EP1081387A3 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
EP1081387A3
EP1081387A3 EP00117868A EP00117868A EP1081387A3 EP 1081387 A3 EP1081387 A3 EP 1081387A3 EP 00117868 A EP00117868 A EP 00117868A EP 00117868 A EP00117868 A EP 00117868A EP 1081387 A3 EP1081387 A3 EP 1081387A3
Authority
EP
European Patent Office
Prior art keywords
fixed
pump
components
casing
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00117868A
Other languages
English (en)
French (fr)
Other versions
EP1081387B1 (de
EP1081387A2 (de
Inventor
Armin Conrad
Wolfgang Eberl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1081387A2 publication Critical patent/EP1081387A2/de
Publication of EP1081387A3 publication Critical patent/EP1081387A3/de
Application granted granted Critical
Publication of EP1081387B1 publication Critical patent/EP1081387B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electrophonic Musical Instruments (AREA)

Abstract

Die Erfindung beschreibt eine Vakuumpumpe, bestehend aus mehreren Pumpeinheiten (14, 16, 18). Mindestens eine der Pumpeinheiten besteht aus parallel geschalteten Molekularpumpstufen (16a) nach der Bauart von Gaede. Dabei kann eine solche Pumpeinheit aus mehreren Untereinheiten (16a, 16b, 16c) zusammengesetzt sein, welche aus jeweils einzelnen (16c) oder parallel geschalteten (16a, 16b) Gaedepumpstufen bestehen. Die hochvakuumseitige Pumpeinheit (14) kann beispielsweise als Turbomolekularpumpe und die der Seite mit hohem Druck zugewandte Pumpeinheit (18) als Seitenkanalpumpe ausgebildet sein.
EP00117868A 1999-09-06 2000-08-19 Vakuumpumpe Expired - Lifetime EP1081387B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19942410 1999-09-06
DE19942410A DE19942410A1 (de) 1999-09-06 1999-09-06 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP1081387A2 EP1081387A2 (de) 2001-03-07
EP1081387A3 true EP1081387A3 (de) 2002-04-17
EP1081387B1 EP1081387B1 (de) 2009-03-18

Family

ID=7920926

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00117868A Expired - Lifetime EP1081387B1 (de) 1999-09-06 2000-08-19 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6464451B1 (de)
EP (1) EP1081387B1 (de)
JP (1) JP2001090690A (de)
AT (1) ATE426098T1 (de)
DE (2) DE19942410A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
US7171786B2 (en) * 2003-12-01 2007-02-06 Tapco International Corporation Window well
EP2027015A1 (de) * 2006-06-12 2009-02-25 Mag Aerospace Industries, Inc. Regenerativer vakuum-generator für flugzeuge und andere fahrzeuge
GB0618745D0 (en) † 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE102007010068B4 (de) 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
WO2009142905A1 (en) 2008-05-20 2009-11-26 Sundew Technologies, Llc Deposition method and apparatus
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
WO1996001373A1 (en) * 1994-07-06 1996-01-18 Jiguo Chu Molecular pump with multiple air suction grooves
EP0874159A2 (de) * 1993-05-03 1998-10-28 Leybold Vakuum GmbH Reibungsvakuumpumpe mit einer Gaedepumpenstufe
DE19848406A1 (de) * 1997-10-21 1999-05-20 Varian Associates Molekularpumpe mit gerippter Rotorkonstruktion

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1809902C3 (de) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Mehrstufige Turbo Molekularhoch vakuumpumpe
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2354046A1 (de) * 1973-10-29 1975-05-07 Battelle Institut E V Elektrisch angetriebene turbomolekularvakuumpumpe
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
EP0874159A2 (de) * 1993-05-03 1998-10-28 Leybold Vakuum GmbH Reibungsvakuumpumpe mit einer Gaedepumpenstufe
WO1996001373A1 (en) * 1994-07-06 1996-01-18 Jiguo Chu Molecular pump with multiple air suction grooves
DE19848406A1 (de) * 1997-10-21 1999-05-20 Varian Associates Molekularpumpe mit gerippter Rotorkonstruktion

Also Published As

Publication number Publication date
EP1081387B1 (de) 2009-03-18
ATE426098T1 (de) 2009-04-15
DE19942410A1 (de) 2001-03-08
DE50015596D1 (de) 2009-04-30
EP1081387A2 (de) 2001-03-07
US6464451B1 (en) 2002-10-15
JP2001090690A (ja) 2001-04-03

Similar Documents

Publication Publication Date Title
CA2563248C (en) Pumping arrangement
EP1039137A3 (de) Turbomolekularpumpe
EP1041289A3 (de) Direktangetriebene Verdichtereinheit
EP1942280A3 (de) Kompressoreinheit mit einem Zentrifugalkompressor und einem Elektromotor
FR2656658B1 (fr) Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
CA2563234A1 (en) Vacuum pump
NO20054198L (no) Sentrifugalkompressorenhet
RU94037238A (ru) Газотурбонагреватель и способ его экспулатации
WO2002055883A3 (en) Turbo-molecular pump
AU1792897A (en) High-speed electric motor
GB9927493D0 (en) Improved vacuum pumps
EP1081387A3 (de) Vakuumpumpe
EP1096152A3 (de) Turbomolekularpumpe
ES2109124A1 (es) Grupo motobomba autoaspirante.
DE59710418D1 (de) Gasturbineneinheit
GB0229355D0 (en) Vacuum pumping arrangement
EP1234982B1 (de) Vakuumpumpe
DE50012061D1 (de) Vakuumpumpe mit Gaslagerung
FR2853700B1 (fr) Groupe moto-compresseur centrifuge a refrigeration assistee.
AU1609197A (en) Compressors
DE50013185D1 (de) Turbomolekularpumpe
US6672828B2 (en) Vacuum pump
AU2635897A (en) Gas-turbine unit
FR2850714B1 (fr) Pompe turbomoleculaire a entretoises multietagees de stator
ES1022180U (es) Bomba de turbina multiple

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 20020920

AKX Designation fees paid

Free format text: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

17Q First examination report despatched

Effective date: 20060717

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REF Corresponds to:

Ref document number: 50015596

Country of ref document: DE

Date of ref document: 20090430

Kind code of ref document: P

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090318

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090318

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090618

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090826

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090629

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090318

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090318

26N No opposition filed

Effective date: 20091221

BERE Be: lapsed

Owner name: PFEIFFER VACUUM G.M.B.H.

Effective date: 20090831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090831

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090831

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090619

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090819

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090819

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090318

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20120719

Year of fee payment: 13

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20140430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130902

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20140825

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20140911

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20140807

Year of fee payment: 15

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 50015596

Country of ref document: DE

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20150819

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150819

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160301

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150819