ATE375070T1 - Dünnfilm-herstellungstechnik für implantierbare elektroden - Google Patents

Dünnfilm-herstellungstechnik für implantierbare elektroden

Info

Publication number
ATE375070T1
ATE375070T1 AT96900778T AT96900778T ATE375070T1 AT E375070 T1 ATE375070 T1 AT E375070T1 AT 96900778 T AT96900778 T AT 96900778T AT 96900778 T AT96900778 T AT 96900778T AT E375070 T1 ATE375070 T1 AT E375070T1
Authority
AT
Austria
Prior art keywords
thin film
production technology
film production
implantable electrodes
wires
Prior art date
Application number
AT96900778T
Other languages
English (en)
Inventor
John Parker
Claudiu Treaba
Original Assignee
Cochlear Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cochlear Ltd filed Critical Cochlear Ltd
Application granted granted Critical
Publication of ATE375070T1 publication Critical patent/ATE375070T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/02—Details
    • A61N1/04—Electrodes
    • A61N1/05—Electrodes for implantation or insertion into the body, e.g. heart electrode
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/02—Details
    • A61N1/04—Electrodes
    • A61N1/05—Electrodes for implantation or insertion into the body, e.g. heart electrode
    • A61N1/0526—Head electrodes
    • A61N1/0541—Cochlear electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H10W74/019—Manufacture or treatment using temporary auxiliary substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases

Landscapes

  • Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Heart & Thoracic Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Public Health (AREA)
  • Cardiology (AREA)
  • Otolaryngology (AREA)
  • Electrotherapy Devices (AREA)
  • Micromachines (AREA)
  • Non-Insulated Conductors (AREA)
AT96900778T 1996-01-31 1996-01-31 Dünnfilm-herstellungstechnik für implantierbare elektroden ATE375070T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/AU1996/000043 WO1997028668A1 (en) 1996-01-31 1996-01-31 Thin film fabrication technique for implantable electrodes
CA002246057A CA2246057C (en) 1996-01-31 1996-01-31 Thin film fabrication technique for implantable electrodes
US08/641,537 US5720099A (en) 1996-01-31 1996-05-01 Thin film fabrication technique for implantable electrodes

Publications (1)

Publication Number Publication Date
ATE375070T1 true ATE375070T1 (de) 2007-10-15

Family

ID=27156918

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96900778T ATE375070T1 (de) 1996-01-31 1996-01-31 Dünnfilm-herstellungstechnik für implantierbare elektroden

Country Status (6)

Country Link
US (1) US5720099A (de)
EP (1) EP0888701B1 (de)
AT (1) ATE375070T1 (de)
AU (1) AU714520B2 (de)
CA (1) CA2246057C (de)
WO (1) WO1997028668A1 (de)

