ATE412782T1 - Hochreines niobmetall und erzeugnisse daraus und verfahren zu dessen herstellung - Google Patents
Hochreines niobmetall und erzeugnisse daraus und verfahren zu dessen herstellungInfo
- Publication number
- ATE412782T1 ATE412782T1 AT01977066T AT01977066T ATE412782T1 AT E412782 T1 ATE412782 T1 AT E412782T1 AT 01977066 T AT01977066 T AT 01977066T AT 01977066 T AT01977066 T AT 01977066T AT E412782 T1 ATE412782 T1 AT E412782T1
- Authority
- AT
- Austria
- Prior art keywords
- niobium
- metal
- high purity
- reaction container
- salt
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 229910052758 niobium Inorganic materials 0.000 abstract 10
- 239000010955 niobium Substances 0.000 abstract 10
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract 9
- 239000002184 metal Substances 0.000 abstract 6
- 229910052751 metal Inorganic materials 0.000 abstract 6
- 150000003839 salts Chemical class 0.000 abstract 3
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 2
- 239000003990 capacitor Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000007769 metal material Substances 0.000 abstract 1
- -1 niobium metals Chemical class 0.000 abstract 1
- 238000005477 sputtering target Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B34/00—Obtaining refractory metals
- C22B34/20—Obtaining niobium, tantalum or vanadium
- C22B34/24—Obtaining niobium or tantalum
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B5/00—General methods of reducing to metals
- C22B5/02—Dry methods smelting of sulfides or formation of mattes
- C22B5/04—Dry methods smelting of sulfides or formation of mattes by aluminium, other metals or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/04—Electrodes or formation of dielectric layers thereon
- H01G9/048—Electrodes or formation of dielectric layers thereon characterised by their structure
- H01G9/052—Sintered electrodes
- H01G9/0525—Powder therefor
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Electrodes Of Semiconductors (AREA)
- Powder Metallurgy (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Catalysts (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20615900P | 2000-05-22 | 2000-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE412782T1 true ATE412782T1 (de) | 2008-11-15 |
Family
ID=22765229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT01977066T ATE412782T1 (de) | 2000-05-22 | 2001-05-21 | Hochreines niobmetall und erzeugnisse daraus und verfahren zu dessen herstellung |
Country Status (11)
| Country | Link |
|---|---|
| US (2) | US6863750B2 (de) |
| EP (1) | EP1287172B1 (de) |
| JP (1) | JP5341292B2 (de) |
| KR (1) | KR100815034B1 (de) |
| CN (1) | CN1328409C (de) |
| AT (1) | ATE412782T1 (de) |
| AU (1) | AU2001296213A1 (de) |
| DE (1) | DE60136351D1 (de) |
| MY (1) | MY134162A (de) |
| TW (1) | TW587101B (de) |
| WO (1) | WO2001096620A2 (de) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL156802A0 (en) | 2001-01-11 | 2004-02-08 | Cabot Corp | Tantalum and niobium billets and methods of producing same |
| PT1366203E (pt) * | 2001-02-20 | 2006-12-29 | Starck H C Inc | Placas de metal refratario de textura uniforme e métodos para a sua preparação |
| US7210641B2 (en) | 2001-02-28 | 2007-05-01 | Cabot Corporation | Methods of making a niobium metal oxide |
| JP2004143477A (ja) * | 2002-10-22 | 2004-05-20 | Cabot Supermetal Kk | ニオブ粉末およびその製造方法、並びにそれを用いた固体電解コンデンサ |
| JP4928706B2 (ja) * | 2002-12-03 | 2012-05-09 | 株式会社東芝 | 光学薄膜形成用Nbスパッタリングターゲットの製造方法 |
