ATE484006T1 - Verfahren zur herstellung eines farbfilters - Google Patents

Verfahren zur herstellung eines farbfilters

Info

Publication number
ATE484006T1
ATE484006T1 AT07016460T AT07016460T ATE484006T1 AT E484006 T1 ATE484006 T1 AT E484006T1 AT 07016460 T AT07016460 T AT 07016460T AT 07016460 T AT07016460 T AT 07016460T AT E484006 T1 ATE484006 T1 AT E484006T1
Authority
AT
Austria
Prior art keywords
photoresist layer
color filter
colored layer
layer
forming
Prior art date
Application number
AT07016460T
Other languages
English (en)
Inventor
Mitsuji Yoshibayashi
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Application granted granted Critical
Publication of ATE484006T1 publication Critical patent/ATE484006T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Optical Filters (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Liquid Crystal (AREA)
  • Compounds Of Unknown Constitution (AREA)
  • Color Television Image Signal Generators (AREA)
AT07016460T 2006-08-23 2007-08-22 Verfahren zur herstellung eines farbfilters ATE484006T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006226934 2006-08-23
JP2006355572A JP5046639B2 (ja) 2006-08-23 2006-12-28 カラーフィルタの製造方法

Publications (1)

Publication Number Publication Date
ATE484006T1 true ATE484006T1 (de) 2010-10-15

Family

ID=38683603

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07016460T ATE484006T1 (de) 2006-08-23 2007-08-22 Verfahren zur herstellung eines farbfilters

Country Status (5)

Country Link
US (1) US7914957B2 (de)
EP (1) EP1892562B1 (de)
JP (1) JP5046639B2 (de)
AT (1) ATE484006T1 (de)
DE (1) DE602007009613D1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008241744A (ja) * 2007-03-23 2008-10-09 Fujifilm Corp カラーフィルタの製造方法
JP2010078834A (ja) * 2008-09-25 2010-04-08 Fujifilm Corp カラーフィルタ及びカラーフィルタの製造方法
JP5119108B2 (ja) * 2008-09-25 2013-01-16 富士フイルム株式会社 カラーフィルタの製造方法
JP2010085702A (ja) * 2008-09-30 2010-04-15 Fujifilm Corp カラーフィルタの製造方法
JP2010085701A (ja) * 2008-09-30 2010-04-15 Fujifilm Corp カラーフィルタの製造方法
JP2010085703A (ja) * 2008-09-30 2010-04-15 Fujifilm Corp カラーフィルタの製造方法
JP2010085700A (ja) * 2008-09-30 2010-04-15 Fujifilm Corp カラーフィルタの製造方法
RU2503043C2 (ru) * 2009-02-09 2013-12-27 Открытое Акционерное Общество "Пеленг" Жидкостный теплоноситель-светофильтр твердотельных лазеров
JP5699064B2 (ja) * 2011-09-29 2015-04-08 富士フイルム株式会社 カラーフィルタの製造方法
TWI463193B (zh) * 2011-11-17 2014-12-01 Au Optronics Corp 彩色濾光片及液晶顯示器
TWI432898B (zh) * 2011-12-05 2014-04-01 Chi Mei Corp 彩色濾光片用藍色感光性樹脂組成物及其應用
KR101556280B1 (ko) * 2012-12-07 2015-09-30 제일모직 주식회사 컬러필터용 감광성 수지 조성물 및 이를 이용한 컬러필터
KR101798936B1 (ko) * 2013-05-16 2017-11-17 제일모직 주식회사 컬러필터용 감광성 수지 조성물 및 이를 이용한 컬러필터
US10011672B2 (en) * 2013-05-16 2018-07-03 Samsung Sdi Co., Ltd. Photosensitive resin composition for color filter and color filter using the same
JP6246076B2 (ja) 2014-06-05 2017-12-13 ルネサスエレクトロニクス株式会社 半導体装置の製造方法および半導体装置
JP6658768B2 (ja) * 2015-11-16 2020-03-04 凸版印刷株式会社 固体撮像素子の製造方法及び固体撮像素子
CN105404050B (zh) * 2016-01-04 2018-04-20 京东方科技集团股份有限公司 彩膜基板及其制作方法、显示装置
CN110419105B (zh) * 2017-04-18 2023-12-19 凸版印刷株式会社 固体拍摄元件以及固体拍摄元件的制造方法
WO2024147826A1 (en) 2023-01-05 2024-07-11 Transformative Optics Corporation Color image sensors, methods and systems
CN121058255A (zh) 2023-03-02 2025-12-02 拓视光学有限公司 颜色图像传感器、方法和系统