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09312374A (ja) 1996-05-24 1997-12-02 Sony Corp 半導体パッケージ及びその製造方法
US6129753A (en) * 1998-03-27 2000-10-10 Advanced Bionics Corporation Cochlear electrode array with electrode contacts on medial side
JPH1140595A (ja) * 1997-07-16 1999-02-12 Mitsubishi Electric Corp ワイヤ配線方法、このワイヤ配線方法に使用する配線分岐パッド、および、ボンディング装置、並びに、ワイヤ配線方法をコンピュータに実行させるためのプログラムを記録したコンピュータ読み取り可能な記録媒体
US6501994B1 (en) 1997-12-24 2002-12-31 Cardiac Pacemakers, Inc. High impedance electrode tip
US6212434B1 (en) 1998-07-22 2001-04-03 Cardiac Pacemakers, Inc. Single pass lead system
US6501990B1 (en) * 1999-12-23 2002-12-31 Cardiac Pacemakers, Inc. Extendable and retractable lead having a snap-fit terminal connector
US6463334B1 (en) 1998-11-02 2002-10-08 Cardiac Pacemakers, Inc. Extendable and retractable lead
US6470754B1 (en) * 1998-08-19 2002-10-29 Wisconsin Alumni Research Foundation Sealed capacitive pressure sensors
US6862805B1 (en) * 1998-08-26 2005-03-08 Advanced Bionics Corporation Method of making a cochlear electrode array having current-focusing and tissue-treating features
JP2002538974A (ja) * 1999-03-12 2002-11-19 カリフォルニア インスティテュート オブ テクノロジー Ｉｃ共存性パリレンｍｅｍｓ技法と集積センサにおけるその用途
US6391220B1 (en) 1999-08-18 2002-05-21 Fujitsu Limited, Inc. Methods for fabricating flexible circuit structures
US6782619B2 (en) * 2001-08-17 2004-08-31 Advanced Cochlear Systems, Inc. Method of making high contact density electrode array
AU2002325055A1 (en) * 2001-09-28 2003-04-14 Otologics Llc Implantable hearing aid with improved sealing
WO2004009176A1 (en) * 2002-07-19 2004-01-29 Arizona Board Of Regents Acting For And On Behalf Of Arizona State University Implantable electrode with flexible region to accommodate micro-movement
US8380326B2 (en) * 2002-08-09 2013-02-19 Second Sight Medical Products, Inc. Insulated implantable electrical circuit
EP1428551A1 (de) * 2002-12-13 2004-06-16 W.C. Heraeus GmbH & Co. KG Stimulationselektrode, sowie deren Herstellung und Verwendung
ES2211325B1 (es) * 2002-12-18 2005-12-16 Instituto Cientifico Y Tecnologico De Navarra, S.A. Guia portadora de electrodos, especialmente para implantes cocleares, implante coclear provisto de dicha guia, y procedimiento de fabricacion de guias portadoras de electrodos.
AU2003900773A0 (en) * 2003-02-21 2003-03-13 Cochlear Limited Telescopic array for a cochlear implant
US8229574B2 (en) * 2003-02-21 2012-07-24 Cochlear Limited Telescopic electrode array
US20050021117A1 (en) * 2003-07-21 2005-01-27 Jiping He Flexible integrated head-stage for neural interface
DE10360624B4 (de) * 2003-12-19 2007-05-03 W.C. Heraeus Gmbh Elektrodenstruktur, Verfahren zu ihrer Herstellung und ihre Verwendung
US7245973B2 (en) 2003-12-23 2007-07-17 Cardiac Pacemakers, Inc. His bundle mapping, pacing, and injection lead
JP5132310B2 (ja) * 2004-09-08 2013-01-30 スパイナル・モデュレーション・インコーポレイテッド 神経刺激の方法及びシステム
US8423139B2 (en) * 2004-12-20 2013-04-16 Cardiac Pacemakers, Inc. Methods, devices and systems for cardiac rhythm management using an electrode arrangement
US8005544B2 (en) 2004-12-20 2011-08-23 Cardiac Pacemakers, Inc. Endocardial pacing devices and methods useful for resynchronization and defibrillation
US8010192B2 (en) 2004-12-20 2011-08-30 Cardiac Pacemakers, Inc. Endocardial pacing relating to conduction abnormalities
US8290586B2 (en) 2004-12-20 2012-10-16 Cardiac Pacemakers, Inc. Methods, devices and systems for single-chamber pacing using a dual-chamber pacing device
US8010191B2 (en) 2004-12-20 2011-08-30 Cardiac Pacemakers, Inc. Systems, devices and methods for monitoring efficiency of pacing
US8326423B2 (en) 2004-12-20 2012-12-04 Cardiac Pacemakers, Inc. Devices and methods for steering electrical stimulation in cardiac rhythm management
AR047851A1 (es) * 2004-12-20 2006-03-01 Giniger Alberto German Un nuevo marcapasos que restablece o preserva la conduccion electrica fisiologica del corazon y un metodo de aplicacion
EP1944056A4 (de) * 2005-09-26 2010-12-15 Jms Co Ltd Myokardiale elektrode
EP1931419B1 (de) * 2005-10-07 2016-08-10 NeuroNexus Technologies, Inc. Modulares mehrkanal-mikroelektrodenarray
US20070123963A1 (en) * 2005-11-29 2007-05-31 Peter Krulevitch Method for producing flexible, stretchable, and implantable high-density microelectrode arrays
