ATE372857T1 - Gelenkarmroboter - Google Patents

Gelenkarmroboter

Info

Publication number
ATE372857T1
ATE372857T1 AT04016447T AT04016447T ATE372857T1 AT E372857 T1 ATE372857 T1 AT E372857T1 AT 04016447 T AT04016447 T AT 04016447T AT 04016447 T AT04016447 T AT 04016447T AT E372857 T1 ATE372857 T1 AT E372857T1
Authority
AT
Austria
Prior art keywords
arm
pivotal axis
reference line
articulated robot
articled
Prior art date
Application number
AT04016447T
Other languages
English (en)
Inventor
Yasuhiko Hashimoto
Eiichi Yamaki
Original Assignee
Kawasaki Heavy Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Ind Ltd filed Critical Kawasaki Heavy Ind Ltd
Application granted granted Critical
Publication of ATE372857T1 publication Critical patent/ATE372857T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/06—Program-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Fuel Cell (AREA)
AT04016447T 2003-07-14 2004-07-13 Gelenkarmroboter ATE372857T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003274371A JP3999712B2 (ja) 2003-07-14 2003-07-14 多関節ロボット

Publications (1)

Publication Number Publication Date
ATE372857T1 true ATE372857T1 (de) 2007-09-15

Family

ID=33475550

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04016447T ATE372857T1 (de) 2003-07-14 2004-07-13 Gelenkarmroboter

Country Status (6)

Country Link
US (1) US7383751B2 (de)
EP (1) EP1498228B1 (de)
JP (1) JP3999712B2 (de)
KR (1) KR100592064B1 (de)
AT (1) ATE372857T1 (de)
DE (1) DE602004008837T2 (de)

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US9248568B2 (en) 2005-07-11 2016-02-02 Brooks Automation, Inc. Unequal link SCARA arm
JP4098338B2 (ja) 2006-07-20 2008-06-11 川崎重工業株式会社 ウェハ移載装置および基板移載装置
US7531979B2 (en) * 2006-09-18 2009-05-12 Asm Technology Singapore Pte Ltd. Direct drive robotic manipulator
JP4980127B2 (ja) * 2007-04-24 2012-07-18 川崎重工業株式会社 基板搬送ロボット
US8777547B2 (en) 2009-01-11 2014-07-15 Applied Materials, Inc. Systems, apparatus and methods for transporting substrates
JP5504641B2 (ja) * 2009-02-13 2014-05-28 株式会社安川電機 基板搬送用ロボット及びそれを備えた基板搬送装置、半導体製造装置
JP2011119556A (ja) * 2009-12-07 2011-06-16 Yaskawa Electric Corp 水平多関節ロボットおよびそれを備えた搬送装置
JP5462064B2 (ja) * 2010-04-28 2014-04-02 日本電産サンキョー株式会社 産業用ロボット
DE102011077546A1 (de) * 2011-06-15 2012-12-20 Technische Universität Berlin Verfahren zum Betreiben eines Roboters, Roboter und Robotersystem
US9076829B2 (en) * 2011-08-08 2015-07-07 Applied Materials, Inc. Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
US8768513B2 (en) * 2011-08-08 2014-07-01 Applied Materials, Inc. Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots
KR20130017379A (ko) * 2011-08-10 2013-02-20 금오공과대학교 산학협력단 다관절 로봇
US9076830B2 (en) 2011-11-03 2015-07-07 Applied Materials, Inc. Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm
KR20130096072A (ko) * 2012-02-21 2013-08-29 삼성전자주식회사 기판 반송 장치
JP6110636B2 (ja) 2012-08-09 2017-04-05 日本電産サンキョー株式会社 産業用ロボット
WO2014024690A1 (ja) * 2012-08-09 2014-02-13 日本電産サンキョー株式会社 産業用ロボット
JP5853991B2 (ja) * 2013-05-22 2016-02-09 株式会社安川電機 基板搬送ロボット、基板搬送システムおよび基板搬送方法
US10780586B2 (en) 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears
WO2015020089A1 (ja) * 2013-08-09 2015-02-12 日本電産サンキョー株式会社 水平多関節ロボットおよび水平多関節ロボットの製造方法
JP6235881B2 (ja) * 2013-08-09 2017-11-22 日本電産サンキョー株式会社 産業用ロボット
JP6374295B2 (ja) * 2014-10-30 2018-08-15 日本電産サンキョー株式会社 産業用ロボット
JP6468804B2 (ja) * 2014-10-30 2019-02-13 ライフロボティクス株式会社 ロボットアーム機構
EP3238885B1 (de) 2014-12-26 2022-05-04 Kawasaki Jukogyo Kabushiki Kaisha Zweiarmiger roboter
JP6027661B2 (ja) * 2015-09-30 2016-11-16 川崎重工業株式会社 基板搬送ロボット
WO2017090186A1 (ja) * 2015-11-27 2017-06-01 株式会社日立国際電気 基板処理装置
JP6492271B2 (ja) 2016-04-08 2019-04-03 株式会社安川電機 搬送システムおよびロボット
EP3251806B1 (de) * 2016-05-30 2021-03-10 Seiko Epson Corporation Motoreinheit und roboter
JP2018019471A (ja) * 2016-07-26 2018-02-01 セイコーエプソン株式会社 ロボット及びモーター
JP1612908S (de) * 2018-03-29 2018-09-03
USD892881S1 (en) * 2018-03-29 2020-08-11 Daihen Corporation Power transmission unit and power receiving unit of an industrial robot arm
JP1612912S (de) * 2018-03-29 2018-09-03
JP1612766S (de) * 2018-03-29 2018-09-03
JP1619125S (de) * 2018-03-29 2018-11-26
US11535460B2 (en) * 2018-05-31 2022-12-27 Brooks Automation Us, Llc Substrate processing apparatus
JP6649995B2 (ja) * 2018-06-22 2020-02-19 川崎重工業株式会社 基板搬送ロボット
US10801583B2 (en) * 2018-07-01 2020-10-13 Softwheel Ltd. Device and method for transferring rotational power and method of using same
JP7078479B2 (ja) 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
JP7705388B2 (ja) * 2019-11-01 2025-07-09 ラム リサーチ コーポレーション 重力場センサを備えたウエハハンドリングロボット
JP2020074440A (ja) * 2020-01-17 2020-05-14 川崎重工業株式会社 基板搬送ロボット
CN113681548A (zh) * 2021-08-31 2021-11-23 深圳汇控智能技术有限公司 一种直线径向伸缩运动的机器人
KR102394121B1 (ko) * 2021-10-08 2022-05-04 (주) 티로보틱스 기판 이송 로봇을 챔버 내에서 주행하기 위한 주행 로봇
KR102714119B1 (ko) * 2022-03-18 2024-10-07 에이치비솔루션(주) 웨이퍼 매니퓰레이터
WO2023188177A1 (ja) * 2022-03-30 2023-10-05 平田機工株式会社 基板搬送システム及び移載ロボット制御装置
JP7785046B2 (ja) 2023-07-06 2025-12-12 株式会社安川電機 ロボット

