ATE380314T1 - Schieber für vakuumbehandlungseinrichtung - Google Patents

Schieber für vakuumbehandlungseinrichtung

Info

Publication number
ATE380314T1
ATE380314T1 AT06007596T AT06007596T ATE380314T1 AT E380314 T1 ATE380314 T1 AT E380314T1 AT 06007596 T AT06007596 T AT 06007596T AT 06007596 T AT06007596 T AT 06007596T AT E380314 T1 ATE380314 T1 AT E380314T1
Authority
AT
Austria
Prior art keywords
support rod
valve body
movable shaft
shaft structure
slide
Prior art date
Application number
AT06007596T
Other languages
English (en)
Inventor
Tsutomu Hiroki
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of ATE380314T1 publication Critical patent/ATE380314T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/528—Mechanical actuating means with crank, eccentric, or cam with pin and slot
    • F16K31/5282—Mechanical actuating means with crank, eccentric, or cam with pin and slot comprising a pivoted disc or flap
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Mechanically-Actuated Valves (AREA)
  • Details Of Valves (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Lift Valve (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
AT06007596T 2005-04-12 2006-04-11 Schieber für vakuumbehandlungseinrichtung ATE380314T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005115111A JP4079157B2 (ja) 2005-04-12 2005-04-12 ゲートバルブ装置及び処理システム

Publications (1)

Publication Number Publication Date
ATE380314T1 true ATE380314T1 (de) 2007-12-15

Family

ID=36725695

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06007596T ATE380314T1 (de) 2005-04-12 2006-04-11 Schieber für vakuumbehandlungseinrichtung

Country Status (7)

Country Link
EP (1) EP1712822B1 (de)
JP (1) JP4079157B2 (de)
KR (1) KR100805399B1 (de)
CN (1) CN100437900C (de)
AT (1) ATE380314T1 (de)
DE (1) DE602006000287D1 (de)
TW (1) TWI396223B (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4791110B2 (ja) * 2005-09-02 2011-10-12 東京エレクトロン株式会社 真空チャンバおよび真空処理装置
JP4435799B2 (ja) * 2007-03-19 2010-03-24 東京エレクトロン株式会社 開閉バルブ及び該開閉バルブを備えた処理装置
KR101043774B1 (ko) 2008-12-19 2011-06-22 세메스 주식회사 반도체 제조용 공정 챔버
KR101626035B1 (ko) * 2009-03-03 2016-06-13 위순임 게이트밸브어셈블리와 이를 포함하는 기판처리시스템
JP5490435B2 (ja) * 2009-03-31 2014-05-14 東京エレクトロン株式会社 ゲートバルブ装置
US8877001B2 (en) * 2009-05-07 2014-11-04 Applied Materials, Inc. Shuttered gate valve
KR101123299B1 (ko) * 2010-02-04 2012-03-20 (주)엘티엘 진공 차단장치 및 이를 포함하는 영상표시장치 제조설비
JP5685405B2 (ja) * 2010-09-03 2015-03-18 株式会社日立ハイテクノロジーズ 真空処理装置
KR101485765B1 (ko) * 2013-03-15 2015-01-26 주식회사 에이티에스엔지니어링 게이트 밸브
TWI698944B (zh) * 2013-12-23 2020-07-11 南韓商圓益Ｉｐｓ股份有限公司 批量式基板處理裝置
JP6100189B2 (ja) * 2014-03-12 2017-03-22 住友重機械工業株式会社 成膜装置
US10184570B2 (en) 2015-03-27 2019-01-22 Vat Holding Ag Vacuum valve
WO2016204201A1 (ja) * 2015-06-15 2016-12-22 コニカミノルタ株式会社 有機エレクトロルミネッセンス素子の製造方法
JP6565499B2 (ja) * 2015-08-31 2019-08-28 日本精工株式会社 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置
DE102017213109A1 (de) * 2016-10-05 2018-04-05 Heidelberger Druckmaschinen Ag Ventilvorrichtung eines Bogentragelements in einer Druckmaschine
KR102131281B1 (ko) * 2018-06-11 2020-07-07 주식회사 에이씨엔 캠 타입의 게이트 밸브 시스템 및 반도체 기판 처리 장비
KR102131282B1 (ko) * 2018-06-11 2020-07-07 주식회사 에이씨엔 도어 밀착 캠 타입의 게이트 밸브 시스템 및 반도체 기판 처리 장비
CN114008242B (zh) * 2019-06-21 2024-12-13 朗姆研究公司 双向转位装置
CN112530829A (zh) * 2019-09-18 2021-03-19 中微半导体设备(上海)股份有限公司 基片处理系统、阀板组件及其基片处理系统的工作方法
KR102360572B1 (ko) * 2019-10-16 2022-02-10 오토딘시스 주식회사 신규한 구조의 회전축 어셈블리
DE102019134546B4 (de) * 2019-12-16 2025-03-27 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung und Vakuumanordnung
JP7486378B2 (ja) * 2020-08-07 2024-05-17 東京エレクトロン株式会社 基板処理装置、及び基板処理方法
WO2024161444A1 (ja) * 2023-01-30 2024-08-08 入江工研株式会社 回転駆動式ゲートバルブ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4418019A1 (de) * 1994-05-24 1995-11-30 Vse Vakuumtechn Gmbh Ventilmechanik für ein Vakuumventil
JP3189042B2 (ja) * 1997-07-24 2001-07-16 住友重機械工業株式会社 真空成膜の材料供給装置
JPH11214893A (ja) * 1998-01-27 1999-08-06 Koganei Corp 電子部品の吸着搬送装置
JP3439121B2 (ja) * 1998-06-08 2003-08-25 重高 賢治郎 真空装置のバルブ
JP4051694B2 (ja) * 1998-11-16 2008-02-27 大同特殊鋼株式会社 熱処理炉における扉装置
US6089537A (en) 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6409149B1 (en) * 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
WO2002005322A2 (en) * 2000-07-07 2002-01-17 Applied Materials, Inc. Automatic slit/gate valve
US6494434B1 (en) * 2001-07-12 2002-12-17 Vat Holding Ag Butterfly valve
US20030102681A1 (en) * 2001-12-04 2003-06-05 Gary Bouchard High speed pickhead
US6698719B2 (en) * 2002-06-26 2004-03-02 Vat Holding Ag Seal arrangement for a vacuum valve
JP2004259905A (ja) * 2003-02-26 2004-09-16 Sci Technol Kk 気相成長用反応器
TWM242582U (en) * 2003-07-15 2004-09-01 Ming-Ching Wang Convertible Venturi tube carburetor with vacuum automatic regulation and cam control

Also Published As

Publication number Publication date
JP4079157B2 (ja) 2008-04-23
CN1848377A (zh) 2006-10-18
EP1712822A1 (de) 2006-10-18
KR20060108238A (ko) 2006-10-17
CN100437900C (zh) 2008-11-26
JP2006292107A (ja) 2006-10-26
KR100805399B1 (ko) 2008-02-20
EP1712822B1 (de) 2007-12-05
TW200735166A (en) 2007-09-16
TWI396223B (zh) 2013-05-11
DE602006000287D1 (de) 2008-01-17

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Legal Events

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