ATE486369T1 - Elektrische einrichtung mit einem phasenänderungsmaterial - Google Patents

Elektrische einrichtung mit einem phasenänderungsmaterial

Info

Publication number
ATE486369T1
ATE486369T1 AT05709025T AT05709025T ATE486369T1 AT E486369 T1 ATE486369 T1 AT E486369T1 AT 05709025 T AT05709025 T AT 05709025T AT 05709025 T AT05709025 T AT 05709025T AT E486369 T1 ATE486369 T1 AT E486369T1
Authority
AT
Austria
Prior art keywords
change material
phase
phase change
electrical device
electrical resistivity
Prior art date
Application number
AT05709025T
Other languages
English (en)
Inventor
Martijn Lankhorst
Erwin Meinders
Robertus Wolters
Franciscus Widdershoven
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE486369T1 publication Critical patent/ATE486369T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5678—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using amorphous/crystalline phase transition storage elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/061—Shaping switching materials
    • H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/061—Shaping switching materials
    • H10N70/068—Shaping switching materials by processes specially adapted for achieving sub-lithographic dimensions, e.g. using spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20—Multistable switching devices, e.g. memristors
    • H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/821—Device geometry
    • H10N70/823—Device geometry adapted for essentially horizontal current flow, e.g. bridge type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/821—Device geometry
    • H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • H10N70/8265—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices on sidewalls of dielectric structures, e.g. mesa-shaped or cup-shaped devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/861—Thermal details
    • H10N70/8613—Heating or cooling means other than resistive heating electrodes, e.g. heater in parallel
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/881—Switching materials
    • H10N70/884—Switching materials based on at least one element of group IIIA, IVA or VA, e.g. elemental or compound semiconductors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Memories (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Discharge Heating (AREA)
AT05709025T 2004-03-26 2005-03-16 Elektrische einrichtung mit einem phasenänderungsmaterial ATE486369T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04101259 2004-03-26
PCT/IB2005/050923 WO2005093839A2 (en) 2004-03-26 2005-03-16 Electric device comprising phase change material

Publications (1)

Publication Number Publication Date
ATE486369T1 true ATE486369T1 (de) 2010-11-15

Family

ID=34961289

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05709025T ATE486369T1 (de) 2004-03-26 2005-03-16 Elektrische einrichtung mit einem phasenänderungsmaterial

Country Status (9)

Country Link
US (1) US8115239B2 (de)
EP (1) EP1787329B1 (de)
JP (1) JP2007531260A (de)
KR (1) KR20070004779A (de)
CN (1) CN100594613C (de)
AT (1) ATE486369T1 (de)
DE (1) DE602005024415D1 (de)
TW (1) TW200603271A (de)
WO (1) WO2005093839A2 (de)

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* Cited by examiner, † Cited by third party
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JP2008541475A (ja) * 2005-05-19 2008-11-20 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Ｐｃｍセルにおける“先溶融”領域の制御方法及びそれにより得た装置
JP2007103620A (ja) * 2005-10-04 2007-04-19 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法ならびにその配線装置
US7626858B2 (en) * 2006-06-09 2009-12-01 Qimonda North America Corp. Integrated circuit having a precharging circuit
CN101681994A (zh) 2007-05-31 2010-03-24 Nxp股份有限公司 包括可转变结构的电子器件以及制造该电子器件的方法
JP2009123847A (ja) * 2007-11-13 2009-06-04 Gunma Univ メモリ素子、メモリセル、メモリセルアレイ及び電子機器
KR100968889B1 (ko) * 2007-12-12 2010-07-09 한국전자통신연구원 비휘발성 프로그래머블 스위치 소자 및 그 제조 방법
JP5334995B2 (ja) * 2008-01-16 2013-11-06 エヌエックスピー ビー ヴィ 相変化材料層を有する多層構造およびその製造方法
WO2009115995A1 (en) * 2008-03-21 2009-09-24 Nxp B.V. An electronic component comprising a convertible structure
KR20130047775A (ko) * 2008-09-19 2013-05-08 에이저 시스템즈 엘엘시 집적 회로의 저항 조율을 위해 전자기 복사선에 의해 유도된 규소의 동소체 또는 비정질 변경
EP2246915B1 (de) * 2009-04-30 2013-07-31 Taiwan Semiconductor Manufacturing Co., Ltd. Phasenwechselmaterial für eine Phasenwechselspeichervorrichtung sowie Verfahren zur Einstellung des spezifischen Widerstands des Materials
US8129268B2 (en) 2009-11-16 2012-03-06 International Business Machines Corporation Self-aligned lower bottom electrode
US8233317B2 (en) * 2009-11-16 2012-07-31 International Business Machines Corporation Phase change memory device suitable for high temperature operation
JP2011199215A (ja) 2010-03-24 2011-10-06 Hitachi Ltd 半導体記憶装置
TWI469408B (zh) * 2012-05-07 2015-01-11 Univ Feng Chia 超薄與多層結構相變化記憶體元件
US8847187B2 (en) * 2012-12-03 2014-09-30 Intermolecular, Inc. Method of forming anneal-resistant embedded resistor for non-volatile memory application
US9059130B2 (en) * 2012-12-31 2015-06-16 International Business Machines Corporation Phase changing on-chip thermal heat sink
US10217549B2 (en) * 2013-03-13 2019-02-26 Board Of Trustees Of Michigan State University Voltage-controlled resistor based on phase transition materials
GB2515568B (en) 2013-06-28 2016-05-18 Ibm Resistive random-access memory cells
CN104733610B (zh) * 2013-12-23 2017-12-15 杭州华为数字技术有限公司 金属掺杂锗碲基阻变存储材料及制备方法和阻变单元器件
US11333558B2 (en) * 2018-11-06 2022-05-17 Globalfoundries U.S. Inc. Boolean temperature sensing using phase transition material
US12150392B2 (en) 2020-12-22 2024-11-19 International Business Machines Corporation Transfer length phase change material (PCM) based bridge cell
US11430514B2 (en) * 2021-01-12 2022-08-30 International Business Machines Corporation Setting an upper bound on RRAM resistance
JP2023044946A (ja) * 2021-09-21 2023-04-03 キオクシア株式会社 半導体記憶装置

Family Cites Families (15)

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US5296716A (en) 1991-01-18 1994-03-22 Energy Conversion Devices, Inc. Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom
US5789758A (en) * 1995-06-07 1998-08-04 Micron Technology, Inc. Chalcogenide memory cell with a plurality of chalcogenide electrodes
US5825046A (en) * 1996-10-28 1998-10-20 Energy Conversion Devices, Inc. Composite memory material comprising a mixture of phase-change memory material and dielectric material
US5933365A (en) 1997-06-19 1999-08-03 Energy Conversion Devices, Inc. Memory element with energy control mechanism
US5912839A (en) * 1998-06-23 1999-06-15 Energy Conversion Devices, Inc. Universal memory element and method of programming same
US6075719A (en) 1999-06-22 2000-06-13 Energy Conversion Devices, Inc. Method of programming phase-change memory element
US6339544B1 (en) 2000-09-29 2002-01-15 Intel Corporation Method to enhance performance of thermal resistor device
US6531371B2 (en) 2001-06-28 2003-03-11 Sharp Laboratories Of America, Inc. Electrically programmable resistance cross point memory
US6570784B2 (en) 2001-06-29 2003-05-27 Ovonyx, Inc. Programming a phase-change material memory
US6590807B2 (en) 2001-08-02 2003-07-08 Intel Corporation Method for reading a structural phase-change memory
WO2003017282A1 (en) 2001-08-13 2003-02-27 Advanced Micro Devices, Inc. Memory cell
JP3749847B2 (ja) 2001-09-27 2006-03-01 株式会社東芝 相変化型不揮発性記憶装置及びその駆動回路
US6545903B1 (en) 2001-12-17 2003-04-08 Texas Instruments Incorporated Self-aligned resistive plugs for forming memory cell with phase change material
US6625054B2 (en) 2001-12-28 2003-09-23 Intel Corporation Method and apparatus to program a phase change memory
US6778420B2 (en) * 2002-09-25 2004-08-17 Ovonyx, Inc. Method of operating programmable resistant element

Also Published As

Publication number Publication date
EP1787329B1 (de) 2010-10-27
WO2005093839A3 (en) 2007-03-29
US8115239B2 (en) 2012-02-14
TW200603271A (en) 2006-01-16
CN100594613C (zh) 2010-03-17
US20080285333A1 (en) 2008-11-20
KR20070004779A (ko) 2007-01-09
JP2007531260A (ja) 2007-11-01
EP1787329A2 (de) 2007-05-23
WO2005093839A2 (en) 2005-10-06
DE602005024415D1 (de) 2010-12-09
CN101167188A (zh) 2008-04-23

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