DE102006017549A1 (de) * 2006-04-13 2007-10-18 Imi Intelligent Medical Implants Ag Verfahren zur Herstellung von Implantatstrukturen zur Kontaktierung oder Elektrostimulation von lebenden Gewebezellen oder Nerven
US20080027524A1 (en) * 2006-07-26 2008-01-31 Maschino Steven E Multi-electrode assembly for an implantable medical device
WO2008070808A2 (en) 2006-12-06 2008-06-12 Spinal Modulation, Inc. Expandable stimulation leads and methods of use
WO2008070809A2 (en) * 2006-12-06 2008-06-12 Spinal Modulation, Inc. Implantable flexible circuit leads and methods of use
AU2007329253B2 (en) 2006-12-06 2014-03-27 Spinal Modulation, Inc. Delivery devices, systems and methods for stimulating nerve tissue on multiple spinal levels
CA2671250A1 (en) * 2006-12-06 2008-06-12 Spinal Modulation, Inc. Hard tissue anchors and delivery devices
CN101588839A (zh) * 2006-12-06 2009-11-25 脊髓调制公司 用于脊椎刺激的分组导线
US8731673B2 (en) 2007-02-26 2014-05-20 Sapiens Steering Brain Stimulation B.V. Neural interface system
US8224417B2 (en) 2007-10-17 2012-07-17 Neuronexus Technologies, Inc. Guide tube for an implantable device system
US8565894B2 (en) * 2007-10-17 2013-10-22 Neuronexus Technologies, Inc. Three-dimensional system of electrode leads
WO2009052425A1 (en) 2007-10-17 2009-04-23 Neuronexus Technologies Implantable device including a resorbable carrier
US8250745B1 (en) 2008-01-24 2012-08-28 Advanced Bionics, Llc Process for manufacturing a microcircuit cochlear electrode array
US8498720B2 (en) 2008-02-29 2013-07-30 Neuronexus Technologies, Inc. Implantable electrode and method of making the same
EP2247337A2 (de) * 2008-02-29 2010-11-10 Otologics, LLC Verbesserte bimodale cochleastimulation
US20090287277A1 (en) * 2008-05-19 2009-11-19 Otologics, Llc Implantable neurostimulation electrode interface
WO2010005627A1 (en) * 2008-06-20 2010-01-14 Cochlear Americas Strain relief in an implantable electrode assembly
US20100069997A1 (en) * 2008-09-16 2010-03-18 Otologics, Llc Neurostimulation apparatus
EP2361113A2 (de) * 2008-09-17 2011-08-31 National Ict Australia Limited (NICTA) Gewirkter katheter
EP2384222A2 (de) 2008-12-19 2011-11-09 Cardiac Pacemakers, Inc. Vorrichtungen, verfahren und systeme mit herz-pacing
EP2416840B1 (de) * 2009-04-08 2015-09-16 Saluda Medical Pty Limited Genähte komponenten einer aktiven implantierbaren medizinischen vorrichtung
US9044588B2 (en) * 2009-04-16 2015-06-02 Cochlear Limited Reference electrode apparatus and method for neurostimulation implants
WO2010121240A2 (en) * 2009-04-17 2010-10-21 Otologics, Llc Neurostimulation electrode array and method of manufacture
US8771166B2 (en) 2009-05-29 2014-07-08 Cochlear Limited Implantable auditory stimulation system and method with offset implanted microphones
KR101704851B1 (ko) * 2009-10-16 2017-02-08 메드트로닉 바켄 리서치 센터, 비.브이. 신경 인터페이스 시스템
US8283569B2 (en) * 2010-01-22 2012-10-09 The Regents Of The University Of Michigan Electrode array and method of fabrication
FR2957523B1 (fr) * 2010-03-18 2012-04-27 Dixi Microtechniques Procede de fabrication d'une electrode a usage medical et electrode obtenue par la mise en oeuvre de ce procede
US8332052B1 (en) 2010-03-18 2012-12-11 Advanced Bionics Microcircuit cochlear electrode array and method of manufacture
US8565880B2 (en) 2010-04-27 2013-10-22 Cardiac Pacemakers, Inc. His-bundle capture verification and monitoring
US8525340B2 (en) 2010-06-11 2013-09-03 Premitec, Inc. Flexible electronic devices and related methods
CN102985003B (zh) * 2010-06-30 2015-04-01 Med-El电气医疗器械有限公司 螺旋芯耳植入体电极
US9155861B2 (en) 2010-09-20 2015-10-13 Neuronexus Technologies, Inc. Neural drug delivery system with fluidic threads
WO2012154256A1 (en) 2011-02-17 2012-11-15 Advanced Bionics Ag Wire constructs
US9498617B2 (en) 2012-06-19 2016-11-22 Lawrence Livermore National Security, Llc Conformally encapsulated multi-electrode arrays with seamless insulation
US11071869B2 (en) 2016-02-24 2021-07-27 Cochlear Limited Implantable device having removable portion
EP3484581B1 (de) 2016-07-18 2020-12-09 CorTec GmbH Elastische neurale elektrode und verfahren zur herstellung davon
KR102256241B1 (ko) * 2019-07-25 2021-05-27 한국과학기술연구원 전단 및 수직 응력 감지 센서 및 이의 제조 방법
CN111053554A (zh) * 2019-11-28 2020-04-24 开封市学国生物科技有限公司 一种超微柔性线性深部脑电极

