ATE477220T1 - Verfahren zur herstellung von mikrofluidischen vorrichtungen - Google Patents

Verfahren zur herstellung von mikrofluidischen vorrichtungen

Info

Publication number
ATE477220T1
ATE477220T1 AT07300835T AT07300835T ATE477220T1 AT E477220 T1 ATE477220 T1 AT E477220T1 AT 07300835 T AT07300835 T AT 07300835T AT 07300835 T AT07300835 T AT 07300835T AT E477220 T1 ATE477220 T1 AT E477220T1
Authority
AT
Austria
Prior art keywords
microfluidic devices
glass
methods
producing microfluidic
producing
Prior art date
Application number
AT07300835T
Other languages
English (en)
Inventor
Thierry Dannoux
Paulo Marques
Robert Morena
Cameron Tanner
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Application granted granted Critical
Publication of ATE477220T1 publication Critical patent/ATE477220T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/20—Uniting glass pieces by fusing without substantial reshaping
    • C03B23/203—Uniting glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0085—Manufacture of substrate-free structures using moulds and master templates, e.g. for hot-embossing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/051—Micromixers, microreactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/036—Hot embossing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/40—Product characteristics
    • C03B2215/41—Profiled surfaces
    • C03B2215/412—Profiled surfaces fine structured, e.g. fresnel lenses, prismatic reflectors, other sharp-edged surface profiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Glass Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)
AT07300835T 2007-02-28 2007-02-28 Verfahren zur herstellung von mikrofluidischen vorrichtungen ATE477220T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07300835A EP1964817B1 (de) 2007-02-28 2007-02-28 Verfahren zur Herstellung von mikrofluidischen Vorrichtungen

Publications (1)

Publication Number Publication Date
ATE477220T1 true ATE477220T1 (de) 2010-08-15

Family

ID=38002124

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07300835T ATE477220T1 (de) 2007-02-28 2007-02-28 Verfahren zur herstellung von mikrofluidischen vorrichtungen

Country Status (16)

Country Link
US (1) US8156762B2 (de)
EP (2) EP1964817B1 (de)
JP (1) JP2010527293A (de)
KR (1) KR101502182B1 (de)
CN (1) CN101668711A (de)
AT (1) ATE477220T1 (de)
AU (1) AU2008219616A1 (de)
BR (1) BRPI0808414A2 (de)
CA (1) CA2679443A1 (de)
DE (1) DE602007008355D1 (de)
ES (1) ES2350653T3 (de)
MX (1) MX2009009285A (de)
RU (1) RU2009135805A (de)
TW (1) TWI358390B (de)
WO (1) WO2008106160A1 (de)
ZA (1) ZA200905976B (de)

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US20100127420A1 (en) * 2008-11-25 2010-05-27 Thierry Luc Alain Dannoux Method of forming a shaped article from a sheet of material
US20100126222A1 (en) * 2008-11-25 2010-05-27 Thierry Luc Alain Dannoux Method and apparatus for forming and cutting a shaped article from a sheet of material
EP2193844B1 (de) 2008-11-26 2012-03-14 Corning Incorporated Wärmetauscher für Mikrostrukturen
KR101059838B1 (ko) * 2008-11-28 2011-08-29 한국세라믹기술원 감광성 세라믹 시트를 이용한 미세유체소자 및 그 제조 방법
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FR2955852B1 (fr) 2010-01-29 2015-09-18 Corning Inc Dispositif microfluideique en verre, ceramique ou vitroceramique, comprenant une couche intermediaire de traitement comprenant au moins une face ayant une surface structuree ouverte definissant un microcanal ferme par une couche formant feuille en verre, ceramique ou vitroceramique essentiellement plane
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Also Published As

Publication number Publication date
EP1964817A1 (de) 2008-09-03
TW200906707A (en) 2009-02-16
AU2008219616A1 (en) 2008-09-04
DE602007008355D1 (de) 2010-09-23
EP2132148A1 (de) 2009-12-16
KR20100014611A (ko) 2010-02-10
CN101668711A (zh) 2010-03-10
EP1964817B1 (de) 2010-08-11
MX2009009285A (es) 2009-10-30
ZA200905976B (en) 2010-06-30
KR101502182B1 (ko) 2015-03-12
JP2010527293A (ja) 2010-08-12
EP2132148B1 (de) 2019-06-19
BRPI0808414A2 (pt) 2014-07-22
CA2679443A1 (en) 2008-09-04
WO2008106160A1 (en) 2008-09-04
US20080230951A1 (en) 2008-09-25
TWI358390B (en) 2012-02-21
RU2009135805A (ru) 2011-04-10
US8156762B2 (en) 2012-04-17
ES2350653T3 (es) 2011-01-25

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