ATE412252T1 - Parallele, einzeln adressierbare sonden für die nanolithographie - Google Patents

Parallele, einzeln adressierbare sonden für die nanolithographie

Info

Publication number
ATE412252T1
ATE412252T1 AT02795486T AT02795486T ATE412252T1 AT E412252 T1 ATE412252 T1 AT E412252T1 AT 02795486 T AT02795486 T AT 02795486T AT 02795486 T AT02795486 T AT 02795486T AT E412252 T1 ATE412252 T1 AT E412252T1
Authority
AT
Austria
Prior art keywords
probe array
nanolithography
probe
parallel
individually addressable
Prior art date
Application number
AT02795486T
Other languages
English (en)
Inventor
Chang Liu
Ming Zhang
David Bullen
Original Assignee
Univ Illinois
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Illinois filed Critical Univ Illinois
Application granted granted Critical
Publication of ATE412252T1 publication Critical patent/ATE412252T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N2035/1027—General features of the devices
    • G01N2035/1034—Transferring microquantities of liquid
    • G01N2035/1037—Using surface tension, e.g. pins or wires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/855—Manufacture, treatment, or detection of nanostructure with scanning probe for manufacture of nanostructure
    • Y10S977/857—Manufacture, treatment, or detection of nanostructure with scanning probe for manufacture of nanostructure including coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/874—Probe tip array

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
AT02795486T 2001-07-26 2002-07-26 Parallele, einzeln adressierbare sonden für die nanolithographie ATE412252T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30797601P 2001-07-26 2001-07-26
US10/008,719 US6642129B2 (en) 2001-07-26 2001-12-07 Parallel, individually addressable probes for nanolithography

Publications (1)

Publication Number Publication Date
ATE412252T1 true ATE412252T1 (de) 2008-11-15

Family

ID=26678522

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02795486T ATE412252T1 (de) 2001-07-26 2002-07-26 Parallele, einzeln adressierbare sonden für die nanolithographie

Country Status (11)

Country Link
US (3) US6642129B2 (de)
EP (1) EP1410436B1 (de)
JP (2) JP2005507175A (de)
KR (1) KR100961448B1 (de)
CN (1) CN1315169C (de)
AT (1) ATE412252T1 (de)
AU (1) AU2002360242B2 (de)
CA (1) CA2454963C (de)
DE (1) DE60229527D1 (de)
ES (1) ES2318060T3 (de)
WO (1) WO2003036767A2 (de)

