ATE434265T1 - Kondensatorstruktur mit einer vielzahl von anschlüssen - Google Patents
Kondensatorstruktur mit einer vielzahl von anschlüssenInfo
- Publication number
- ATE434265T1 ATE434265T1 AT02008769T AT02008769T ATE434265T1 AT E434265 T1 ATE434265 T1 AT E434265T1 AT 02008769 T AT02008769 T AT 02008769T AT 02008769 T AT02008769 T AT 02008769T AT E434265 T1 ATE434265 T1 AT E434265T1
- Authority
- AT
- Austria
- Prior art keywords
- capacitor structure
- providing
- electrode layer
- terminals
- film electrode
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
- H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
- H10D84/212—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/541—Dispositions of bond wires
- H10W72/5445—Dispositions of bond wires being orthogonal to a side surface of the chip, e.g. parallel arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Details Of Connecting Devices For Male And Female Coupling (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/838,412 US6549396B2 (en) | 2001-04-19 | 2001-04-19 | Multiple terminal capacitor structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE434265T1 true ATE434265T1 (de) | 2009-07-15 |
Family
ID=25277033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT02008769T ATE434265T1 (de) | 2001-04-19 | 2002-04-18 | Kondensatorstruktur mit einer vielzahl von anschlüssen |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6549396B2 (de) |
| EP (1) | EP1251559B1 (de) |
| AT (1) | ATE434265T1 (de) |
| CA (1) | CA2381117C (de) |
| DE (1) | DE60232619D1 (de) |
Families Citing this family (56)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5345170A (en) | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
| US6380751B2 (en) | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US5561377A (en) | 1995-04-14 | 1996-10-01 | Cascade Microtech, Inc. | System for evaluating probing networks |
| US6232789B1 (en) | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
| US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
| US6002263A (en) | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
| US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
| US6578264B1 (en) | 1999-06-04 | 2003-06-17 | Cascade Microtech, Inc. | Method for constructing a membrane probe using a depression |
| US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US6838890B2 (en) | 2000-02-25 | 2005-01-04 | Cascade Microtech, Inc. | Membrane probing system |
| US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
| DE10143173A1 (de) | 2000-12-04 | 2002-06-06 | Cascade Microtech Inc | Wafersonde |
| AU2002327490A1 (en) | 2001-08-21 | 2003-06-30 | Cascade Microtech, Inc. | Membrane probing system |
| US6777964B2 (en) | 2002-01-25 | 2004-08-17 | Cascade Microtech, Inc. | Probe station |
| JP2005527823A (ja) | 2002-05-23 | 2005-09-15 | カスケード マイクロテック インコーポレイテッド | デバイスのテスト用プローブ |
| US6847219B1 (en) | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
| US6724205B1 (en) | 2002-11-13 | 2004-04-20 | Cascade Microtech, Inc. | Probe for combined signals |
| US7250779B2 (en) | 2002-11-25 | 2007-07-31 | Cascade Microtech, Inc. | Probe station with low inductance path |
| US6861856B2 (en) | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
| DE10260352A1 (de) * | 2002-12-20 | 2004-07-15 | Infineon Technologies Ag | Verfahren zum Herstellen einer Kondensatoranordnung und Kondensatoranordnung |
| US7221172B2 (en) | 2003-05-06 | 2007-05-22 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
| US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| DE10326087B4 (de) | 2003-06-10 | 2008-03-20 | Infineon Technologies Ag | Bauelement mit einer Nutzstruktur und einer Hilfsstruktur |
| US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
| DE202004021093U1 (de) | 2003-12-24 | 2006-09-28 | Cascade Microtech, Inc., Beaverton | Aktiver Halbleiterscheibenmessfühler |
| US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
| JP2008502167A (ja) | 2004-06-07 | 2008-01-24 | カスケード マイクロテック インコーポレイテッド | 熱光学チャック |
| US7330041B2 (en) | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
