ATE394343T1 - 2-d stellelement und dazugehöriges herstellungsverfahren - Google Patents

2-d stellelement und dazugehöriges herstellungsverfahren

Info

Publication number
ATE394343T1
ATE394343T1 AT03255439T AT03255439T ATE394343T1 AT E394343 T1 ATE394343 T1 AT E394343T1 AT 03255439 T AT03255439 T AT 03255439T AT 03255439 T AT03255439 T AT 03255439T AT E394343 T1 ATE394343 T1 AT E394343T1
Authority
AT
Austria
Prior art keywords
driving
actuating element
associated manufacturing
comb electrode
support portion
Prior art date
Application number
AT03255439T
Other languages
English (en)
Inventor
Young-Chul Ko
Jin-Ho Lee
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of ATE394343T1 publication Critical patent/ATE394343T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
AT03255439T 2002-10-18 2003-09-01 2-d stellelement und dazugehöriges herstellungsverfahren ATE394343T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2002-0063853A KR100486716B1 (ko) 2002-10-18 2002-10-18 2-ｄ 액튜에이터 및 그 제조방법

Publications (1)

Publication Number Publication Date
ATE394343T1 true ATE394343T1 (de) 2008-05-15

Family

ID=32041028

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03255439T ATE394343T1 (de) 2002-10-18 2003-09-01 2-d stellelement und dazugehöriges herstellungsverfahren

Country Status (7)

Country Link
US (1) US6995495B2 (de)
EP (1) EP1411024B1 (de)
JP (1) JP2004139085A (de)
KR (1) KR100486716B1 (de)
CN (1) CN1214971C (de)
AT (1) ATE394343T1 (de)
DE (1) DE60320730D1 (de)

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Also Published As

Publication number Publication date
EP1411024B1 (de) 2008-05-07
CN1490240A (zh) 2004-04-21
EP1411024A2 (de) 2004-04-21
DE60320730D1 (de) 2008-06-19
US6995495B2 (en) 2006-02-07
KR20040035116A (ko) 2004-04-29
CN1214971C (zh) 2005-08-17
US20040081391A1 (en) 2004-04-29
KR100486716B1 (ko) 2005-05-03
EP1411024A3 (de) 2005-11-16
JP2004139085A (ja) 2004-05-13

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