ATE439618T1 - Membranabdeckung und haftmittel hierfür - Google Patents

Membranabdeckung und haftmittel hierfür

Info

Publication number
ATE439618T1
ATE439618T1 AT01105488T AT01105488T ATE439618T1 AT E439618 T1 ATE439618 T1 AT E439618T1 AT 01105488 T AT01105488 T AT 01105488T AT 01105488 T AT01105488 T AT 01105488T AT E439618 T1 ATE439618 T1 AT E439618T1
Authority
AT
Austria
Prior art keywords
fluorine
adhesive
bonded
containing polymer
atom
Prior art date
Application number
AT01105488T
Other languages
English (en)
Inventor
Ikuo Matsukura
Naoko Shirota
Jun Irisawa
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Application granted granted Critical
Publication of ATE439618T1 publication Critical patent/ATE439618T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
    • Y10T428/31544—Addition polymer is perhalogenated

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Adhesives Or Adhesive Processes (AREA)
AT01105488T 2000-03-15 2001-03-14 Membranabdeckung und haftmittel hierfür ATE439618T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000072718 2000-03-15

Publications (1)

Publication Number Publication Date
ATE439618T1 true ATE439618T1 (de) 2009-08-15

Family

ID=18591080

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01105488T ATE439618T1 (de) 2000-03-15 2001-03-14 Membranabdeckung und haftmittel hierfür

Country Status (6)

Country Link
US (3) US6548129B2 (de)
EP (1) EP1154320B1 (de)
KR (1) KR20010092367A (de)
AT (1) ATE439618T1 (de)
DE (1) DE60139526D1 (de)
TW (1) TW500972B (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6548129B2 (en) * 2000-03-15 2003-04-15 Asahi Glass Company, Limited Pellicle
WO2002093261A1 (en) * 2001-05-14 2002-11-21 E.I. Du Pont De Nemours And Company Use of partially fluorinated polymers in applications requiring transparency in the ultraviolet and vacuum ultraviolet
US20030096096A1 (en) * 2001-11-19 2003-05-22 Jo Byeong H. Plastic rail system reinforced with fiberglass thermoplastic composites
US7129009B2 (en) * 2002-05-14 2006-10-31 E. I. Du Pont De Nemours And Company Polymer-liquid compositions useful in ultraviolet and vacuum ultraviolet uses
AU2003257654A1 (en) * 2002-08-21 2004-03-11 Asahi Glass Company, Limited Ultraviolet-permeable fluoropolymers and pellicles made by using the same
JP2004085713A (ja) * 2002-08-23 2004-03-18 Asahi Glass Co Ltd ペリクル
JP2004157229A (ja) * 2002-11-05 2004-06-03 Shin Etsu Chem Co Ltd リソグラフィ用ペリクル及びその製造方法
US20050025959A1 (en) * 2003-07-31 2005-02-03 Bellman Robert A. Hard pellicle and fabrication thereof
US7264853B2 (en) * 2003-08-26 2007-09-04 Intel Corporation Attaching a pellicle frame to a reticle
US7316869B2 (en) * 2003-08-26 2008-01-08 Intel Corporation Mounting a pellicle to a frame
KR101141570B1 (ko) * 2003-12-03 2012-05-03 아사히 가라스 가부시키가이샤 펠리클 및 신규 함불소 중합체
US7709180B2 (en) * 2003-12-19 2010-05-04 Sematech, Inc. Soft pellicle and method of making same
US7504192B2 (en) * 2003-12-19 2009-03-17 Sematech Inc. Soft pellicle for 157 and 193 nm and method of making same
US20050202252A1 (en) * 2004-03-12 2005-09-15 Alexander Tregub Use of alternative polymer materials for "soft" polymer pellicles
US7314667B2 (en) * 2004-03-12 2008-01-01 Intel Corporation Process to optimize properties of polymer pellicles and resist for lithography applications
US8444877B2 (en) * 2008-01-16 2013-05-21 Vvi Bright China Ltd. High dielectric constant liquid crystal
JP2010210974A (ja) * 2009-03-11 2010-09-24 Shin-Etsu Chemical Co Ltd ペリクルの製造方法及びペリクル
KR20140042813A (ko) * 2011-07-29 2014-04-07 아사히 가라스 가부시키가이샤 리소그래피용 펠리클, 펠리클이 부착된 포토마스크 및 노광 처리 방법
JP6465113B2 (ja) * 2014-07-15 2019-02-06 Ａｇｃ株式会社 紫外線発光装置用接着剤および紫外線発光装置
KR102374272B1 (ko) * 2016-05-09 2022-03-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 하이드로플루오로올레핀 및 이의 사용 방법

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6083032A (ja) 1983-10-13 1985-05-11 Asahi Chem Ind Co Ltd 光透過性に優れたフオトマスク用防塵カバ−
JP2951337B2 (ja) 1989-04-17 1999-09-20 古河電気工業株式会社 ペリクル
JP2952962B2 (ja) 1989-05-31 1999-09-27 旭硝子株式会社 汚染防止保護器具
US5061024C1 (en) 1989-09-06 2002-02-26 Dupont Photomasks Inc Amorphous fluoropolymer pellicle films
ATE122477T1 (de) 1989-09-06 1995-05-15 Du Pont Nichtreflektierende filmabdeckung.
US5168001A (en) * 1991-05-20 1992-12-01 E. I. Du Pont De Nemours And Company Perfluoropolymer coated pellicle
US5422704A (en) * 1992-07-13 1995-06-06 Intel Corporation Pellicle frame
JPH0667409A (ja) * 1992-08-21 1994-03-11 Shin Etsu Chem Co Ltd リソグラフィー用ペリクル
JP3089153B2 (ja) * 1993-12-13 2000-09-18 信越化学工業株式会社 リソグラフィー用ペリクル
WO1996007378A1 (en) 1994-09-09 1996-03-14 University Of Toledo Improved knee joint mechanism for knee disarticulation prosthesis
FR2739853B1 (fr) 1995-10-16 1999-03-26 Ferent Maurice Procede d'obtention d'une composition contenant des ceramides simples, et composition obtenue
US5836943A (en) 1996-08-23 1998-11-17 Team Medical, L.L.C. Electrosurgical generator
US5966490A (en) * 1997-03-21 1999-10-12 Sdl, Inc. Clad optic fiber, and process for production thereof
US6403740B1 (en) 1997-04-15 2002-06-11 E. I. Du Pont De Nemours And Company Vinyl fluoride interpolymers
EP1238310A1 (de) 1999-11-17 2002-09-11 E.I. Du Pont De Nemours And Company Ultraviolet und vakuum ultraviolet transparente polymerzusammensetzungen und deren verwendung
US6548129B2 (en) * 2000-03-15 2003-04-15 Asahi Glass Company, Limited Pellicle

Also Published As

Publication number Publication date
DE60139526D1 (de) 2009-09-24
KR20010092367A (ko) 2001-10-24
EP1154320B1 (de) 2009-08-12
US6548129B2 (en) 2003-04-15
US20040048005A1 (en) 2004-03-11
US20010024701A1 (en) 2001-09-27
US6660346B2 (en) 2003-12-09
EP1154320A1 (de) 2001-11-14
US20030134057A1 (en) 2003-07-17
TW500972B (en) 2002-09-01

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Legal Events

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