ATE471768T1 - Oberflächen-mikromechanisches verfahren zur herstellung von mikrozerspanten kapazitiven ultraakustischen messwertgebern - Google Patents

Oberflächen-mikromechanisches verfahren zur herstellung von mikrozerspanten kapazitiven ultraakustischen messwertgebern

Info

Publication number
ATE471768T1
ATE471768T1 AT06728466T AT06728466T ATE471768T1 AT E471768 T1 ATE471768 T1 AT E471768T1 AT 06728466 T AT06728466 T AT 06728466T AT 06728466 T AT06728466 T AT 06728466T AT E471768 T1 ATE471768 T1 AT E471768T1
Authority
AT
Austria
Prior art keywords
transducer
silicon nitride
mached
acoustic transducers
producing micro
Prior art date
Application number
AT06728466T
Other languages
English (en)
Inventor
Giosue Caliano
Alessandro Caronti
Massimo Pappalardo
Elena Cianci
Vittorio Foglietti
Antonio Minotti
Alessandro Nencioni
Original Assignee
Consiglio Nazionale Ricerche
Esaote Spa
Giosue Caliano
Savoia Alessandro Stuart
Gatta Philipp
Massimo Pappalardo
Longo Cristina
Alessandro Caronti
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consiglio Nazionale Ricerche, Esaote Spa, Giosue Caliano, Savoia Alessandro Stuart, Gatta Philipp, Massimo Pappalardo, Longo Cristina, Alessandro Caronti filed Critical Consiglio Nazionale Ricerche
Application granted granted Critical
Publication of ATE471768T1 publication Critical patent/ATE471768T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
AT06728466T 2005-03-04 2006-03-02 Oberflächen-mikromechanisches verfahren zur herstellung von mikrozerspanten kapazitiven ultraakustischen messwertgebern ATE471768T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT000093A ITRM20050093A1 (it) 2005-03-04 2005-03-04 Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato.
PCT/IT2006/000126 WO2006092820A2 (en) 2005-03-04 2006-03-02 Surface micromechanical process for manufacturing micromachined capacitive ultra- acoustic transducers

Publications (1)

Publication Number Publication Date
ATE471768T1 true ATE471768T1 (de) 2010-07-15

Family

ID=36676422

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06728466T ATE471768T1 (de) 2005-03-04 2006-03-02 Oberflächen-mikromechanisches verfahren zur herstellung von mikrozerspanten kapazitiven ultraakustischen messwertgebern

Country Status (7)

Country Link
US (1) US7790490B2 (de)
EP (1) EP1863597B1 (de)
CN (1) CN101262958B (de)
AT (1) ATE471768T1 (de)
DE (1) DE602006015039D1 (de)
IT (1) ITRM20050093A1 (de)
WO (1) WO2006092820A2 (de)

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EP1764162B1 (de) * 2005-09-14 2008-04-30 Esaote S.p.A. Elektroakustischer Wandler für Hochfrequenzanwendungen
ITRM20060238A1 (it) * 2006-05-03 2007-11-04 Esaote Spa Trasduttore ultracustico capacitivo multipiano
JP5305993B2 (ja) * 2008-05-02 2013-10-02 キヤノン株式会社 容量型機械電気変換素子の製造方法、及び容量型機械電気変換素子
JP2010004199A (ja) * 2008-06-19 2010-01-07 Hitachi Ltd 超音波トランスデューサおよびその製造方法
JP5409251B2 (ja) * 2008-11-19 2014-02-05 キヤノン株式会社 電気機械変換装置およびその製造方法
FR2938918B1 (fr) * 2008-11-21 2011-02-11 Commissariat Energie Atomique Procede et dispositif d'analyse acoustique de microporosites dans un materiau tel que le beton a l'aide d'une pluralite de transducteurs cmuts incorpores dans le materiau
DE112010000714B4 (de) * 2009-01-27 2014-06-26 National University Corporation Nagoya University Membranspannungsmessvorrichtung
EP2669019A1 (de) * 2009-03-26 2013-12-04 Norwegian University of Science and Technology (NTNU) Akustische Dämpfungsstruktur zur Verwendung in einem Ultraschallwandler
JP5377066B2 (ja) * 2009-05-08 2013-12-25 キヤノン株式会社 静電容量型機械電気変換素子及びその製法
JP5317826B2 (ja) * 2009-05-19 2013-10-16 キヤノン株式会社 容量型機械電気変換素子の製造方法
CN101898743A (zh) * 2009-05-27 2010-12-01 漆斌 微加工超声换能器
JP5550363B2 (ja) 2010-01-26 2014-07-16 キヤノン株式会社 静電容量型電気機械変換装置
DE102010027780A1 (de) * 2010-04-15 2011-10-20 Robert Bosch Gmbh Verfahren zum Ansteuern eines Ultraschallsensors und Ultraschallsensor
JP2011244425A (ja) * 2010-04-23 2011-12-01 Canon Inc 電気機械変換装置及びその作製方法
JP2011259371A (ja) * 2010-06-11 2011-12-22 Canon Inc 容量型電気機械変換装置の製造方法
US7998777B1 (en) * 2010-12-15 2011-08-16 General Electric Company Method for fabricating a sensor
EP2662024A4 (de) * 2011-01-06 2017-11-01 Hitachi, Ltd. Ultraschallsonde
JP5875243B2 (ja) 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
JP6069798B2 (ja) 2011-12-20 2017-02-01 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサデバイス及びこれを製造する方法
US9231496B2 (en) 2012-01-27 2016-01-05 Koninklijke Philips N.V. Capacitive micro-machined transducer and method of manufacturing the same
US9002088B2 (en) * 2012-09-07 2015-04-07 The Boeing Company Method and apparatus for creating nondestructive inspection porosity standards
CN103323042A (zh) * 2013-06-06 2013-09-25 中北大学 一体化全振导电薄膜结构的电容式超声传感器及其制作方法
US9955949B2 (en) * 2013-08-23 2018-05-01 Canon Kabushiki Kaisha Method for manufacturing a capacitive transducer
CN105197876B (zh) * 2014-06-20 2017-04-05 中芯国际集成电路制造(上海)有限公司 一种半导体器件以及制备方法、电子装置
CN105635926B (zh) * 2014-10-29 2019-06-28 中芯国际集成电路制造(上海)有限公司 一种mems麦克风及其制备方法、电子装置
CN105025423B (zh) * 2015-06-04 2018-04-20 中国科学院半导体研究所 一种驻极体电容式超声传感器及其制作方法
US10722918B2 (en) * 2015-09-03 2020-07-28 Qualcomm Incorporated Release hole plus contact via for fine pitch ultrasound transducer integration
RU2628732C1 (ru) * 2016-05-20 2017-08-21 Акционерное общество "Научно-исследовательский институт физических измерений" Способ формирования монокристаллического элемента микромеханического устройства
CN106449960B (zh) * 2016-07-01 2018-12-25 中国计量大学 一种基于静电激励/电容检测微桥谐振器的薄膜热电变换器的结构与制作方法
CN106878912A (zh) * 2017-03-03 2017-06-20 瑞声科技(新加坡)有限公司 电容式麦克风半成品的氧化层粗糙面平坦化的方法
DE102020211538A1 (de) * 2020-09-15 2022-03-17 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil, Schallwandlervorrichtung und Verfahren zum Herstellen eines mikromechanischen Bauteils

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US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US5619476A (en) * 1994-10-21 1997-04-08 The Board Of Trustees Of The Leland Stanford Jr. Univ. Electrostatic ultrasonic transducer
JP3825475B2 (ja) * 1995-06-30 2006-09-27 株式会社 東芝 電子部品の製造方法
US6271620B1 (en) * 1999-05-20 2001-08-07 Sen Corporation Acoustic transducer and method of making the same
ITRM20010243A1 (it) * 2001-05-09 2002-11-11 Consiglio Nazionale Ricerche Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel
US6659954B2 (en) * 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
US6958255B2 (en) * 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
EP1713399A4 (de) * 2004-02-06 2010-08-11 Georgia Tech Res Inst Cmut-vorrichtungen und herstellungsverfahren
US7489593B2 (en) * 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
US7525398B2 (en) * 2005-10-18 2009-04-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically communicating data signals across an electrical isolation barrier

Also Published As

Publication number Publication date
EP1863597B1 (de) 2010-06-23
EP1863597A2 (de) 2007-12-12
ITRM20050093A1 (it) 2006-09-05
WO2006092820A2 (en) 2006-09-08
CN101262958B (zh) 2011-06-08
CN101262958A (zh) 2008-09-10
US20080212407A1 (en) 2008-09-04
US7790490B2 (en) 2010-09-07
WO2006092820A3 (en) 2006-11-02
DE602006015039D1 (de) 2010-08-05

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