ATE434832T1 - Mikroelektronisches system mit integriertem kryostatischem kühler - Google Patents

Mikroelektronisches system mit integriertem kryostatischem kühler

Info

Publication number
ATE434832T1
ATE434832T1 AT02763546T AT02763546T ATE434832T1 AT E434832 T1 ATE434832 T1 AT E434832T1 AT 02763546 T AT02763546 T AT 02763546T AT 02763546 T AT02763546 T AT 02763546T AT E434832 T1 ATE434832 T1 AT E434832T1
Authority
AT
Austria
Prior art keywords
expansion
heat
exchanger
fluid
orifice
Prior art date
Application number
AT02763546T
Other languages
English (en)
Inventor
Larry Sobel
Jeff Capara
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Application granted granted Critical
Publication of ATE434832T1 publication Critical patent/ATE434832T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/02—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using Joule-Thompson effect; using vortex effect
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/005—Details of vessels or of the filling or discharging of vessels for medium-size and small storage vessels not under pressure
    • F17C13/006—Details of vessels or of the filling or discharging of vessels for medium-size and small storage vessels not under pressure for Dewar vessels or cryostats
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/30—Arrangements for thermal protection or thermal control wherein the packaged device is completely immersed in a fluid other than air, e.g. immersed in a cryogenic fluid
    • H10W40/305—Arrangements for thermal protection or thermal control wherein the packaged device is completely immersed in a fluid other than air, e.g. immersed in a cryogenic fluid the fluid being a liquefied gas, e.g. liquid nitrogen

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Medicines Containing Plant Substances (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Polysaccharides And Polysaccharide Derivatives (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
AT02763546T 2001-09-07 2002-08-29 Mikroelektronisches system mit integriertem kryostatischem kühler ATE434832T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/952,513 US6621071B2 (en) 2001-09-07 2001-09-07 Microelectronic system with integral cryocooler, and its fabrication and use
PCT/US2002/027326 WO2003025476A2 (en) 2001-09-07 2002-08-29 Microelectronic system with integral cyrocooler, and its fabrication and use

Publications (1)

Publication Number Publication Date
ATE434832T1 true ATE434832T1 (de) 2009-07-15

Family

ID=25492978

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02763546T ATE434832T1 (de) 2001-09-07 2002-08-29 Mikroelektronisches system mit integriertem kryostatischem kühler

Country Status (6)

Country Link
US (2) US6621071B2 (de)
EP (1) EP1425798B1 (de)
AT (1) ATE434832T1 (de)
DE (1) DE60232731D1 (de)
IL (2) IL157123A0 (de)
WO (1) WO2003025476A2 (de)

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JP2006226743A (ja) * 2005-02-16 2006-08-31 Mitsubishi Electric Corp 加速度センサ
DE102005013227A1 (de) * 2005-03-18 2006-09-28 Infineon Technologies Fiber Optics Gmbh Optoelektronische Sende- und/oder Empfangsvorrichtung und optoelektronische Anordnung mit einer Mehrzahl derartiger optoelektronischer Sende- und/oder Empfangsvorrichtungen
US8353332B2 (en) 2010-10-13 2013-01-15 Reid Aarne H Integrated electronics cooling device
JP5773353B2 (ja) * 2011-02-15 2015-09-02 忠元 誠 熱交換器
WO2013043883A1 (en) 2011-09-20 2013-03-28 Lockheed Martin Corporation Extended travel flexure bearing and micro check valve
US8987893B1 (en) * 2011-10-18 2015-03-24 Marvell International Ltd. Heat dissipating interposers
US9784505B2 (en) * 2012-05-15 2017-10-10 Lockheed Martin Corporation System, apparatus, and method for micro-capillary heat exchanger
US9243726B2 (en) 2012-10-03 2016-01-26 Aarne H. Reid Vacuum insulated structure with end fitting and method of making same
US9936579B2 (en) * 2013-02-01 2018-04-03 Apple Inc. Low profile packaging and assembly of a power conversion system in modular form
US9683766B1 (en) * 2013-07-12 2017-06-20 Lockheed Martin Corporation System and method for electronic de-clogging of microcoolers
US9463918B2 (en) 2014-02-20 2016-10-11 Aarne H. Reid Vacuum insulated articles and methods of making same
FR3018352B1 (fr) * 2014-03-06 2016-04-01 Soc Fr Detecteurs Infrarouges Sofradir Dispositif de detection refroidi
US9999885B1 (en) 2014-05-30 2018-06-19 Lockheed Martin Corporation Integrated functional and fluidic circuits in Joule-Thompson microcoolers
US10497908B2 (en) 2015-08-24 2019-12-03 Concept Group, Llc Sealed packages for electronic and energy storage devices
US10065256B2 (en) 2015-10-30 2018-09-04 Concept Group Llc Brazing systems and methods
CN109154641B (zh) 2016-03-04 2021-09-17 概念集团有限责任公司 具有反射材料增强的真空隔热制品
US11262142B2 (en) * 2016-04-26 2022-03-01 Northrop Grumman Systems Corporation Heat exchangers, weld configurations for heat exchangers and related systems and methods
US10823326B2 (en) 2016-11-15 2020-11-03 Concept Group Llc Enhanced vacuum-insulated articles with controlled microporous insulation
EP3541722A4 (de) 2016-11-15 2020-07-08 Concept Group LLC Mehrlagenisolierte anordnungen
US10390455B2 (en) * 2017-03-27 2019-08-20 Raytheon Company Thermal isolation of cryo-cooled components from circuit boards or other structures
JP2020531764A (ja) 2017-08-25 2020-11-05 コンセプト グループ エルエルシー 複合的ジオメトリおよび複合的材料の断熱部品
US12262463B2 (en) 2018-08-24 2025-03-25 Radialis Medical, Inc. Liquid cooling system for precise temperature control of radiation detector for positron emission mammography
CN112880233B (zh) * 2021-01-07 2022-09-20 武汉高芯科技有限公司 一种超微型mems节流制冷红外探测器
CN113324344A (zh) * 2021-04-30 2021-08-31 武汉高德红外股份有限公司 一种节流制冷器
US20240410656A1 (en) * 2023-06-08 2024-12-12 Raytheon Technologies Corporation Composite heat exchange apparatus for a turbine engine
CN116772906A (zh) * 2023-06-25 2023-09-19 武汉高芯科技有限公司 一种探测器
CN121559821B (zh) * 2026-01-22 2026-04-10 北京芯东来半导体科技有限公司 光刻机物镜相差检测温控装置

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Also Published As

Publication number Publication date
EP1425798A2 (de) 2004-06-09
DE60232731D1 (de) 2009-08-06
US20060180752A1 (en) 2006-08-17
WO2003025476A3 (en) 2004-02-05
US20030047685A1 (en) 2003-03-13
IL157123A0 (en) 2004-02-08
WO2003025476A2 (en) 2003-03-27
US7178345B2 (en) 2007-02-20
US6621071B2 (en) 2003-09-16
EP1425798B1 (de) 2009-06-24
IL157123A (en) 2010-05-31

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