Families Citing this family (123)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020042081A1 (en) 2000-10-10 2002-04-11 Eric Henderson Evaluating binding affinities by force stratification and force panning
US6573369B2 (en) 1999-05-21 2003-06-03 Bioforce Nanosciences, Inc. Method and apparatus for solid state molecular analysis
US6897015B2 (en) 2000-03-07 2005-05-24 Bioforce Nanosciences, Inc. Device and method of use for detection and characterization of pathogens and biological materials
DE60135150D1 (de) 2000-08-15 2008-09-11 Bioforce Nanosciences Inc Vorrichtung zur bildung von nanomolekularen netzwerken
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
US7042488B2 (en) 2001-09-27 2006-05-09 Fujinon Corporation Electronic endoscope for highlighting blood vessel
US7073938B2 (en) * 2001-10-31 2006-07-11 The Regents Of The University Of Michigan Micromachined arrayed thermal probe apparatus, system for thermal scanning a sample in a contact mode and cantilevered reference probe for use therein
US7361310B1 (en) 2001-11-30 2008-04-22 Northwestern University Direct write nanolithographic deposition of nucleic acids from nanoscopic tips
AU2003211027A1 (en) * 2002-03-27 2003-10-13 Nanoink, Inc. Method and apparatus for aligning patterns on a substrate
AU2003300257A1 (en) * 2002-05-21 2004-05-04 Northwestern University Peptide and protein arrays and direct-write lithographic printing of peptides and proteins
US7199305B2 (en) * 2002-08-08 2007-04-03 Nanoink, Inc. Protosubstrates
US7098056B2 (en) * 2002-08-09 2006-08-29 Nanoink, Inc. Apparatus, materials, and methods for fabrication and catalysis
US8071168B2 (en) * 2002-08-26 2011-12-06 Nanoink, Inc. Micrometric direct-write methods for patterning conductive material and applications to flat panel display repair
WO2004060044A2 (en) 2003-01-02 2004-07-22 Bioforce Nanosciences, Inc. Method and apparatus for molecular analysis in small sample volumes
US7250139B2 (en) * 2003-03-19 2007-07-31 Northwestern University Nanotipped device and method
US7217396B2 (en) * 2003-05-05 2007-05-15 The Board Of Trustees Of The University Of Illinois Microfabricated micro fluid channels
US20040228962A1 (en) * 2003-05-16 2004-11-18 Chang Liu Scanning probe microscopy probe and method for scanning probe contact printing
EP1835347A4 (de) * 2003-07-15 2008-09-10 Natalia Viktorovna Ivanova Bilderzeugungsverfahren und bilderzeugungseinrichtungen
US7326380B2 (en) * 2003-07-18 2008-02-05 Northwestern University Surface and site-specific polymerization by direct-write lithography
US7329361B2 (en) * 2003-10-29 2008-02-12 International Business Machines Corporation Method and apparatus for fabricating or altering microstructures using local chemical alterations
US8235302B2 (en) * 2004-04-20 2012-08-07 Nanolnk, Inc. Identification features
US7690325B2 (en) * 2004-04-30 2010-04-06 Bioforce Nanosciences, Inc. Method and apparatus for depositing material onto a surface
JP4444734B2 (ja) * 2004-06-07 2010-03-31 キヤノン株式会社 微細パターン形成装置
US7253409B2 (en) * 2004-07-20 2007-08-07 The Board Of Trustees Of The Leland Stanford Junior University Electrochemical nano-patterning using ionic conductors
KR100595523B1 (ko) * 2004-07-20 2006-07-03 엘지전자 주식회사 캔틸레버 전사를 이용한 나노 정보 저장장치 및 그 제조방법
US20060242740A1 (en) * 2004-08-11 2006-10-26 California Institute Of Technology Method and device for surfactant activated Dip-Pen Nanolithography
US7541062B2 (en) * 2004-08-18 2009-06-02 The United States Of America As Represented By The Secretary Of The Navy Thermal control of deposition in dip pen nanolithography
US20060076487A1 (en) * 2004-10-08 2006-04-13 Samsung Electronics Co., Ltd. Semiconductor probe, method of manufacturing the same, and method and apparatus for analyzing semiconductor surface using semiconductor probe
