ATE408236T1 - System zur plasmabehandlung von gasen in einer vakuumpumpe - Google Patents

System zur plasmabehandlung von gasen in einer vakuumpumpe

Info

Publication number
ATE408236T1
ATE408236T1 AT04292798T AT04292798T ATE408236T1 AT E408236 T1 ATE408236 T1 AT E408236T1 AT 04292798 T AT04292798 T AT 04292798T AT 04292798 T AT04292798 T AT 04292798T AT E408236 T1 ATE408236 T1 AT E408236T1
Authority
AT
Austria
Prior art keywords
vacuum pump
gases
plasma treatment
pumping assembly
pump body
Prior art date
Application number
AT04292798T
Other languages
English (en)
Inventor
Philippe Maquin
Thierry Neel
Roland Bernard
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Application granted granted Critical
Publication of ATE408236T1 publication Critical patent/ATE408236T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
    • H01J37/3491—Manufacturing of targets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S422/00—Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
    • Y10S422/90—Decreasing pollution or environmental impact
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S422/00—Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
    • Y10S422/906—Plasma or ion generation means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Drying Of Semiconductors (AREA)
  • Treating Waste Gases (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
AT04292798T 2003-12-01 2004-11-26 System zur plasmabehandlung von gasen in einer vakuumpumpe ATE408236T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0314176A FR2863103B1 (fr) 2003-12-01 2003-12-01 Systeme de traitement des gaz par plasma integre dans une pompe a vide

Publications (1)

Publication Number Publication Date
ATE408236T1 true ATE408236T1 (de) 2008-09-15

Family

ID=34451713

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04292798T ATE408236T1 (de) 2003-12-01 2004-11-26 System zur plasmabehandlung von gasen in einer vakuumpumpe

Country Status (6)

Country Link
US (1) US7998426B2 (de)
EP (1) EP1538656B1 (de)
JP (1) JP5102433B2 (de)
AT (1) ATE408236T1 (de)
DE (1) DE602004016445D1 (de)
FR (1) FR2863103B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006039529A1 (de) * 2006-08-23 2008-03-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Abreaktion selbstentzündlicher Stäube in einer Vakuumpumpvorrichtung
FR2981705B1 (fr) 2011-10-19 2013-11-22 Adixen Vacuum Products Dispositif de pompage et de traitement des gaz
JP6441660B2 (ja) * 2014-03-17 2018-12-19 株式会社荏原製作所 除害機能付真空ポンプ
JP6472653B2 (ja) * 2014-03-17 2019-02-20 株式会社荏原製作所 除害機能付真空ポンプ
FR3019471B1 (fr) * 2014-04-04 2016-05-06 Thales Sa Dispositif de conversion d'un effluent gazeux par plasma multi-source
GB2540754A (en) 2015-07-22 2017-02-01 Edwards Ltd Abatement system
GB2641033A (en) * 2024-05-13 2025-11-19 Edwards Ltd Controlling plasma abatement

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59010310D1 (de) * 1990-03-27 1996-06-05 Leybold Ag Mehrstufige trockenverdichtende Vakuumpumpe und Verfahren zu ihrem Betrieb
NL9200076A (nl) * 1992-01-16 1993-08-16 Leybold B V Werkwijze, droge meertrapspomp en plasmascrubber voor het omvormen van reactieve gassen.
US6187072B1 (en) * 1995-09-25 2001-02-13 Applied Materials, Inc. Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions
JPH1176740A (ja) * 1997-09-05 1999-03-23 Mitsui Chem Inc 有機フッ素系排ガスの分解処理方法及び分解処理装置
WO1999016108A2 (en) * 1997-09-23 1999-04-01 On-Line Technologies, Inc. Method and apparatus for fault detection and control
JP2000323466A (ja) * 1999-04-30 2000-11-24 Applied Materials Inc 基板処理装置
JP3709432B2 (ja) * 1999-04-30 2005-10-26 アプライド マテリアルズ インコーポレイテッド 排ガス処理装置及び基板処理装置
JP2001079335A (ja) * 1999-09-14 2001-03-27 Univ Chuo 排ガス処理方法及び装置
US6621227B1 (en) * 2000-02-08 2003-09-16 Canon Kabushiki Kaisha Discharge generating apparatus and discharge generating method
JP2001252527A (ja) * 2000-03-13 2001-09-18 Seiko Epson Corp Ｐｆｃの処理方法および処理装置
JP2001314752A (ja) * 2000-05-12 2001-11-13 Hokushin Ind Inc プラズマ反応容器及びガスプラズマ分解方法
FR2825295B1 (fr) * 2001-05-31 2004-05-28 Air Liquide Application des plasmas denses crees a pression atmospherique au traitement d'effluents gazeux
US6685803B2 (en) * 2001-06-22 2004-02-03 Applied Materials, Inc. Plasma treatment of processing gases
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
FR2925205B1 (fr) 2007-12-12 2011-04-29 Bernard Abel Andre Leuvrey Insert d'identification et de tracabilite des arbres

Also Published As

Publication number Publication date
DE602004016445D1 (de) 2008-10-23
FR2863103A1 (fr) 2005-06-03
US20050142000A1 (en) 2005-06-30
JP5102433B2 (ja) 2012-12-19
US7998426B2 (en) 2011-08-16
JP2005205399A (ja) 2005-08-04
FR2863103B1 (fr) 2006-07-14
EP1538656A1 (de) 2005-06-08
EP1538656B1 (de) 2008-09-10

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties