ATE408961T1 - Mit einem siliziumsubstrat und einem siliziumschaltkreis integrierte isolierte germanium-photodetektoren umfassender bildsensor - Google Patents

Mit einem siliziumsubstrat und einem siliziumschaltkreis integrierte isolierte germanium-photodetektoren umfassender bildsensor

Info

Publication number
ATE408961T1
ATE408961T1 AT04821500T AT04821500T ATE408961T1 AT E408961 T1 ATE408961 T1 AT E408961T1 AT 04821500 T AT04821500 T AT 04821500T AT 04821500 T AT04821500 T AT 04821500T AT E408961 T1 ATE408961 T1 AT E408961T1
Authority
AT
Austria
Prior art keywords
silicon
image sensor
circuit integrated
silicon substrate
photodetectors
Prior art date
Application number
AT04821500T
Other languages
English (en)
Inventor
Clifford King
Conor Rafferty
Original Assignee
Noble Peak Vision Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Noble Peak Vision Corp filed Critical Noble Peak Vision Corp
Application granted granted Critical
Publication of ATE408961T1 publication Critical patent/ATE408961T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/809—Constructional details of image sensors of hybrid image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/15—Charge-coupled device [CCD] image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/12—Active materials
    • H10F77/122—Active materials comprising only Group IV materials

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Light Receiving Elements (AREA)
AT04821500T 2003-10-13 2004-10-13 Mit einem siliziumsubstrat und einem siliziumschaltkreis integrierte isolierte germanium-photodetektoren umfassender bildsensor ATE408961T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51093203P 2003-10-13 2003-10-13

Publications (1)

Publication Number Publication Date
ATE408961T1 true ATE408961T1 (de) 2008-10-15

Family

ID=34885902

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04821500T ATE408961T1 (de) 2003-10-13 2004-10-13 Mit einem siliziumsubstrat und einem siliziumschaltkreis integrierte isolierte germanium-photodetektoren umfassender bildsensor

Country Status (7)

Country Link
EP (2) EP1995784A3 (de)
JP (1) JP2008511968A (de)
KR (2) KR101331992B1 (de)
CN (1) CN1879397A (de)
AT (1) ATE408961T1 (de)
DE (1) DE602004016679D1 (de)
WO (1) WO2005079199A2 (de)

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US7916362B2 (en) 2006-05-22 2011-03-29 Eastman Kodak Company Image sensor with improved light sensitivity
US8031258B2 (en) 2006-10-04 2011-10-04 Omnivision Technologies, Inc. Providing multiple video signals from single sensor
US8237126B2 (en) 2007-08-17 2012-08-07 Csem Centre Suisse D'electronique Et De Mictrotechnique Sa X-ray imaging device and method for the manufacturing thereof
US8211732B2 (en) * 2008-09-11 2012-07-03 Omnivision Technologies, Inc. Image sensor with raised photosensitive elements
CN101794839B (zh) * 2010-02-09 2011-08-10 中国科学院上海技术物理研究所 一种优化锑化铟光伏型探测器件吸收层厚度的方法
WO2012138345A1 (en) * 2011-04-07 2012-10-11 Northrop Grumman Systems Corporation Advanced focal plane array concept for overhead persistent ir applications
KR102373389B1 (ko) * 2013-06-20 2022-03-10 스트라티오 인코포레이티드 Cmos 센서용 게이트-제어 전하 변조 디바이스
CN104332527B (zh) * 2014-10-08 2016-08-24 中国电子科技集团公司第五十研究所 一种提高铟镓砷红外探测器响应率的方法及相应探测器
US9864138B2 (en) 2015-01-05 2018-01-09 The Research Foundation For The State University Of New York Integrated photonics including germanium
KR102259759B1 (ko) * 2016-05-13 2021-06-02 한국전자기술연구원 동시 입출력이 가능한 ROIC 구조와 이를 포함하는 Lidar ToF 센서
US10300649B2 (en) * 2017-08-29 2019-05-28 Raytheon Company Enhancing die flatness
CN110268533B (zh) * 2018-01-09 2022-12-13 趣眼有限公司 用于短红外光谱范围的基于锗的焦平面阵列
US10892295B2 (en) * 2018-01-10 2021-01-12 Microsoft Technology Licensing, Llc Germanium-modified, back-side illuminated optical sensor
CN108259792A (zh) * 2018-01-16 2018-07-06 德淮半导体有限公司 图像传感器单元
US10847569B2 (en) 2019-02-26 2020-11-24 Raytheon Company Wafer level shim processing
KR102160430B1 (ko) * 2019-03-12 2020-09-28 주식회사 유진로봇 핀 단락 상태를 검출하는 거리 측정 센서 및 이동 로봇
US11810986B2 (en) 2019-11-15 2023-11-07 Institute of Microelectronics, Chinese Academy of Sciences Method for integrating surface-electrode ion trap and silicon photoelectronic device, integrated structure, and three-dimensional structure
WO2021092991A1 (zh) * 2019-11-15 2021-05-20 中国科学院微电子研究所 一种硅光转接板及三维架构以及表面电极离子阱与硅光器件以及三维架构的集成方法、集成结构、三维架构
CN110854025A (zh) * 2019-11-15 2020-02-28 中国科学院微电子研究所 一种硅光转接板及三维架构的集成方法
US11488999B2 (en) * 2020-01-06 2022-11-01 Qualcomm Incorporated Active depth sensing image sensor

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Also Published As

Publication number Publication date
EP1995784A2 (de) 2008-11-26
KR20120099530A (ko) 2012-09-10
DE602004016679D1 (de) 2008-10-30
EP1685701A4 (de) 2006-10-25
JP2008511968A (ja) 2008-04-17
CN1879397A (zh) 2006-12-13
EP1685701A2 (de) 2006-08-02
EP1995784A3 (de) 2010-02-17
WO2005079199A2 (en) 2005-09-01
WO2005079199A3 (en) 2006-02-02
KR101331992B1 (ko) 2013-11-25
KR20060125744A (ko) 2006-12-06
EP1685701B1 (de) 2008-09-17

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
REN Ceased due to non-payment of the annual fee