WO2005015594A3 - Commutateur micro-mecanique bistable, methode d’actionnement et procede de realisation correspondant - Google Patents

Commutateur micro-mecanique bistable, methode d’actionnement et procede de realisation correspondant Download PDF

Info

Publication number
WO2005015594A3
WO2005015594A3 PCT/FR2004/001988 FR2004001988W WO2005015594A3 WO 2005015594 A3 WO2005015594 A3 WO 2005015594A3 FR 2004001988 W FR2004001988 W FR 2004001988W WO 2005015594 A3 WO2005015594 A3 WO 2005015594A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
bridge
realizing
same
actuating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR2004/001988
Other languages
English (en)
Other versions
WO2005015594A2 (fr
Inventor
Pierre-Louis Charvet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to EP04767777A priority Critical patent/EP1652205B1/fr
Priority to US10/564,801 priority patent/US7342472B2/en
Priority to JP2006522366A priority patent/JP4481309B2/ja
Priority to DE602004008648T priority patent/DE602004008648T2/de
Publication of WO2005015594A2 publication Critical patent/WO2005015594A2/fr
Publication of WO2005015594A3 publication Critical patent/WO2005015594A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Push-Button Switches (AREA)
  • Hydrogenated Pyridines (AREA)

Abstract

Un pont (1) suspendu déformable est rattaché à un substrat (3) par deux pieds (7) disposés de manière à subdiviser le pont (1) transversalement en un segment médian (8) disposé entre les pieds (7) et deux segments périphériques (9) faisant saillie vers l'extérieur. Des actionneurs périphériques (11) et médians (10) permettent de déformer respectivement et indépendamment, les segments périphériques (9) et le segment médian (8) perpendiculairement au substrat (3). Ainsi, un contact électrique entre un premier élément (5) conducteur formé sur le substrat (3), entre le pont (1) et le substrat (3), et un deuxième élément (6) conducteur, solidaire d'une face inférieure du pont (1), peut être établi et interrompu, le commutateur prenant deux positions mécaniquement stables.
PCT/FR2004/001988 2003-08-01 2004-07-26 Commutateur micro-mecanique bistable, methode d’actionnement et procede de realisation correspondant Ceased WO2005015594A2 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP04767777A EP1652205B1 (fr) 2003-08-01 2004-07-26 Commutateur micro-mecanique bistable, methode d' actionnement et procede de realisation correspondant
US10/564,801 US7342472B2 (en) 2003-08-01 2004-07-26 Bistable micromechanical switch, actuating method and corresponding method for realizing the same
JP2006522366A JP4481309B2 (ja) 2003-08-01 2004-07-26 二安定マイクロメカニカルスイッチ、それを作動する方法、および、それを実現するための関連する方法
DE602004008648T DE602004008648T2 (de) 2003-08-01 2004-07-26 Bistabiler mikromechanischer schalter, betätigungsverfahren und entsprechendes verfahren zu seiner realisierung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0309534A FR2858459B1 (fr) 2003-08-01 2003-08-01 Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
FR0309534 2003-08-01

Publications (2)

Publication Number Publication Date
WO2005015594A2 WO2005015594A2 (fr) 2005-02-17
WO2005015594A3 true WO2005015594A3 (fr) 2005-06-09

Family

ID=34043741

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2004/001988 Ceased WO2005015594A2 (fr) 2003-08-01 2004-07-26 Commutateur micro-mecanique bistable, methode d’actionnement et procede de realisation correspondant

Country Status (7)

Country Link
US (1) US7342472B2 (fr)
EP (1) EP1652205B1 (fr)
JP (1) JP4481309B2 (fr)
AT (1) ATE371948T1 (fr)
DE (1) DE602004008648T2 (fr)
FR (1) FR2858459B1 (fr)
WO (1) WO2005015594A2 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4740751B2 (ja) * 2005-01-21 2011-08-03 パナソニック株式会社 電気機械スイッチ
DK1705676T3 (da) * 2005-03-21 2008-02-18 Delfmems RF MEMS omskifter med en fleksibel og fri omskiftermembran
US7763818B2 (en) * 2005-07-29 2010-07-27 Brigham Young University Spherical bistable mechanism
KR101188438B1 (ko) * 2006-02-20 2012-10-08 삼성전자주식회사 하향형 멤스 스위치의 제조방법 및 하향형 멤스 스위치
EP1850360A1 (fr) * 2006-04-26 2007-10-31 Seiko Epson Corporation Microrupteur avec une première pièce commandable et une seconde pièce de contact
WO2007145294A1 (fr) * 2006-06-15 2007-12-21 Panasonic Corporation Élément électromécanique et appareil électrique utilisant ledit élément
US8063456B2 (en) * 2006-09-12 2011-11-22 Alcatel Lucent Mechanical switch with a curved bilayer
US8149076B2 (en) * 2006-12-12 2012-04-03 Nxp B.V. MEMS device with controlled electrode off-state position
DK2230679T3 (da) * 2009-03-20 2012-07-30 Delfmems MEMS-struktur med en fleksibel membran og forbedrede elektriske påvirkningsmidler
GB2497379B (en) * 2011-12-07 2016-06-08 Ibm A nano-electromechanical switch
US9925184B2 (en) 2013-10-11 2018-03-27 Pulmokine, Inc. Spray-dry formulations
WO2017087036A1 (fr) * 2015-11-20 2017-05-26 University Of South Florida Appareil à structure en trame à géométrie adaptative utilisant des éléments bistables de cellule unitaire
CN109950063B (zh) * 2019-04-16 2024-06-14 苏州希美微纳系统有限公司 基于杠杆原理的双稳态rf mems接触式开关
US12055927B2 (en) * 2021-02-26 2024-08-06 Honeywell International Inc. Thermal metamaterial for low power MEMS thermal control