| TWI341337B (en) | 2003-01-07 | 2011-05-01 | Cabot Corp | Powder metallurgy sputtering targets and methods of producing same |
| WO2004103906A2 (en) | 2003-05-19 | 2004-12-02 | Cabot Corporation | Methods of making a niobium metal oxide and oxygen reduced niobium oxides |
| US7228722B2 (en) * | 2003-06-09 | 2007-06-12 | Cabot Corporation | Method of forming sputtering articles by multidirectional deformation |
| KR20060029622A (ko) * | 2003-06-20 | 2006-04-06 | 캐보트 코포레이션 | 백킹 플레이트에 스퍼터 타겟 부착을 위한 방법 및 디자인 |
| US20070144623A1 (en) * | 2004-02-18 | 2007-06-28 | Wickersham Charles E Jr | Ultrasonic method for detecting banding in metals |
| US8252126B2 (en) | 2004-05-06 | 2012-08-28 | Global Advanced Metals, Usa, Inc. | Sputter targets and methods of forming same by rotary axial forging |
| US7666243B2 (en) | 2004-10-27 | 2010-02-23 | H.C. Starck Inc. | Fine grain niobium sheet via ingot metallurgy |
| JP2006161066A (ja) * | 2004-12-02 | 2006-06-22 | Seiko Epson Corp | スパッタリングターゲットとその製造方法及びスパッタリング装置並びに液体噴射ヘッド |
| US7998287B2 (en) * | 2005-02-10 | 2011-08-16 | Cabot Corporation | Tantalum sputtering target and method of fabrication |
| US8128765B2 (en) * | 2005-04-05 | 2012-03-06 | Jefferson Science Associates, Llc | Large grain cavities from pure niobium ingot |
| EP1876258A4 (de) * | 2005-04-28 | 2008-08-13 | Nippon Mining Co | Sputtertarget |
| US20070044873A1 (en) | 2005-08-31 | 2007-03-01 | H. C. Starck Inc. | Fine grain niobium sheet via ingot metallurgy |
| JP4034802B2 (ja) * | 2005-11-22 | 2008-01-16 | 株式会社神戸製鋼所 | 超電導線材製造用NbまたはNb基合金棒およびNb3Sn超電導線材の製造方法 |
| EE05493B1 (et) * | 2006-03-07 | 2011-12-15 | Cabot Corporation | Meetod l?pliku paksusega metallesemete valmistamiseks, saadud metallplaat ja selle valmistamiseks kasutatav BCC- metall |
| CN100357464C (zh) * | 2006-06-03 | 2007-12-26 | 郭青蔚 | 草酸体系萃取法制取无氟氧化铌工艺 |
| CN100529150C (zh) * | 2007-12-17 | 2009-08-19 | 西部金属材料股份有限公司 | 一种制备金属铌带材的方法 |
| JP5308683B2 (ja) * | 2008-01-29 | 2013-10-09 | 株式会社神戸製鋼所 | ブロンズ法Nb3Sn超電導線材製造用NbまたはNb基合金棒、Nb3Sn超電導線材製造用前駆体およびその製造方法、並びにNb3Sn超電導線材 |
| US9834829B1 (en) | 2009-07-07 | 2017-12-05 | H.C. Starck Inc. | Niobium-based alloy that is resistant to aqueous corrosion |
| US20110008201A1 (en) * | 2009-07-07 | 2011-01-13 | H.C. Starck Inc. | Niobium based alloy that is resistant to aqueous corrosion |
| EP2810722B1 (de) * | 2012-02-02 | 2016-04-06 | Shinohara Press Service Co., Ltd. | Verfahren zur herstellung reiner niob-endgruppenkomponenten eines supraleiter-beschleunigungsraumes |
| WO2014156918A1 (ja) * | 2013-03-27 | 2014-10-02 | Jx日鉱日石金属株式会社 | ニオブスパッタリングターゲット |
| CN103316912B (zh) * | 2013-07-09 | 2014-12-17 | 武汉科技大学 | 一种极薄铌带的轧制方法 |
| CA3120873A1 (en) | 2018-12-12 | 2020-06-18 | Craig M. Sungail | Spherical niobium alloy powder, products containing the same, and methods of making the same |
| US11885009B2 (en) * | 2019-02-12 | 2024-01-30 | Uchicago Argonne, Llc | Method of making thin films |
| WO2020195121A1 (ja) * | 2019-03-26 | 2020-10-01 | Jx金属株式会社 | ニオブスパッタリングターゲット |
| CN110983218B (zh) * | 2019-12-25 | 2021-09-03 | 西部超导材料科技股份有限公司 | 一种组织均匀的小规格纯铌棒材的制备方法 |
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| US3085871A (en) | 1958-02-24 | 1963-04-16 | Griffiths Kenneth Frank | Method for producing the refractory metals hafnium, titanium, vanadium, silicon, zirconium, thorium, columbium, and chromium |
| NL252366A (de) | 1958-06-13 | |||
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| GB955832A (en) | 1959-10-21 | 1964-04-22 | Ciba Ltd | Process for the manufacture of metallic niobium or tantalum or alloys thereof |
| US3497402A (en) | 1966-02-03 | 1970-02-24 | Nat Res Corp | Stabilized grain-size tantalum alloy |
| CH515996A (de) | 1968-06-06 | 1971-11-30 | Starck Hermann C Fa | Verfahren zur Herstellung von hochreinem Niob und/oder Tantal |
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| DE2517180C3 (de) | 1975-04-18 | 1979-04-19 | Fa. Hermann C. Starck Berlin, 1000 Berlin | Verfahren zur kontinuierlichen Herstellung von feinem hochkapazitiven Erdsäuremetallpulver für Elektrolytkondensatoren |
| US4149876A (en) | 1978-06-06 | 1979-04-17 | Fansteel Inc. | Process for producing tantalum and columbium powder |
| JPS56145109A (en) | 1980-04-12 | 1981-11-11 | Mitsui Mining & Smelting Co Ltd | Preparation of tantalum carbide or niobium carbide |
| JPS57106525A (en) | 1980-12-19 | 1982-07-02 | Rasa Kogyo Kk | Manufacture of lithium niobate or lithium tantalate |
| JPS59202624A (ja) | 1983-04-30 | 1984-11-16 | Sharp Corp | 薄膜形成用蒸発源 |
| JPS6066425A (ja) | 1983-09-22 | 1985-04-16 | Nippon Telegr & Teleph Corp <Ntt> | Lsi電極用の高純度モリブデンタ−ゲツトならびに高純度モリブデンシリサイドタ−ゲツトおよびその製造方法 |
| JPS60124452A (ja) | 1983-12-07 | 1985-07-03 | Hitachi Ltd | 高純度金属スリ−ブの製造方法 |
| JPS619532A (ja) | 1984-06-26 | 1986-01-17 | Daido Steel Co Ltd | ニオブ又はタンタルの金属鋳塊の製造方法 |
| JPS61146717A (ja) | 1984-12-18 | 1986-07-04 | Sumitomo Chem Co Ltd | タンタルの精製方法 |
| JPS61281831A (ja) | 1985-06-07 | 1986-12-12 | Nippon Telegr & Teleph Corp <Ntt> | 高純度タンタルの精製法 |
| JPS62297A (ja) | 1985-06-25 | 1987-01-06 | Fuji Photo Film Co Ltd | 多層分析要素 |
| LU86090A1 (fr) | 1985-09-23 | 1987-04-02 | Metallurgie Hoboken | Procede pour preparer du tantale ou du niobium affins |
| JPS62104180A (ja) | 1985-10-31 | 1987-05-14 | Toyo Soda Mfg Co Ltd | 超高純度ニオブを用いてなるジヨセフソン素子 |
| JPS62108517A (ja) | 1985-11-06 | 1987-05-19 | Hitachi Ltd | 分子線源 |
| JPS62158118A (ja) | 1985-12-28 | 1987-07-14 | Chiyuugai Tekunosu Kk | 酸化ニオブの製法 |
| JPS62259448A (ja) | 1986-04-14 | 1987-11-11 | Nippon Telegr & Teleph Corp <Ntt> | 絶縁膜形成法 |
| JPH0621346B2 (ja) | 1986-06-11 | 1994-03-23 | 日本鉱業株式会社 | 高純度金属タンタル製ターゲットの製造方法 |
| JPS63216966A (ja) | 1987-03-06 | 1988-09-09 | Toshiba Corp | スパツタタ−ゲツト |
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| JPH0173009U (de) | 1987-10-29 | 1989-05-17 | ||
| JPH0173028U (de) | 1987-10-29 | 1989-05-17 | ||
| JPH0244111Y2 (de) | 1987-11-10 | 1990-11-22 | ||
| US4960163A (en) | 1988-11-21 | 1990-10-02 | Aluminum Company Of America | Fine grain casting by mechanical stirring |
| JPH0735586B2 (ja) | 1989-08-25 | 1995-04-19 | 住友金属工業株式会社 | 着色フェライト系ステンレス鋼とその製造方法 |
| JPH03150828A (ja) | 1989-11-07 | 1991-06-27 | Nippon Chemicon Corp | 電解コンデンサ用アルミニウム電極の製造方法 |
| JP3031474B2 (ja) | 1989-12-26 | 2000-04-10 | 株式会社東芝 | 高純度タンタル材,タンタルターゲット,薄膜および半導体装置の製造方法 |
| US5530467A (en) | 1990-02-01 | 1996-06-25 | Kabushiki Kaisha Toshiba | Sputtering target, film resistor and thermal printer head |
| JPH042618A (ja) | 1990-04-20 | 1992-01-07 | Nikko Kyodo Co Ltd | 弗化タンタルカリウムの精製方法 |
| JPH0421524A (ja) | 1990-05-15 | 1992-01-24 | Nikko Kyodo Co Ltd | 弗化タンタルカリウムの精製方法 |
| DE4032566C2 (de) | 1990-10-13 | 1993-12-16 | Schott Glaswerke | Bleifreies optisches Glas mit negativ abweichender anomaler Teildispersion |
| US5269403A (en) | 1992-06-15 | 1993-12-14 | Johnson Matthey Electronics | Sputtering target assembly for a sputter coating apparatus |
