ATE380979T1 - Entsorgung fluorhaltiger substanzen aus gasströmen - Google Patents

Entsorgung fluorhaltiger substanzen aus gasströmen

Info

Publication number
ATE380979T1
ATE380979T1 AT01309075T AT01309075T ATE380979T1 AT E380979 T1 ATE380979 T1 AT E380979T1 AT 01309075 T AT01309075 T AT 01309075T AT 01309075 T AT01309075 T AT 01309075T AT E380979 T1 ATE380979 T1 AT E380979T1
Authority
AT
Austria
Prior art keywords
disposal
fluorine
gas streams
containing substances
gas stream
Prior art date
Application number
AT01309075T
Other languages
English (en)
Inventor
Andrew James Seeley
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE380979T1 publication Critical patent/ATE380979T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
  • Separation Of Gases By Adsorption (AREA)
AT01309075T 2000-11-01 2001-10-25 Entsorgung fluorhaltiger substanzen aus gasströmen ATE380979T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0026697.3A GB0026697D0 (en) 2000-11-01 2000-11-01 Removal of noxious substances from gas streams

Publications (1)

Publication Number Publication Date
ATE380979T1 true ATE380979T1 (de) 2007-12-15

Family

ID=9902365

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01309075T ATE380979T1 (de) 2000-11-01 2001-10-25 Entsorgung fluorhaltiger substanzen aus gasströmen

Country Status (7)

Country Link
US (1) US20020111526A1 (de)
EP (1) EP1205707B1 (de)
JP (1) JP4323737B2 (de)
KR (1) KR100830797B1 (de)
AT (1) ATE380979T1 (de)
DE (1) DE60131826T2 (de)
GB (1) GB0026697D0 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007518551A (ja) * 2003-12-29 2007-07-12 ナンヤン テクノロジカル ユニヴァーシティ 揮発性の有機化合物（ｖｏｃｓ）および臭気物質の分解のために冷水素炎を使用するシステムおよび方法
GB0416385D0 (en) 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
GB0417378D0 (en) 2004-08-04 2004-09-08 Boc Group Plc Gas abatement
GB0509163D0 (en) 2005-05-05 2005-06-15 Boc Group Plc Gas combustion apparatus
GB0509944D0 (en) 2005-05-16 2005-06-22 Boc Group Plc Gas combustion apparatus
JP4937548B2 (ja) * 2005-08-23 2012-05-23 カンケンテクノ株式会社 パーフルオロカーボンガスの除害方法及び除害装置
JP5659491B2 (ja) * 2009-01-30 2015-01-28 セントラル硝子株式会社 フッ素ガス発生装置を含む半導体製造設備
US20100286463A1 (en) * 2009-05-07 2010-11-11 Ideal Fluids, Inc. Process and Apparatus for the Pyrolytic Conversion of Organic Halides to Hydrogen Halides
US8128902B2 (en) 2011-04-12 2012-03-06 Midwest Refrigerants, Llc Method for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8043574B1 (en) 2011-04-12 2011-10-25 Midwest Refrigerants, Llc Apparatus for the synthesis of anhydrous hydrogen halide and anhydrous carbon dioxide
US8834830B2 (en) 2012-09-07 2014-09-16 Midwest Inorganics LLC Method for the preparation of anhydrous hydrogen halides, inorganic substances and/or inorganic hydrides by using as reactants inorganic halides and reducing agents
JP5922611B2 (ja) * 2013-04-11 2016-05-24 カンケンテクノ株式会社 排ガス処理装置用反応器及びこれを用いた排ガス処理装置
US9259683B2 (en) 2014-01-22 2016-02-16 Micron Technology, Inc. Methods and apparatus for treating fluorinated greenhouse gases in gas streams

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3232713A (en) * 1961-10-23 1966-02-01 Du Pont Apparatus for converting oxides of nitrogen to innocuous gases
DE2824946A1 (de) * 1978-06-07 1979-12-20 Eisenmann Kg Maschinenbau Ges Brennvorrichtung
EP0114587B1 (de) * 1982-11-30 1987-07-29 Lumalampan Aktiebolag Verfahren und Vorrichtung zum Nachverbrennen von Abgasen
US5310334A (en) * 1992-06-03 1994-05-10 Air Duke Australia, Ltd. Method and apparatus for thermal destruction of waste
US5527984A (en) * 1993-04-29 1996-06-18 The Dow Chemical Company Waste gas incineration
US5449854A (en) * 1993-11-26 1995-09-12 The Boc Group, Inc. Method and incinerator for incinerating halogenated organic compounds
US5510093A (en) 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
GB9608061D0 (en) 1996-04-16 1996-06-19 Boc Group Plc Removal of noxious substances from gas streams
JPH10110926A (ja) * 1996-08-14 1998-04-28 Nippon Sanso Kk 燃焼式除害装置
US6261524B1 (en) * 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants

Also Published As

Publication number Publication date
EP1205707A2 (de) 2002-05-15
DE60131826T2 (de) 2008-11-27
JP2002143643A (ja) 2002-05-21
EP1205707A3 (de) 2003-04-02
GB0026697D0 (en) 2000-12-20
DE60131826D1 (de) 2008-01-24
US20020111526A1 (en) 2002-08-15
EP1205707B1 (de) 2007-12-12
KR100830797B1 (ko) 2008-05-20
JP4323737B2 (ja) 2009-09-02
KR20020034964A (ko) 2002-05-09

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Legal Events

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