747799T AT E356098 T1 ATE356098 T1 AT E356098T1
Authority
AT
Austria
Prior art keywords
glass layer
conductive pattern
electrode
product
providing
Prior art date
Application number
AT02747799T
Other languages
English (en)
Inventor
Leif Bergstedt
Katrin Persson
Original Assignee
Imego Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imego Ab filed Critical Imego Ab
Application granted granted Critical
Publication of ATE356098T1 publication Critical patent/ATE356098T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349Creating layers of material on a substrate
    • B81C1/00357Creating layers of material on a substrate involving bonding one or several substrates on a non-temporary support, e.g. another substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019Bonding or gluing multiple substrate layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • H10W72/07331Connecting techniques
    • H10W72/07337Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Containers And Plastic Fillers For Packaging (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Supplying Of Containers To The Packaging Station (AREA)
AT02747799T 2001-07-09 2002-07-09 Verbindungsverfahren und produkt ATE356098T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0102476A SE523600C2 (sv) 2001-07-09 2001-07-09 Metod för anodisk bodning

Publications (1)

Publication Number Publication Date
ATE356098T1 true ATE356098T1 (de) 2007-03-15

Family

ID=20284811

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02747799T ATE356098T1 (de) 2001-07-09 2002-07-09 Verbindungsverfahren und produkt

Country Status (5)

Country Link
EP (1) EP1436237B1 (de)
AT (1) ATE356098T1 (de)
DE (1) DE60218717T2 (de)
SE (1) SE523600C2 (de)
WO (1) WO2003006396A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5281739B2 (ja) * 2006-07-18 2013-09-04 新光電気工業株式会社 陽極接合装置
CN103145096B (zh) * 2013-03-27 2015-04-08 山东理工大学 一种硅片与玻璃片的低温超声阳极键合方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03233429A (ja) * 1990-02-08 1991-10-17 Mitsubishi Electric Corp 液晶表示素子の製造方法
US6127629A (en) * 1994-10-03 2000-10-03 Ford Global Technologies, Inc. Hermetically sealed microelectronic device and method of forming same
EP0830324B1 (de) * 1995-01-20 1999-04-21 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Verfahren zur herstellung von glasschichten zum zwecke des anodischen bondens

Also Published As

Publication number Publication date
EP1436237B1 (de) 2007-03-07
WO2003006396A1 (en) 2003-01-23
SE0102476D0 (sv) 2001-07-09
SE0102476L (sv) 2003-01-10
SE523600C2 (sv) 2004-05-04
EP1436237A1 (de) 2004-07-14
DE60218717T2 (de) 2007-11-15
WO2003006396B1 (en) 2004-04-08
DE60218717D1 (de) 2007-04-19

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Legal Events

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