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| TW234767B (zh) | 1992-09-29 | 1994-11-21 | Nippon En Kk | 擴散接合之噴濺靶組立體及其製法 |
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| JPH06264232A (ja) | 1993-03-12 | 1994-09-20 | Nikko Kinzoku Kk | Ta製スパッタリングタ−ゲットとその製造方法 |
| US5409548A (en) | 1993-05-17 | 1995-04-25 | The United States Of America As Represented By The Secretary Of The Army | Ferroelectric detector array utilizing material and fabrication technique |
| DE4414571C1 (de) | 1994-04-27 | 1996-01-18 | Starck H C Gmbh Co Kg | Verfahren zur Herstellung von Tantal-Niob-Konzentraten |
| US5442978A (en) | 1994-05-19 | 1995-08-22 | H. C. Starck, Inc. | Tantalum production via a reduction of K2TAF7, with diluent salt, with reducing agent provided in a fast series of slug additions |
| US5687600A (en) | 1994-10-26 | 1997-11-18 | Johnson Matthey Electronics, Inc. | Metal sputtering target assembly |
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| JPH08165528A (ja) | 1994-12-09 | 1996-06-25 | Japan Energy Corp | 高純度高融点金属または合金の製造方法 |
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| JP3852967B2 (ja) | 1995-07-14 | 2006-12-06 | 株式会社アルバック | 低圧スパッタリング装置 |
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| US6348139B1 (en) | 1998-06-17 | 2002-02-19 | Honeywell International Inc. | Tantalum-comprising articles |
| KR100398539B1 (ko) | 1998-06-29 | 2003-09-19 | 가부시끼가이샤 도시바 | 스퍼터 타겟 |
| DE19847012A1 (de) * | 1998-10-13 | 2000-04-20 | Starck H C Gmbh Co Kg | Niobpulver und Verfahren zu dessen Herstellung |
| US6348113B1 (en) * | 1998-11-25 | 2002-02-19 | Cabot Corporation | High purity tantalum, products containing the same, and methods of making the same |
| TW460883B (en) * | 1999-02-16 | 2001-10-21 | Showa Denko Kk | Niobium powder, niobium sintered body, capacitor comprised of the sintered body, and method for manufacturing the capacitor |
-
2001
- 2001-05-21 AT AT01977066T patent/ATE412782T1/de not_active IP Right Cessation
- 2001-05-21 KR KR1020027015753A patent/KR100815034B1/ko not_active Expired - Fee Related
- 2001-05-21 AU AU2001296213A patent/AU2001296213A1/en not_active Abandoned
- 2001-05-21 US US09/861,879 patent/US6863750B2/en not_active Expired - Lifetime
- 2001-05-21 EP EP01977066A patent/EP1287172B1/de not_active Expired - Lifetime
- 2001-05-21 CN CNB018128750A patent/CN1328409C/zh not_active Expired - Fee Related
- 2001-05-21 DE DE60136351T patent/DE60136351D1/de not_active Expired - Lifetime
- 2001-05-21 JP JP2002510732A patent/JP5341292B2/ja not_active Expired - Fee Related
- 2001-05-21 WO PCT/US2001/016438 patent/WO2001096620A2/en not_active Ceased
- 2001-05-22 MY MYPI20012405 patent/MY134162A/en unknown
- 2001-05-22 TW TW090112252A patent/TW587101B/zh not_active IP Right Cessation
-
2005
- 2005-02-16 US US11/058,908 patent/US20050263217A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| TW587101B (en) | 2004-05-11 |
| EP1287172B1 (de) | 2008-10-29 |
| EP1287172A2 (de) | 2003-03-05 |
| WO2001096620A3 (en) | 2002-08-08 |
| US6863750B2 (en) | 2005-03-08 |
| US20050263217A1 (en) | 2005-12-01 |
| CN1449452A (zh) | 2003-10-15 |
| JP2004511651A (ja) | 2004-04-15 |
| MY134162A (en) | 2007-11-30 |
| WO2001096620A2 (en) | 2001-12-20 |
| AU2001296213A1 (en) | 2001-12-24 |
| JP5341292B2 (ja) | 2013-11-13 |
| KR100815034B1 (ko) | 2008-03-18 |
| KR20030001543A (ko) | 2003-01-06 |
| DE60136351D1 (de) | 2008-12-11 |
| CN1328409C (zh) | 2007-07-25 |
| US20020072475A1 (en) | 2002-06-13 |
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