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JPS63272474A (ja) * 1987-04-30 1988-11-09 日本電子株式会社 試料搬送ア−ム
US5064340A (en) 1989-01-20 1991-11-12 Genmark Automation Precision arm mechanism
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IT1251017B (it) * 1991-05-21 1995-04-28 Ugo Crippa Meccanismo per compiere traiettorie prefissate assimilabili ad ellittiche
JP3098809B2 (ja) * 1991-07-25 2000-10-16 東京応化工業株式会社 ウェハ処理方法
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US5765444A (en) * 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
JPH09102526A (ja) * 1995-10-05 1997-04-15 Kokusai Electric Co Ltd 真空内基板搬送装置
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US5993142A (en) * 1997-07-10 1999-11-30 Genmark Automation, Inc. Robot having multiple degrees of freedom in an isolated environment
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JPH11138472A (ja) 1997-11-07 1999-05-25 Yaskawa Electric Corp 水平多関節ロボット
JP3725355B2 (ja) * 1999-02-17 2005-12-07 三菱電機株式会社 ロボット装置のアーム駆動機構
JP2001137181A (ja) 1999-11-16 2001-05-22 Olympus Optical Co Ltd 内視鏡
JP2001310287A (ja) * 2000-04-28 2001-11-06 Shinko Electric Co Ltd ロボット用アーム装置
JP2002066966A (ja) * 2000-08-25 2002-03-05 Ishii Hyoki Corp 搬送ロボット
JP2003220586A (ja) * 2002-01-22 2003-08-05 Nissin Electric Co Ltd 物品搬送ロボット及び真空処理装置
JP2004235538A (ja) * 2003-01-31 2004-08-19 Tokyo Electron Ltd 搬送装置，真空処理装置およびｏリング

Also Published As

Publication number Publication date
KR20050008523A (ko) 2005-01-21
KR100592064B1 (ko) 2006-06-21
EP1498228A1 (de) 2005-01-19
US7383751B2 (en) 2008-06-10
US20050011294A1 (en) 2005-01-20
DE602004008837D1 (de) 2007-10-25
JP3999712B2 (ja) 2007-10-31
JP2005039047A (ja) 2005-02-10
EP1498228B1 (de) 2007-09-12
DE602004008837T2 (de) 2008-06-12

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Legal Events

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