| JP4980903B2 (ja) | 2004-07-07 | 2012-07-18 | カスケード マイクロテック インコーポレイテッド | 膜懸垂プローブを具えるプローブヘッド |
| JP2008512680A (ja) | 2004-09-13 | 2008-04-24 | カスケード マイクロテック インコーポレイテッド | 両面プロービング構造体 |
| US20060157792A1 (en) * | 2005-01-19 | 2006-07-20 | Kyocera Corporation | Laminated thin film capacitor and semiconductor apparatus |
| US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
| US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
| US20060274476A1 (en) * | 2005-04-13 | 2006-12-07 | Andrew Cervin-Lawry | Low loss thin film capacitor and methods of manufacturing the same |
| US7449899B2 (en) | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
| EP1932003A2 (de) | 2005-06-13 | 2008-06-18 | Cascade Microtech, Inc. | Breitbandige aktiv-passiv-differenzsignalsonde |
| DE102005052637A1 (de) * | 2005-11-04 | 2007-05-24 | Atmel Duisburg Gmbh | Monolithisch integrierte Schaltung |
| US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
| US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
| US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
| US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
| US7443186B2 (en) | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
| WO2008041565A1 (en) * | 2006-09-27 | 2008-04-10 | Kyocera Corporation | Capacitor, capacitor device, electronic component, filter device, communication device and method for manufacturing capacitor device |
| US8169772B2 (en) | 2007-05-01 | 2012-05-01 | Avx Corporation | Precision laser adjustable thin film capacitors |
| US20080304202A1 (en) * | 2007-06-04 | 2008-12-11 | Taiyo Yuden Co., Ltd. | Multi-layer capacitor and integrated circuit module |
| US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
| US20090230446A1 (en) | 2008-03-17 | 2009-09-17 | Technology Alliance Group, Inc. | Semiconductor device and bypass capacitor module |
| US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
| US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
| US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
| US20110007488A1 (en) * | 2009-07-07 | 2011-01-13 | Chin-Wei Liu | Power supply current circuit structure |
| US9648727B2 (en) | 2015-01-22 | 2017-05-09 | Harris Corporation | Fault detection optimized electronic circuit and method |
| US12406944B2 (en) * | 2019-06-11 | 2025-09-02 | Skyworks Solutions, Inc. | Moisture barrier for metal insulator metal capacitors and integrated circuit having the same |
| US11990470B2 (en) * | 2021-09-24 | 2024-05-21 | International Business Machines Corporation | Ferroelectric and paraelectric stack capacitors |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4916576A (en) | 1989-02-27 | 1990-04-10 | Fmtt, Inc. | Matrix capacitor |
| US5530722A (en) | 1992-10-27 | 1996-06-25 | Ericsson Ge Mobile Communications Inc. | Quadrature modulator with integrated distributed RC filters |
| US5745335A (en) * | 1996-06-27 | 1998-04-28 | Gennum Corporation | Multi-layer film capacitor structures and method |
| US5910879A (en) * | 1996-06-27 | 1999-06-08 | Herbert; Edward | 3- and 4-terminal capacitors with "Faraday-shielded" connections |
| US5880925A (en) * | 1997-06-27 | 1999-03-09 | Avx Corporation | Surface mount multilayer capacitor |
| US6266229B1 (en) * | 1997-11-10 | 2001-07-24 | Murata Manufacturing Co., Ltd | Multilayer capacitor |
| JP2000183286A (ja) * | 1998-12-10 | 2000-06-30 | Nec Corp | 半導体集積回路 |
-
2001
- 2001-04-19 US US09/838,412 patent/US6549396B2/en not_active Expired - Lifetime
-
2002
- 2002-04-10 CA CA002381117A patent/CA2381117C/en not_active Expired - Fee Related
- 2002-04-18 EP EP02008769A patent/EP1251559B1/de not_active Expired - Lifetime
- 2002-04-18 DE DE60232619T patent/DE60232619D1/de not_active Expired - Fee Related
- 2002-04-18 AT AT02008769T patent/ATE434265T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1251559A2 (de) | 2002-10-23 |
| CA2381117C (en) | 2006-11-14 |
| EP1251559A3 (de) | 2005-03-09 |
| US20020163769A1 (en) | 2002-11-07 |
| EP1251559B1 (de) | 2009-06-17 |
| US6549396B2 (en) | 2003-04-15 |
| DE60232619D1 (de) | 2009-07-30 |
| CA2381117A1 (en) | 2002-10-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |