ATE421771T1 - Verfahren zur herstellung von metall- /halbleiterkontakten über ein dielektrikum - Google Patents

Verfahren zur herstellung von metall- /halbleiterkontakten über ein dielektrikum

Info

Publication number
ATE421771T1
ATE421771T1 AT06709480T AT06709480T ATE421771T1 AT E421771 T1 ATE421771 T1 AT E421771T1 AT 06709480 T AT06709480 T AT 06709480T AT 06709480 T AT06709480 T AT 06709480T AT E421771 T1 ATE421771 T1 AT E421771T1
Authority
AT
Austria
Prior art keywords
dielectric
layer
seconductor
dilectric
producing metal
Prior art date
Application number
AT06709480T
Other languages
English (en)
Inventor
Pierre Jean Ribeyron
Emmanuel Rolland
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE421771T1 publication Critical patent/ATE421771T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/93—Interconnections
    • H10F77/933—Interconnections for devices having potential barriers
    • H10F77/935—Interconnections for devices having potential barriers for photovoltaic devices or modules
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Photovoltaic Devices (AREA)
AT06709480T 2005-02-08 2006-02-06 Verfahren zur herstellung von metall- /halbleiterkontakten über ein dielektrikum ATE421771T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0550357A FR2881879B1 (fr) 2005-02-08 2005-02-08 Procede de realisation de contacts metal/semi-conducteur a travers un dielectrique.

Publications (1)

Publication Number Publication Date
ATE421771T1 true ATE421771T1 (de) 2009-02-15

Family

ID=35056996

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06709480T ATE421771T1 (de) 2005-02-08 2006-02-06 Verfahren zur herstellung von metall- /halbleiterkontakten über ein dielektrikum

Country Status (8)

Country Link
US (1) US7759231B2 (de)
EP (1) EP1846956B1 (de)
JP (1) JP2008530775A (de)
CN (1) CN100481522C (de)
AT (1) ATE421771T1 (de)
DE (1) DE602006004967D1 (de)
FR (1) FR2881879B1 (de)
WO (1) WO2006085021A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8399331B2 (en) 2007-10-06 2013-03-19 Solexel Laser processing for high-efficiency thin crystalline silicon solar cell fabrication
US8637340B2 (en) 2004-11-30 2014-01-28 Solexel, Inc. Patterning of silicon oxide layers using pulsed laser ablation
US9508886B2 (en) 2007-10-06 2016-11-29 Solexel, Inc. Method for making a crystalline silicon solar cell substrate utilizing flat top laser beam
FR2880989B1 (fr) 2005-01-20 2007-03-09 Commissariat Energie Atomique Dispositif semi-conducteur a heterojonctions et a structure inter-digitee
FR2880986B1 (fr) 2005-01-20 2007-03-02 Commissariat Energie Atomique Procede de metallisation d'un dispositif semi-conducteur
US20100275982A1 (en) * 2007-09-04 2010-11-04 Malcolm Abbott Group iv nanoparticle junctions and devices therefrom
US9455362B2 (en) * 2007-10-06 2016-09-27 Solexel, Inc. Laser irradiation aluminum doping for monocrystalline silicon substrates
KR101076611B1 (ko) * 2009-09-16 2011-10-26 주식회사 신성홀딩스 태양 전지 및 그 제조 방법
KR101579318B1 (ko) * 2010-04-29 2015-12-21 엘지전자 주식회사 태양 전지 및 그 제조 방법
CN103038870A (zh) * 2010-07-02 2013-04-10 新南创新私人有限公司 用于太阳能电池的金属触点方案
KR101654548B1 (ko) 2011-12-26 2016-09-06 솔렉셀, 인크. 태양 전지에서 향상된 광 포획을 위한 시스템 및 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626613A (en) * 1983-12-23 1986-12-02 Unisearch Limited Laser grooved solar cell
US4703553A (en) * 1986-06-16 1987-11-03 Spectrolab, Inc. Drive through doping process for manufacturing low back surface recombination solar cells
US5011565A (en) * 1989-12-06 1991-04-30 Mobil Solar Energy Corporation Dotted contact solar cell and method of making same
JPH0563226A (ja) * 1991-08-30 1993-03-12 Isuzu Motors Ltd 粉体シートの製造方法
DE10046170A1 (de) * 2000-09-19 2002-04-04 Fraunhofer Ges Forschung Verfahren zur Herstellung eines Halbleiter-Metallkontaktes durch eine dielektrische Schicht
JP2002246625A (ja) * 2001-02-21 2002-08-30 Sharp Corp 太陽電池の製造方法
US6524880B2 (en) * 2001-04-23 2003-02-25 Samsung Sdi Co., Ltd. Solar cell and method for fabricating the same

Also Published As

Publication number Publication date
EP1846956B1 (de) 2009-01-21
EP1846956A1 (de) 2007-10-24
WO2006085021A1 (fr) 2006-08-17
FR2881879B1 (fr) 2007-03-09
CN100481522C (zh) 2009-04-22
US7759231B2 (en) 2010-07-20
FR2881879A1 (fr) 2006-08-11
JP2008530775A (ja) 2008-08-07
CN101116188A (zh) 2008-01-30
DE602006004967D1 (de) 2009-03-12
US20080132054A1 (en) 2008-06-05

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Legal Events

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