ATE369495T1 - Vakuumpumpen - Google Patents

Vakuumpumpen

Info

Publication number
ATE369495T1
ATE369495T1 AT00309827T AT00309827T ATE369495T1 AT E369495 T1 ATE369495 T1 AT E369495T1 AT 00309827 T AT00309827 T AT 00309827T AT 00309827 T AT00309827 T AT 00309827T AT E369495 T1 ATE369495 T1 AT E369495T1
Authority
AT
Austria
Prior art keywords
rotor
stationary
molecular drag
threaded
stages
Prior art date
Application number
AT00309827T
Other languages
English (en)
Inventor
Ian David Stones
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Application granted granted Critical
Publication of ATE369495T1 publication Critical patent/ATE369495T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Reciprocating Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
AT00309827T 1999-11-19 2000-11-06 Vakuumpumpen ATE369495T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9927493.8A GB9927493D0 (en) 1999-11-19 1999-11-19 Improved vacuum pumps

Publications (1)

Publication Number Publication Date
ATE369495T1 true ATE369495T1 (de) 2007-08-15

Family

ID=10864863

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00309827T ATE369495T1 (de) 1999-11-19 2000-11-06 Vakuumpumpen

Country Status (6)

Country Link
US (1) US6375413B1 (de)
EP (1) EP1101945B1 (de)
JP (1) JP4864198B2 (de)
AT (1) ATE369495T1 (de)
DE (1) DE60035842T2 (de)
GB (1) GB9927493D0 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
GB0229355D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US7500822B2 (en) * 2004-04-09 2009-03-10 Edwards Vacuum, Inc. Combined vacuum pump load-lock assembly
DE102005003091A1 (de) * 2005-01-22 2006-07-27 Leybold Vacuum Gmbh Vakuum-Seitenkanalverdichter
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
GB0618745D0 (en) † 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
JP6047091B2 (ja) * 2011-06-16 2016-12-21 エドワーズ株式会社 ロータ及び真空ポンプ
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE202013005458U1 (de) * 2013-06-15 2014-09-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
RU169114U1 (ru) * 2016-12-15 2017-03-03 Николай Константинович Никулин Многопоточный молекулярно-вязкостный вакуумный насос параллельного действия
RU169121U1 (ru) * 2016-12-15 2017-03-03 Николай Константинович Никулин Многопоточный молекулярно-вязкостный вакуумный насос
US10641282B2 (en) * 2016-12-28 2020-05-05 Nidec Corporation Fan device and vacuum cleaner including the same
US10655638B2 (en) * 2018-03-15 2020-05-19 Lam Research Corporation Turbomolecular pump deposition control and particle management
CN117823429A (zh) * 2023-12-15 2024-04-05 北京中科科仪股份有限公司 一种牵引级结构及分子泵

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB242084A (en) * 1924-11-13 1925-11-05 Radions Ltd Improvements in vacuum pumps
GB679607A (en) * 1952-04-12 1952-09-17 Philips Electrical Ind Ltd Improvements in high-vacuum molecular pumps
FR2596064B1 (fr) * 1986-03-18 1990-02-02 Pf Medicament Procedes industriels de fabrication de vaccins ribosomaux et vaccins ribosomaux obtenus
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
JPH01267390A (ja) * 1988-04-18 1989-10-25 Daikin Ind Ltd 渦流形真空ポンプ
DE3885899D1 (de) * 1988-10-10 1994-01-05 Leybold Ag Pumpenstufe für eine Hochvakuumpumpe.
NL8901295A (nl) * 1989-05-24 1990-12-17 Philips Nv Werkwijze voor het bepalen van een weergeefparameter in een beeldbuis en werkwijze voor het verbeteren van een beeldweergave in een beeldbuis.
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
JPH0692799B2 (ja) * 1989-11-24 1994-11-16 ダイキン工業株式会社 真空ポンプ
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe

Also Published As

Publication number Publication date
EP1101945A2 (de) 2001-05-23
EP1101945B1 (de) 2007-08-08
JP2001182685A (ja) 2001-07-06
DE60035842D1 (de) 2007-09-20
DE60035842T2 (de) 2008-04-30
JP4864198B2 (ja) 2012-02-01
EP1101945A3 (de) 2002-06-19
GB9927493D0 (en) 2000-01-19
US6375413B1 (en) 2002-04-23

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties