ATE487579T1 - Verfahren, system, halter und anordnung zur übertragung von templates bei imprint- lithographieverfahren - Google Patents

Verfahren, system, halter und anordnung zur übertragung von templates bei imprint- lithographieverfahren

Info

Publication number
ATE487579T1
ATE487579T1 AT04751888T AT04751888T ATE487579T1 AT E487579 T1 ATE487579 T1 AT E487579T1 AT 04751888 T AT04751888 T AT 04751888T AT 04751888 T AT04751888 T AT 04751888T AT E487579 T1 ATE487579 T1 AT E487579T1
Authority
AT
Austria
Prior art keywords
holder
arrangement
imprint lithography
lithography processes
transferring templates
Prior art date
Application number
AT04751888T
Other languages
English (en)
Inventor
Mario Meissl
Byung-Jin Choi
Daniel Babbs
Hillman Bailey
Original Assignee
Molecular Imprints Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/437,476 external-priority patent/US6951173B1/en
Priority claimed from US10/438,224 external-priority patent/US6805054B1/en
Application filed by Molecular Imprints Inc filed Critical Molecular Imprints Inc
Application granted granted Critical
Publication of ATE487579T1 publication Critical patent/ATE487579T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F11/00—Rotary presses or machines having forme cylinders carrying a plurality of printing surfaces, or for performing letterpress, lithographic, or intaglio processes selectively or in combination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/34—Feeding the material to the mould or the compression means
    • B29C2043/3488—Feeding the material to the mould or the compression means uniformly distributed into the mould

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AT04751888T 2003-05-14 2004-05-11 Verfahren, system, halter und anordnung zur übertragung von templates bei imprint- lithographieverfahren ATE487579T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/437,476 US6951173B1 (en) 2003-05-14 2003-05-14 Assembly and method for transferring imprint lithography templates
US10/438,224 US6805054B1 (en) 2003-05-14 2003-05-14 Method, system and holder for transferring templates during imprint lithography processes
PCT/US2004/014720 WO2004103666A2 (en) 2003-05-14 2004-05-11 Method, system, holder and assembly for transferring templates during imprint lithography processes

Publications (1)

Publication Number Publication Date
ATE487579T1 true ATE487579T1 (de) 2010-11-15

Family

ID=33479226

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04751888T ATE487579T1 (de) 2003-05-14 2004-05-11 Verfahren, system, halter und anordnung zur übertragung von templates bei imprint- lithographieverfahren

Country Status (6)

Country Link
EP (2) EP2177951A1 (de)
JP (1) JP4937750B2 (de)
KR (1) KR101055640B1 (de)
AT (1) ATE487579T1 (de)
DE (1) DE602004030001D1 (de)
WO (1) WO2004103666A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7523701B2 (en) 2005-03-07 2009-04-28 Asml Netherlands B.V. Imprint lithography method and apparatus
KR20060127811A (ko) * 2005-06-07 2006-12-13 오브듀캇 아베 분리 장치 및 방법
EP1934669A4 (de) * 2005-08-25 2009-12-16 Molecular Imprints Inc System zum transfer eines vorlagentransferkörpers zwischen einer bewegungsbühne und einer andockplatte
US7665981B2 (en) 2005-08-25 2010-02-23 Molecular Imprints, Inc. System to transfer a template transfer body between a motion stage and a docking plate
JP2013022807A (ja) * 2011-07-20 2013-02-04 Hitachi High-Technologies Corp 微細構造転写装置及びスタンパ移送方法
JP6593504B2 (ja) * 2018-09-05 2019-10-23 大日本印刷株式会社 インプリントモールド、インプリントモールド用ブランクス、並びにインプリントモールド用基板の製造方法及びインプリントモールドの製造方法
EP4123377A1 (de) * 2021-07-21 2023-01-25 Koninklijke Philips N.V. Prägevorrichtung
US20240329520A1 (en) * 2021-07-21 2024-10-03 Koninklijke Philips N.V. Imprinting apparatus
US12228854B2 (en) * 2021-11-12 2025-02-18 Canon Kabushiki Kaisha Layer forming system including cover with support pads, a positioning system with the cover and support pads, and a method of loading a plate

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123467A (en) * 1977-04-04 1978-10-27 Inshiya Yuugen Molding method of light sensitive liquid resin and article
NL8300220A (nl) * 1983-01-21 1984-08-16 Philips Nv Inrichting voor het stralingslithografisch behandelen van een dun substraat.
JPS6012550A (ja) * 1983-07-04 1985-01-22 Nippon Kogaku Kk <Nikon> 露光転写装置用マスク供給装置
US4724222A (en) * 1986-04-28 1988-02-09 American Telephone And Telegraph Company, At&T Bell Laboratories Wafer chuck comprising a curved reference surface
JPH07104596B2 (ja) * 1986-11-21 1995-11-13 キヤノン株式会社 原版収納カセツト
JPS63162132A (ja) * 1986-12-26 1988-07-05 Nippon Thompson Co Ltd Ｘｙテ−ブル
JPS63269519A (ja) * 1987-04-27 1988-11-07 Nikon Corp マスクの収納ケ−ス
JPH05138683A (ja) * 1991-11-18 1993-06-08 Niigata Eng Co Ltd ロータリー式射出成形機
JP2577290B2 (ja) * 1992-03-18 1997-01-29 日精樹脂工業株式会社 スタンパユニットの交換方法及び自動交換装置
JPH06166060A (ja) * 1992-11-27 1994-06-14 Canon Inc 光ディスク基板成形用金型
US6482742B1 (en) * 2000-07-18 2002-11-19 Stephen Y. Chou Fluid pressure imprint lithography
JP3832891B2 (ja) * 1996-03-28 2006-10-11 日本トムソン株式会社 リニア電磁アクチュエータを用いたｘｙテーブル
JPH09328188A (ja) * 1996-06-12 1997-12-22 Hitachi Ltd 基板の収納ケース
US6334960B1 (en) * 1999-03-11 2002-01-01 Board Of Regents, The University Of Texas System Step and flash imprint lithography
SG142150A1 (en) * 2000-07-16 2008-05-28 Univ Texas High-resolution overlay alignment systems for imprint lithography
JP2004505273A (ja) * 2000-08-01 2004-02-19 ボード・オブ・リージエンツ，ザ・ユニバーシテイ・オブ・テキサス・システム 転写リソグラフィのための透明テンプレートと基板の間のギャップおよび配向を高精度でセンシングするための方法
JP2002093748A (ja) * 2000-09-19 2002-03-29 Nippon Telegr & Teleph Corp <Ntt> インプリント装置及びインプリント方法
CN100365507C (zh) * 2000-10-12 2008-01-30 德克萨斯州大学系统董事会 用于室温下低压微刻痕和毫微刻痕光刻的模板
US6517977B2 (en) * 2001-03-28 2003-02-11 Motorola, Inc. Lithographic template and method of formation and use
AU2003291477A1 (en) * 2002-11-13 2004-06-03 Molecular Imprints, Inc. A chucking system and method for modulating shapes of substrates
US6808646B1 (en) * 2003-04-29 2004-10-26 Hewlett-Packard Development Company, L.P. Method of replicating a high resolution three-dimensional imprint pattern on a compliant media of arbitrary size

Also Published As

Publication number Publication date
WO2004103666A2 (en) 2004-12-02
JP4937750B2 (ja) 2012-05-23
EP1622750B1 (de) 2010-11-10
WO2004103666A3 (en) 2005-03-24
KR20060017514A (ko) 2006-02-23
EP1622750A4 (de) 2009-04-29
EP1622750A2 (de) 2006-02-08
DE602004030001D1 (de) 2010-12-23
EP2177951A1 (de) 2010-04-21
JP2007504683A (ja) 2007-03-01
KR101055640B1 (ko) 2011-08-09

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