ATE371948T1 - Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung - Google Patents

Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung

Info

Publication number
ATE371948T1
ATE371948T1 AT04767777T AT04767777T ATE371948T1 AT E371948 T1 ATE371948 T1 AT E371948T1 AT 04767777 T AT04767777 T AT 04767777T AT 04767777 T AT04767777 T AT 04767777T AT E371948 T1 ATE371948 T1 AT E371948T1
Authority
AT
Austria
Prior art keywords
substrate
bridge
implementing
actuating
medial
Prior art date
Application number
AT04767777T
Other languages
English (en)
Inventor
Pierre-Louis Charvet
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE371948T1 publication Critical patent/ATE371948T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Push-Button Switches (AREA)
  • Hydrogenated Pyridines (AREA)
AT04767777T 2003-08-01 2004-07-26 Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung ATE371948T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0309534A FR2858459B1 (fr) 2003-08-01 2003-08-01 Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant

Publications (1)

Publication Number Publication Date
ATE371948T1 true ATE371948T1 (de) 2007-09-15

Family

ID=34043741

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04767777T ATE371948T1 (de) 2003-08-01 2004-07-26 Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung

Country Status (7)

Country Link
US (1) US7342472B2 (de)
EP (1) EP1652205B1 (de)
JP (1) JP4481309B2 (de)
AT (1) ATE371948T1 (de)
DE (1) DE602004008648T2 (de)
FR (1) FR2858459B1 (de)
WO (1) WO2005015594A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4740751B2 (ja) * 2005-01-21 2011-08-03 パナソニック株式会社 電気機械スイッチ
DE602005003008T2 (de) * 2005-03-21 2008-08-14 Delfmems RF MEMS Schalter mit einer flexiblen und freien Schaltmembran
US7763818B2 (en) * 2005-07-29 2010-07-27 Brigham Young University Spherical bistable mechanism
KR101188438B1 (ko) * 2006-02-20 2012-10-08 삼성전자주식회사 하향형 멤스 스위치의 제조방법 및 하향형 멤스 스위치
EP1850360A1 (de) * 2006-04-26 2007-10-31 Seiko Epson Corporation Mikroschalter mit einem ersten betätigbaren Teil und mit einem zweiten Kontaktteil
WO2007145294A1 (ja) * 2006-06-15 2007-12-21 Panasonic Corporation 電気機械素子およびそれを用いた電気機器
US8063456B2 (en) * 2006-09-12 2011-11-22 Alcatel Lucent Mechanical switch with a curved bilayer
JP5084841B2 (ja) * 2006-12-12 2012-11-28 エヌエックスピー ビー ヴィ 被制御の電極オフ状態位置を有するｍｅｍｓデバイス
ES2388126T3 (es) * 2009-03-20 2012-10-09 Delfmems Estructura de tipo MEMS con una membrana flexible y medios de accionamiento eléctrico mejorados
GB2497379B (en) * 2011-12-07 2016-06-08 Ibm A nano-electromechanical switch
ES2959419T3 (es) 2013-10-11 2024-02-26 Pulmokine Inc Formulaciones secas por aspersión
WO2017087036A1 (en) * 2015-11-20 2017-05-26 University Of South Florida Shape-morphing space frame apparatus using unit cell bistable elements
CN109950063B (zh) * 2019-04-16 2024-06-14 苏州希美微纳系统有限公司 基于杠杆原理的双稳态rf mems接触式开关
US12055927B2 (en) * 2021-02-26 2024-08-06 Honeywell International Inc. Thermal metamaterial for low power MEMS thermal control

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH670914A5 (de) 1986-09-10 1989-07-14 Landis & Gyr Ag
SE0101182D0 (sv) * 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
US7126446B2 (en) * 2001-06-15 2006-10-24 Brigham Young University Self-retracting fully compliant bistable micromechanism
US20030080839A1 (en) * 2001-10-31 2003-05-01 Wong Marvin Glenn Method for improving the power handling capacity of MEMS switches
US7053736B2 (en) * 2002-09-30 2006-05-30 Teravicta Technologies, Inc. Microelectromechanical device having an active opening switch
FR2865724A1 (fr) * 2004-02-04 2005-08-05 St Microelectronics Sa Microsysteme electromecanique pouvant basculer entre deux positions stables

Also Published As

Publication number Publication date
WO2005015594A3 (fr) 2005-06-09
US7342472B2 (en) 2008-03-11
JP4481309B2 (ja) 2010-06-16
FR2858459B1 (fr) 2006-03-10
EP1652205B1 (de) 2007-08-29
JP2007501494A (ja) 2007-01-25
US20060192641A1 (en) 2006-08-31
EP1652205A2 (de) 2006-05-03
WO2005015594A2 (fr) 2005-02-17
DE602004008648T2 (de) 2008-06-26
FR2858459A1 (fr) 2005-02-04
DE602004008648D1 (de) 2007-10-11

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