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3345990A1 (de) * 1983-12-20 1985-06-27 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen einer implantierbaren elektrode
FR2567684B1 (fr) * 1984-07-10 1988-11-04 Nec Corp Module ayant un substrat ceramique multicouche et un circuit multicouche sur ce substrat et procede pour sa fabrication
DE3671535D1 (de) * 1985-09-04 1990-06-28 Yves Lacaille Geraet zur bestimmung einer blutgruppe.
US4837049A (en) * 1986-06-17 1989-06-06 Alfred E. Mann Foundation For Scientific Research Method of making an electrode array
SE469911B (sv) * 1988-12-14 1993-10-04 Wave Energy Dev Braskamin, innefattande två förbränningsrum
GB8913450D0 (en) * 1989-06-12 1989-08-02 Philips Electronic Associated Electrical device manufacture,particularly infrared detector arrays
US5031621A (en) * 1989-12-06 1991-07-16 Grandjean Pierre A Nerve electrode with biological substrate
EP0475027A1 (de) * 1990-08-02 1992-03-18 Siemens Aktiengesellschaft Elektroden für implantierbare Defibrillatoren
EP0612538A3 (de) * 1993-02-22 1995-04-05 Cardiac Pacemakers Inc Metallisierte Herzelektrode.
BE1008384A3 (nl) * 1994-05-24 1996-04-02 Koninkl Philips Electronics Nv Werkwijze voor het vervaardigen van halfgeleiderinrichtingen met halfgeleiderelementen gevormd in een op een dragerplak aangebrachte laag halfgeleidermateriaal.

Also Published As

Publication number Publication date
WO1997028668A1 (en) 1997-08-07
EP0888701A1 (de) 1999-01-07
EP0888701A4 (de) 2004-11-10
AU714520B2 (en) 2000-01-06
CA2246057C (en) 2005-12-20
US5720099A (en) 1998-02-24
EP0888701B1 (de) 2007-10-03
AU4476296A (en) 1997-08-22
CA2246057A1 (en) 1997-08-07

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