US7208730B2 (en) * 2004-10-14 2007-04-24 International Business Machines Corporation Programmable molecular manipulating devices
US20070240757A1 (en) * 2004-10-15 2007-10-18 The Trustees Of Boston College Solar cells using arrays of optical rectennas
US8261662B1 (en) 2004-11-08 2012-09-11 Nanolnk, Inc. Active pen nanolithography
US20090074594A1 (en) * 2004-11-19 2009-03-19 Gunther Strasser Arrangement with a ventilator and a pump
US7325903B2 (en) * 2004-12-14 2008-02-05 Palo Alto Research Center Incorporated Quill-jet printer
US7342596B2 (en) * 2004-12-14 2008-03-11 Palo Alto Research Center Incorporated Method for direct xerography
US7286149B2 (en) * 2004-12-14 2007-10-23 Palo Alto Research Center Incorporated Direct xerography system
US7325987B2 (en) * 2004-12-14 2008-02-05 Palo Alto Research Center Incorporated Printing method using quill-jet
US20100294147A1 (en) * 2004-12-20 2010-11-25 Nanoink, Inc. Apparatus and methods for preparing identification features including pharmaceutical applications
US8069782B2 (en) 2004-12-20 2011-12-06 Nanoink, Inc. Stamps with micrometer- and nanometer-scale features and methods of fabrication thereof
US20100297027A1 (en) * 2004-12-20 2010-11-25 Nanolnk, Inc. Overt authentication features for compositions and objects and methods of fabrication and verification thereof
JP4979229B2 (ja) * 2005-01-13 2012-07-18 インターナショナル・ビジネス・マシーンズ・コーポレーション 基板に亘って走査するプローブ
US7598723B2 (en) * 2005-02-14 2009-10-06 Clemson University Method and apparatus for detecting resonance in electrostatically driven elements
US8384372B1 (en) 2005-02-14 2013-02-26 Clemson University Non-linear electrical actuation and detection
TWI264542B (en) * 2005-03-22 2006-10-21 Nat Applied Res Laboratories Front-wing probe cantilever of electrical scanning probe microscopy
US7442029B2 (en) * 2005-05-16 2008-10-28 Asml Netherlands B.V. Imprint lithography
EP1610345B1 (de) * 2005-06-14 2008-08-27 National Applied Research Laboratories Biegebalken mit vorderen Flügeln für die leitfähige Sonde eines elektrischen Rastersondenmikroskops.
WO2007008507A2 (en) * 2005-07-06 2007-01-18 Mirkin Chad A Phase separation in patterned structures
CN100545951C (zh) * 2005-07-14 2009-09-30 中国科学院微电子研究所 新型微尖端面阵列器件
EP1755137A1 (de) 2005-08-18 2007-02-21 University of Teheran Verfahren zur Herstellung eines Kohlenstoffnanoröhrenemitters, Kohlenstoffnanoröhrenemitter mit Anwendungen in Nanodruck und dessen Verwendung
US7533561B2 (en) * 2005-08-19 2009-05-19 Arthur Beyder Oscillator for atomic force microscope and other applications
WO2007120175A2 (en) 2005-08-24 2007-10-25 The Trustees Of Boston College Apparatus and methods for solar energy conversion using nanoscale cometal structures
US7754964B2 (en) 2005-08-24 2010-07-13 The Trustees Of Boston College Apparatus and methods for solar energy conversion using nanocoax structures
WO2007025023A2 (en) 2005-08-24 2007-03-01 The Trustees Of Boston College Apparatus and methods for optical switching using nanoscale optics
US7589880B2 (en) 2005-08-24 2009-09-15 The Trustees Of Boston College Apparatus and methods for manipulating light using nanoscale cometal structures
WO2007025013A2 (en) 2005-08-24 2007-03-01 The Trustees Of Boston College Nanoscale optical microscope
US20100294927A1 (en) * 2005-09-12 2010-11-25 Nanolnk, Inc. High throughput inspecting
US7281419B2 (en) * 2005-09-21 2007-10-16 The Board Of Trustees Of The University Of Illinois Multifunctional probe array system
CN100492019C (zh) * 2005-10-14 2009-05-27 旺矽科技股份有限公司 探针卡的电性接触装置
EP1780174B1 (de) * 2005-10-27 2010-12-01 LG Electronics Inc. Nanodatenschreib- und Lesevorrichtung mit Cantileverstruktur und Herstellungsverfahren dafür