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4979149A (en) * 1986-09-10 1990-12-18 Lgz Landis & Gyr Zug Ag Non-volatile memory device including a micro-mechanical storage element
US20020191897A1 (en) * 2001-04-02 2002-12-19 Paul Hallbjorner Micro electromechanical switches
US20030080839A1 (en) * 2001-10-31 2003-05-01 Wong Marvin Glenn Method for improving the power handling capacity of MEMS switches

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7126446B2 (en) * 2001-06-15 2006-10-24 Brigham Young University Self-retracting fully compliant bistable micromechanism
US7053736B2 (en) * 2002-09-30 2006-05-30 Teravicta Technologies, Inc. Microelectromechanical device having an active opening switch
FR2865724A1 (fr) * 2004-02-04 2005-08-05 St Microelectronics Sa Microsysteme electromecanique pouvant basculer entre deux positions stables

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4979149A (en) * 1986-09-10 1990-12-18 Lgz Landis & Gyr Zug Ag Non-volatile memory device including a micro-mechanical storage element
US20020191897A1 (en) * 2001-04-02 2002-12-19 Paul Hallbjorner Micro electromechanical switches
US20030080839A1 (en) * 2001-10-31 2003-05-01 Wong Marvin Glenn Method for improving the power handling capacity of MEMS switches

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ROBERT PH ET AL: "Integrated rf- mems switch based on a combination of thermal and electrostatic actuation", TRANSDUCERS, SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS, 12TH INNATIONAL CONFERENCE ON, 2003, PISCATAWAY, NJ, USA,IEEE, vol. 2, 9 June 2003 (2003-06-09), pages 1714 - 1717, XP010647395, ISBN: 0-7803-7731-1 *

Also Published As

Publication number Publication date
EP1652205A2 (fr) 2006-05-03
DE602004008648D1 (de) 2007-10-11
US20060192641A1 (en) 2006-08-31
DE602004008648T2 (de) 2008-06-26
FR2858459B1 (fr) 2006-03-10
JP4481309B2 (ja) 2010-06-16
US7342472B2 (en) 2008-03-11
ATE371948T1 (de) 2007-09-15
WO2005015594A2 (fr) 2005-02-17
FR2858459A1 (fr) 2005-02-04
JP2007501494A (ja) 2007-01-25
EP1652205B1 (fr) 2007-08-29

Similar Documents

Publication Publication Date Title
WO2005015594A3 (fr) Commutateur micro-mecanique bistable, methode d’actionnement et procede de realisation correspondant
WO2007131796A3 (fr) Actionneurs micromécaniques en semi-conducteurs à base de nitrures du groupe iii
WO2008021911A3 (fr) Éléments de mémoire et commutateurs à point de croisement et réseaux constitués de ceux-ci faisant appel à des blocs de nanotubes non volatils
WO2003014789A3 (fr) Commutateurs microsysteme
ATE369612T1 (de) Bistabiler mikroschalter mit geringer stromaufnahme
WO2005065207A3 (fr) Boitiers microelectroniques et procedes associes
WO2003041133A3 (fr) Commutateur de mems electrothermique a verrouillage automatique et procede associe
WO2003083912A3 (fr) Assemblage par fusion assistee par champ
WO2003017722A3 (fr) Systeme micro-electro-mecanique (mems)
ATE401121T1 (de) Bewegungselement für kleine flüssigkeitsmengen
WO2005060401A3 (fr) Plot de transfert d'energie a contact direct et son procede de fabrication
WO2005024868A3 (fr) Commutateur de systemes mecaniques microelectriques comportant des composants de cylindres droits
WO2009060906A1 (fr) Microactionneur, dispositif optique, dispositif d'affichage, appareil d'exposition et procédé de fabrication du dispositif
WO2008021227A3 (fr) Contacts hautement profilés pour systèmes micro-électromécaniques
MY136286A (en) Bump style mems switch
WO2002099904A3 (fr) Convertisseur electromecanique comprenant au moins un element piezo-electrique
WO2004025680A3 (fr) Contacteur electrique de haute puissance a mecanisme de contact a pont ameliore
ATE472165T1 (de) Mems schalter und herstellungsverfahren
WO2006068744A3 (fr) Commutateur metal liquide integrant des structures d'un systeme microelectromecanique (mems) pour actionner ledit commutateur
WO2002043299A3 (fr) Carte fille pour systeme de prototypage
WO2004095484A3 (fr) Reduction d'oxydes sur fluide de commutation dans un commutateur a base de fluide
AU1161600A (en) Contact element
EP1246216A3 (fr) Micro-relais électrostatique, dispositif radio et dispositif de mesure utilisant le micro-relais électrostatique, et procédé de commutation
WO2003016204A1 (fr) Actionneur et commutateur
WO2006036560A3 (fr) Micro-commutateurs electromecaniques a membranes deformables

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2004767777

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2006192641

Country of ref document: US

Ref document number: 10564801

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 2006522366

Country of ref document: JP

WWP Wipo information: published in national office

Ref document number: 2004767777

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 10564801

Country of ref document: US

WWG Wipo information: grant in national office

Ref document number: 2004767777

Country of ref document: EP