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146406A (en) 1980-04-26 1980-11-14 Dainippon Printing Co Ltd Color separating filter
JPS59146005A (ja) * 1983-02-08 1984-08-21 Canon Inc カラ−フイルタ−の製造方法
JPH01296201A (ja) * 1988-05-24 1989-11-29 Fujitsu Ltd カラーフィルタの製造方法
US5439582A (en) * 1991-10-02 1995-08-08 Nippon Paint Co., Ltd. Process for producing multicolor display
US5503952A (en) * 1994-03-22 1996-04-02 Shinto Paint Co., Ltd. Method for manufacture of color filter and liquid crystal display
JP2727966B2 (ja) * 1994-06-06 1998-03-18 日本電気株式会社 半導体装置の製造方法
JP3427508B2 (ja) * 1994-08-31 2003-07-22 ジェイエスアール株式会社 着色ミクロパターンの形成方法
US5756400A (en) * 1995-12-08 1998-05-26 Applied Materials, Inc. Method and apparatus for cleaning by-products from plasma chamber surfaces
JPH10341012A (ja) * 1997-06-09 1998-12-22 Toshiba Corp 固体撮像素子の製造方法
US6159862A (en) * 1997-12-27 2000-12-12 Tokyo Electron Ltd. Semiconductor processing method and system using C5 F8
JP2001028432A (ja) * 1999-07-14 2001-01-30 Sony Corp 光学素子の製造方法
JP4483003B2 (ja) * 2000-03-07 2010-06-16 ソニー株式会社 カラーフィルタの製造方法及び固体撮像装置の製造方法
JP2002025979A (ja) * 2000-07-03 2002-01-25 Hitachi Ltd 半導体集積回路装置の製造方法
US7179752B2 (en) * 2001-07-10 2007-02-20 Tokyo Electron Limited Dry etching method
US7084472B2 (en) * 2002-07-09 2006-08-01 Toppan Printing Co., Ltd. Solid-state imaging device and manufacturing method therefor
JP2005026394A (ja) * 2003-07-01 2005-01-27 Sumitomo Bakelite Co Ltd ポジ型感光性樹脂組成物の硬化膜除去方法及びその方法を用いた半導体装置
JP4558296B2 (ja) * 2003-09-25 2010-10-06 東京エレクトロン株式会社 プラズマアッシング方法
JP4398753B2 (ja) * 2004-02-23 2010-01-13 東洋インキ製造株式会社 カラーフィルタ用着色組成物およびカラーフィルタ
JP4463054B2 (ja) * 2004-09-17 2010-05-12 東京応化工業株式会社 ホトレジスト用剥離液およびこれを用いた基板の処理方法
US7686971B2 (en) * 2004-11-24 2010-03-30 Panasonic Corporation Plasma processing apparatus and method

Also Published As

Publication number Publication date
EP1892562B1 (de) 2010-10-06
US20080053953A1 (en) 2008-03-06
EP1892562A1 (de) 2008-02-27
JP5046639B2 (ja) 2012-10-10
DE602007009613D1 (de) 2010-11-18
JP2008077038A (ja) 2008-04-03
US7914957B2 (en) 2011-03-29

Similar Documents

Publication Publication Date Title
ATE484006T1 (de) Verfahren zur herstellung eines farbfilters
EP1550556A4 (de) Verfahren zur herstellung eines flüssigkeitsabführkopfs mit elektrostatischer anziehung, verfahren zur herstellung einer düsenplatte, verfahren zum antrieb des flüssigkeitsabführkopfs mit elektrostatischer anziehung, flüssigkeitsabführvorrichtung mit elektrostatischer anziehung und flüssigkeitsabführvorrichtung
WO2008149988A1 (ja) パターニング方法
DE602007011472D1 (de) Verfahren zur Herstellung von Fluoralkohol, fluoriertes Monomer, Polymer, Resistzusammensetzung und Strukturierungsverfahren
WO2008149989A1 (ja) パターニング方法
DE602006010307D1 (de) Verfahren zur Herstellung eines Stempel für Mikro/Nano Imprint-Lithographie
ATE473081T1 (de) Verfahren und vorrichtung zur herstellung von beschichteten formteilen
TW200518172A (en) Photomask, and method for forming pattern
WO2007044557A3 (en) System, masks, and methods for photomasks optimized with approximate and accurate merit functions
ATE512166T1 (de) Verfahren zur herstellung von fluorelastomeren
DE602005004335D1 (de) Tintenstrahldruckkopfsubstrat, Tintenstrahldruckkopf, und Verfahren zur Herstellung eines Tintenstrahldruckkopfsubstrats
ATE517699T1 (de) Verfahren zur herstellung eines dünnen organischen films
DE602007007167D1 (de) Verfahren zur Herstellung einer Struktur durch Unterschneiden einer Druckmaske
ATE493754T1 (de) Belichtungsvorrichtung, belichtungsverfahren und verfahren zur herstellung einer vorrichtung
ATE417074T1 (de) Polyelektrolytzusammensetzung für feuchtigkeitssensor, polyelektrolyttinte und verfahren zur herstellung einer polyelektrolytmembran für einen sensor durch tintenstrahldruck
ATE448786T1 (de) Verfahren zur herstellung eines nikotinzuführenden produkts
WO2007030528A3 (en) Photomask and method for forming a non-orthogonal feature on the same
DE602004016851D1 (de) Verfahren zur herstellung eines siliciumwafers mit idealem stabilisierten sauerstoffniederschlagverhaltens
ATE409565T1 (de) Verfahren zur herstellung eines gegenstands aus verbundwerkstoff
ATE457873T1 (de) Verfahren zur herstellung einer siliciumdüsenplatte und verfahren zur herstellung eines tintenstrahlkopfs
DE112005003550A5 (de) Flüssige Bio-Brennstoffmischung sowie Verfahren und Vorrichtung zur Herstellung derselben
DE602006011362D1 (de) Verfahren zur herstellung eines (110) silizium-wafers
ATE548200T1 (de) Dokument sowie verfahren zur herstellung eines dokumentes
WO2007120602A3 (en) Double exposure photolithographic process
EP2251741A3 (de) Ätzverfahren und Verfahren zur Bearbeitung eines Fotomaskenrohlings

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties