ATE439618T1 - Membranabdeckung und haftmittel hierfür - Google Patents

Membranabdeckung und haftmittel hierfür

Info

Publication number
ATE439618T1
ATE439618T1 AT01105488T AT01105488T ATE439618T1 AT E439618 T1 ATE439618 T1 AT E439618T1 AT 01105488 T AT01105488 T AT 01105488T AT 01105488 T AT01105488 T AT 01105488T AT E439618 T1 ATE439618 T1 AT E439618T1
Authority
AT
Austria
Prior art keywords
fluorine
adhesive
bonded
containing polymer
atom
Prior art date
Application number
AT01105488T
Other languages
English (en)
Inventor
Ikuo Matsukura
Naoko Shirota
Jun Irisawa
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Application granted granted Critical
Publication of ATE439618T1 publication Critical patent/ATE439618T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
    • Y10T428/31544—Addition polymer is perhalogenated

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Adhesives Or Adhesive Processes (AREA)
AT01105488T 2000-03-15 2001-03-14 Membranabdeckung und haftmittel hierfür ATE439618T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000072718 2000-03-15

Publications (1)

Publication Number Publication Date
ATE439618T1 true ATE439618T1 (de) 2009-08-15

Family

ID=18591080

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01105488T ATE439618T1 (de) 2000-03-15 2001-03-14 Membranabdeckung und haftmittel hierfür

Country Status (6)

Country Link
US (3) US6548129B2 (de)
EP (1) EP1154320B1 (de)
KR (1) KR20010092367A (de)
AT (1) ATE439618T1 (de)
DE (1) DE60139526D1 (de)
TW (1) TW500972B (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6548129B2 (en) * 2000-03-15 2003-04-15 Asahi Glass Company, Limited Pellicle
KR20040029988A (ko) * 2001-05-14 2004-04-08 이 아이 듀폰 디 네모아 앤드 캄파니 자외선 및 진공 자외선에서 투명성을 요구하는 응용에서부분 플루오르화 중합체의 용도
US20030096096A1 (en) * 2001-11-19 2003-05-22 Jo Byeong H. Plastic rail system reinforced with fiberglass thermoplastic composites
US7129009B2 (en) * 2002-05-14 2006-10-31 E. I. Du Pont De Nemours And Company Polymer-liquid compositions useful in ultraviolet and vacuum ultraviolet uses
DE60327333D1 (de) * 2002-08-21 2009-06-04 Asahi Glass Co Ltd Uv-durchlässige fluorpolymere und durch deren verwendung hergestellte pellikel
JP2004085713A (ja) * 2002-08-23 2004-03-18 Asahi Glass Co Ltd ペリクル
JP2004157229A (ja) * 2002-11-05 2004-06-03 Shin Etsu Chem Co Ltd リソグラフィ用ペリクル及びその製造方法
US20050025959A1 (en) * 2003-07-31 2005-02-03 Bellman Robert A. Hard pellicle and fabrication thereof
US7264853B2 (en) * 2003-08-26 2007-09-04 Intel Corporation Attaching a pellicle frame to a reticle
US7316869B2 (en) * 2003-08-26 2008-01-08 Intel Corporation Mounting a pellicle to a frame
CN1886442B (zh) * 2003-12-03 2010-09-08 旭硝子株式会社 表膜及新的含氟聚合物
US7709180B2 (en) * 2003-12-19 2010-05-04 Sematech, Inc. Soft pellicle and method of making same
US7504192B2 (en) * 2003-12-19 2009-03-17 Sematech Inc. Soft pellicle for 157 and 193 nm and method of making same
US20050202252A1 (en) * 2004-03-12 2005-09-15 Alexander Tregub Use of alternative polymer materials for "soft" polymer pellicles
US7314667B2 (en) * 2004-03-12 2008-01-01 Intel Corporation Process to optimize properties of polymer pellicles and resist for lithography applications
CN101945857A (zh) * 2008-01-16 2011-01-12 Vvi明亮有限公司 高介电常数的液晶
JP2010210974A (ja) * 2009-03-11 2010-09-24 Shin-Etsu Chemical Co Ltd ペリクルの製造方法及びペリクル
EP2738603B1 (de) * 2011-07-29 2016-07-13 Asahi Glass Company, Limited Lithographiemembran, fotomaske mit der membran und belichtungsverfahren dafür
WO2016010043A1 (ja) 2014-07-15 2016-01-21 旭硝子株式会社 紫外線発光装置用接着剤および紫外線発光装置
EP3455322B1 (de) * 2016-05-09 2021-03-03 3M Innovative Properties Company Hydrofluorolefine und verfahren zur verwendung davon

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6083032A (ja) 1983-10-13 1985-05-11 Asahi Chem Ind Co Ltd 光透過性に優れたフオトマスク用防塵カバ−
JP2951337B2 (ja) 1989-04-17 1999-09-20 古河電気工業株式会社 ペリクル
JP2952962B2 (ja) 1989-05-31 1999-09-27 旭硝子株式会社 汚染防止保護器具
ATE122477T1 (de) 1989-09-06 1995-05-15 Du Pont Nichtreflektierende filmabdeckung.
US5061024C1 (en) 1989-09-06 2002-02-26 Dupont Photomasks Inc Amorphous fluoropolymer pellicle films
US5168001A (en) * 1991-05-20 1992-12-01 E. I. Du Pont De Nemours And Company Perfluoropolymer coated pellicle
US5422704A (en) * 1992-07-13 1995-06-06 Intel Corporation Pellicle frame
JPH0667409A (ja) * 1992-08-21 1994-03-11 Shin Etsu Chem Co Ltd リソグラフィー用ペリクル
JP3089153B2 (ja) * 1993-12-13 2000-09-18 信越化学工業株式会社 リソグラフィー用ペリクル
DE19581773T1 (de) 1994-09-09 1997-10-16 Univ Toledo Verbesserter Kniegelenksmechanismus für eine Prothese für Kniegelenksbehinderungen
FR2739853B1 (fr) 1995-10-16 1999-03-26 Ferent Maurice Procede d'obtention d'une composition contenant des ceramides simples, et composition obtenue
US5836943A (en) 1996-08-23 1998-11-17 Team Medical, L.L.C. Electrosurgical generator
US5966490A (en) * 1997-03-21 1999-10-12 Sdl, Inc. Clad optic fiber, and process for production thereof
US6403740B1 (en) 1997-04-15 2002-06-11 E. I. Du Pont De Nemours And Company Vinyl fluoride interpolymers
KR20020053083A (ko) 1999-11-17 2002-07-04 메리 이. 보울러 자외선 및 진공자외선 투명 폴리머 조성물 및 그의 용도
US6548129B2 (en) * 2000-03-15 2003-04-15 Asahi Glass Company, Limited Pellicle

Also Published As

Publication number Publication date
KR20010092367A (ko) 2001-10-24
US20010024701A1 (en) 2001-09-27
US6660346B2 (en) 2003-12-09
US20030134057A1 (en) 2003-07-17
DE60139526D1 (de) 2009-09-24
EP1154320A1 (de) 2001-11-14
EP1154320B1 (de) 2009-08-12
US20040048005A1 (en) 2004-03-11
TW500972B (en) 2002-09-01
US6548129B2 (en) 2003-04-15

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