JP2009518261A (ja) * 2005-12-02 2009-05-07 ノースウエスタン ユニバーシティ ナノチューブ集合体
US7883839B2 (en) * 2005-12-08 2011-02-08 University Of Houston Method and apparatus for nano-pantography
US7473593B2 (en) 2006-01-11 2009-01-06 International Business Machines Corporation Semiconductor transistors with expanded top portions of gates
US8373431B2 (en) * 2006-01-13 2013-02-12 International Business Machines Corporation Probe for scanning over a substrate and data storage device
EP1994360A4 (de) * 2006-03-13 2012-03-14 Asylum Research Corp Nanoindenter
EP2013662B1 (de) * 2006-04-19 2013-08-14 Northwestern University Artikel für parallele lithografie mit zweidimensionalen stiftreihen
US8192794B2 (en) * 2006-04-19 2012-06-05 Northwestern University Massively parallel lithography with two-dimensional pen arrays
CA2654973A1 (en) * 2006-06-28 2008-07-31 Northwestern University Etching and hole arrays
US7748260B2 (en) * 2006-07-12 2010-07-06 Veeco Instruments Inc. Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe
US7875958B2 (en) * 2006-09-27 2011-01-25 Taiwan Semiconductor Manufacturing Company, Ltd. Quantum tunneling devices and circuits with lattice-mismatched semiconductor structures
GB0621560D0 (en) * 2006-10-31 2006-12-06 Infinitesima Ltd Probe assembly for a scanning probe microscope
JP4825697B2 (ja) * 2007-01-25 2011-11-30 株式会社ミツトヨ デジタル式変位測定器
KR20090117881A (ko) * 2007-01-30 2009-11-13 솔라스타, 인코포레이티드 광전지 및 광전지를 제조하는 방법
KR20090120474A (ko) * 2007-02-12 2009-11-24 솔라스타, 인코포레이티드 고온 캐리어 냉각이 감소된 광전지 셀
US7680553B2 (en) * 2007-03-08 2010-03-16 Smp Logic Systems Llc Methods of interfacing nanomaterials for the monitoring and execution of pharmaceutical manufacturing processes
KR20100015321A (ko) * 2007-03-13 2010-02-12 나노잉크, 인크. 검시창을 사용하는 나노리소그래피
US20080242559A1 (en) * 2007-03-28 2008-10-02 Northwestern University Protein and peptide arrays
CA2681443A1 (en) * 2007-05-09 2008-11-20 Nanoink, Inc. Compact nanofabrication apparatus
JP2010531977A (ja) * 2007-06-20 2010-09-30 ノースウエスタン ユニバーシティ 脂質を含む組成物を用いたパターニング
US7597717B1 (en) * 2007-06-25 2009-10-06 The United States Of America As Represented By The Secretary Of The Navy Rotatable multi-cantilever scanning probe microscopy head
US20090004231A1 (en) 2007-06-30 2009-01-01 Popp Shane M Pharmaceutical dosage forms fabricated with nanomaterials for quality monitoring
JP2010532574A (ja) * 2007-07-03 2010-10-07 ソーラスタ インコーポレイテッド 分散型コアックス光起電装置
EP2185975A1 (de) * 2007-08-08 2010-05-19 Northwestern University Unabhängig adressierbare selbstkorrigierende betintung für kragträgerarrays
US8505110B2 (en) * 2007-10-10 2013-08-06 Eloret Corporation Apparatus and process for controlled nanomanufacturing using catalyst retaining structures
US20100297228A1 (en) * 2007-10-29 2010-11-25 Nanolnk, Inc. Universal coating for imprinting identification features
KR101027517B1 (ko) 2007-11-23 2011-04-06 재단법인서울대학교산학협력재단 나노 구조체의 배치 방법 및 이를 이용한 나노 소자의 제조방법
WO2009066968A2 (en) * 2007-11-23 2009-05-28 Seoul National University Industry Foundation Method for arranging nanostructures and manufacturing nano devices using the same
US8205268B2 (en) * 2007-11-26 2012-06-19 Nanoink, Inc. Cantilever with pivoting actuation
US8256018B2 (en) * 2008-02-05 2012-08-28 Nanoink, Inc. Array and cantilever array leveling
US8068328B2 (en) * 2008-03-12 2011-11-29 Intel Corporation Nanolithographic method of manufacturing an embedded passive device for a microelectronic application, and microelectronic device containing same
WO2009140442A2 (en) * 2008-05-13 2009-11-19 Hanoink, Inc. Heated cantilever
JP5187839B2 (ja) * 2008-06-10 2013-04-24 株式会社日立ハイテクサイエンス カンチレバーシステム及び走査型プローブ顕微鏡
US20100143666A1 (en) * 2008-11-20 2010-06-10 Northwestern University Redox activated patterning
US8214916B2 (en) * 2009-01-26 2012-07-03 Nanoink, Inc. Large area, homogeneous array fabrication including leveling with use of bright spots
US20100227063A1 (en) * 2009-01-26 2010-09-09 Nanoink, Inc. Large area, homogeneous array fabrication including substrate temperature control
SG172852A1 (en) 2009-01-26 2011-08-29 Nanoink Inc Large area, homogeneous array fabrication including homogeneous substrates
WO2010085767A1 (en) 2009-01-26 2010-07-29 Nanoink. Inc. Large area, homogeneous array fabrication including controlled tip loading vapor deposition
WO2010120809A1 (en) * 2009-04-14 2010-10-21 Nanoink, Inc. Conducting lines, nanoparticles, inks, and patterning
US20110014436A1 (en) * 2009-07-14 2011-01-20 Nanoink, Inc. Methods for forming hydrogels on surfaces and articles formed thereby
WO2011014845A1 (en) 2009-07-31 2011-02-03 Nanoink, Inc. Screening system to identify patterns on substrate surfaces for inducing stem cell differentiation and producing homogenous population of a desired cell type
CN101723318B (zh) * 2009-12-03 2013-02-13 西南交通大学 一种石英、玻璃材料表面的微纳米加工方法
EP2974673B1 (de) * 2010-03-17 2017-03-22 The Board of Trustees of the University of Illionis Implantierbare biomedizinische vorrichtungen auf bioresorbierbaren substraten
US20110274839A1 (en) 2010-04-14 2011-11-10 Nanoink, Inc. Cantilevers for deposition
US20110277193A1 (en) 2010-04-20 2011-11-10 Nanolnk, Inc. Sensors and biosensors
JP5525377B2 (ja) * 2010-08-17 2014-06-18 株式会社ミツトヨ 高ダイナミックレンジプローブ
WO2012135768A1 (en) * 2011-03-30 2012-10-04 Rolandi Marco Inorganic nanostructure reactive direct-write and growth
WO2013059670A2 (en) 2011-10-21 2013-04-25 Nanoink, Inc. Octahedral and pyramid-on-post tips for microscopy and lithography
WO2013067395A2 (en) 2011-11-04 2013-05-10 Nanoink, Inc. Method and apparatus for improving ink deposition
JP5910056B2 (ja) * 2011-12-13 2016-04-27 富士ゼロックス株式会社 レンズ製造装置
US9038269B2 (en) * 2013-04-02 2015-05-26 Xerox Corporation Printhead with nanotips for nanoscale printing and manufacturing
EP2848997A1 (de) * 2013-09-16 2015-03-18 SwissLitho AG Rastersonden-Nanolithografiesystem und Verfahren
US9466500B2 (en) * 2013-09-20 2016-10-11 Applied Materials, Inc. Method and apparatus for direct formation of nanometer scaled features
CN106795940B (zh) * 2014-12-29 2018-12-04 史拓莱姆有限公司 减震装置
US20160252545A1 (en) 2015-02-26 2016-09-01 Xallent, LLC Multiple Integrated Tips Scanning Probe Microscope
KR102012577B1 (ko) 2015-02-26 2019-08-20 살렌트, 엘엘씨 나노-전자-기계적-시스템 프로브들을 제작하기 위한 방법들 및 시스템들
WO2017156245A1 (en) 2016-03-09 2017-09-14 Xallent, LLC Functional prober chip
US10918356B2 (en) 2016-11-22 2021-02-16 General Electric Company Ultrasound transducers having electrical traces on acoustic backing structures and methods of making the same
DE102017202455B4 (de) 2017-02-15 2021-05-27 Nano Analytik Gmbh MEMS- oder NEMS-basierter Sensor und Verfahren zum Betrieb eines solchen
US10784054B2 (en) 2017-04-06 2020-09-22 Kwame Amponsah Nanoelectromechanical devices with metal-to-metal contacts
CN110892324B (zh) 2017-07-21 2024-04-02 卡尔蔡司Smt有限责任公司 用于处理光刻掩模的多余材料的方法与设备
US10663484B2 (en) 2018-02-14 2020-05-26 Xallent, LLC Multiple integrated tips scanning probe microscope with pre-alignment components
CN110127588B (zh) * 2019-05-22 2022-02-22 季华实验室 用于加工衬底材料的钝化层的探针
CN111812357B (zh) * 2020-07-10 2021-05-25 浙江大学 一种用于微纳米制造的自填料三臂式热扫描探针
CN112279215B (zh) * 2020-10-16 2024-10-01 南京大学 微纳制造装置
CN117406554A (zh) * 2023-07-20 2024-01-16 中国科学院苏州纳米技术与纳米仿生研究所 光刻装置及光刻方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3030574B2 (ja) * 1990-08-16 2000-04-10 キヤノン株式会社 微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置
DE69212062T2 (de) 1991-04-30 1996-11-28 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka Raster-Abtastmikroskop, molekulares Verarbeitungsverfahren unter Verwendung des Mikroskops und Verfahren zum Wahrnehmen der DNA-Basen-Anordnung
JP3450349B2 (ja) * 1992-03-31 2003-09-22 キヤノン株式会社 カンチレバー型プローブ
US5372930A (en) 1992-09-16 1994-12-13 The United States Of America As Represented By The Secretary Of The Navy Sensor for ultra-low concentration molecular recognition
JP3159561B2 (ja) * 1993-03-29 2001-04-23 ローム株式会社 結晶性薄膜用電極
US5537863A (en) * 1993-07-15 1996-07-23 Nikon Corporation Scanning probe microscope having a cantilever used therein
US5666190A (en) 1994-04-12 1997-09-09 The Board Of Trustees Of The Leland Stanford, Jr. University Method of performing lithography using cantilever array
JP3192887B2 (ja) * 1994-09-21 2001-07-30 キヤノン株式会社 プローブ、該プローブを用いた走査型プローブ顕微鏡、および前記プローブを用いた記録再生装置
US5696491A (en) * 1995-06-07 1997-12-09 Regents Of The University Of California Self-excited microelectromechanical device
US5835477A (en) 1996-07-10 1998-11-10 International Business Machines Corporation Mass-storage applications of local probe arrays
US5866807A (en) * 1997-02-04 1999-02-02 Digital Instruments Method and apparatus for measuring mechanical properties on a small scale
WO2004074765A1 (en) 1997-07-17 2004-09-02 Gerd Karl Binnig Method of forming ultrasmall structures and apparatus therefor
JPH11352136A (ja) * 1998-06-08 1999-12-24 Nikon Corp プローブ及びこのプローブを用いた顕微鏡
US6196061B1 (en) * 1998-11-05 2001-03-06 Nanodevices, Inc. AFM with referenced or differential height measurement
US6574499B1 (en) * 1998-11-25 2003-06-03 Xdata Corporation Mammography method and apparatus
US6635311B1 (en) * 1999-01-07 2003-10-21 Northwestern University Methods utilizing scanning probe microscope tips and products therefor or products thereby
US6827979B2 (en) * 1999-01-07 2004-12-07 Northwestern University Methods utilizing scanning probe microscope tips and products therefor or produced thereby
JP2000201925A (ja) * 1999-01-12 2000-07-25 Toshiba Corp ３次元超音波診断装置
JP2000266657A (ja) * 1999-03-16 2000-09-29 Seiko Instruments Inc 自己励振型カンチレバー
US6189374B1 (en) * 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof
TW408417B (en) * 1999-05-03 2000-10-11 Ind Tech Res Inst Planar-shape thin probe having electrostatic actuator manufactured by using sacrificed layer technology and its manufacturing method
JP3687030B2 (ja) * 1999-06-23 2005-08-24 独立行政法人科学技術振興機構 微小表面温度分布計測法およびそのための装置
US6647766B2 (en) 1999-12-31 2003-11-18 International Business Machines Corporation Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
JP3892198B2 (ja) * 2000-02-17 2007-03-14 エスアイアイ・ナノテクノロジー株式会社 マイクロプローブおよび試料表面測定装置
US6590208B2 (en) * 2001-01-19 2003-07-08 Veeco Instruments Inc. Balanced momentum probe holder
US6862921B2 (en) * 2001-03-09 2005-03-08 Veeco Instruments Inc. Method and apparatus for manipulating a sample
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography

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CA2454963C (en) 2009-09-15
JP2005507175A (ja) 2005-03-10
KR100961448B1 (ko) 2010-06-09
EP1410436A4 (de) 2006-04-05
CN1315169C (zh) 2007-05-09
JP2009198513A (ja) 2009-09-03
EP1410436A2 (de) 2004-04-21
US6867443B2 (en) 2005-03-15
US7402849B2 (en) 2008-07-22
AU2002360242B2 (en) 2007-11-01
WO2003036767A3 (en) 2003-10-09
CN1554119A (zh) 2004-12-08
US6642129B2 (en) 2003-11-04
CA2454963A1 (en) 2003-05-01
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US20040119490A1 (en) 2004-06-24
WO2003036767A2 (en) 2003-05-01
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DE60229527D1 (de) 2008-12-04
EP1410436B1 (de) 2008-10-22

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