ATE498913T1 - Piezoelektrisches verbundelement und dessen herstellungsverfahren - Google Patents

Piezoelektrisches verbundelement und dessen herstellungsverfahren

Info

Publication number
ATE498913T1
ATE498913T1 AT02027510T AT02027510T ATE498913T1 AT E498913 T1 ATE498913 T1 AT E498913T1 AT 02027510 T AT02027510 T AT 02027510T AT 02027510 T AT02027510 T AT 02027510T AT E498913 T1 ATE498913 T1 AT E498913T1
Authority
AT
Austria
Prior art keywords
production method
composite element
piezoelectric composite
resin layer
composite sheets
Prior art date
Application number
AT02027510T
Other languages
English (en)
Inventor
Hidetomo Nagahara
Seigo Shiraishi
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001372963A external-priority patent/JP3857911B2/ja
Priority claimed from JP2001383564A external-priority patent/JP4021190B2/ja
Application filed by Panasonic Corp filed Critical Panasonic Corp
Application granted granted Critical
Publication of ATE498913T1 publication Critical patent/ATE498913T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/09Forming piezoelectric or electrostrictive materials
    • H10N30/092Forming composite materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/852Composite materials, e.g. having 1-3 or 2-2 type connectivity

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Laminated Bodies (AREA)
AT02027510T 2001-12-06 2002-12-05 Piezoelektrisches verbundelement und dessen herstellungsverfahren ATE498913T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001372963A JP3857911B2 (ja) 2001-12-06 2001-12-06 複合圧電体およびその製造方法
JP2001383564A JP4021190B2 (ja) 2001-12-17 2001-12-17 複合圧電体およびその製造方法

Publications (1)

Publication Number Publication Date
ATE498913T1 true ATE498913T1 (de) 2011-03-15

Family

ID=26624913

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02027510T ATE498913T1 (de) 2001-12-06 2002-12-05 Piezoelektrisches verbundelement und dessen herstellungsverfahren

Country Status (5)

Country Link
US (1) US6919668B2 (de)
EP (1) EP1318551B1 (de)
CN (1) CN1263173C (de)
AT (1) ATE498913T1 (de)
DE (1) DE60239182D1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4222467B2 (ja) * 2002-04-18 2009-02-12 テイカ株式会社 コンポジット圧電体およびその製造方法
JP3856380B2 (ja) * 2002-04-26 2006-12-13 テイカ株式会社 コンポジット圧電振動子およびその製造方法
US6984922B1 (en) 2002-07-22 2006-01-10 Matsushita Electric Industrial Co., Ltd. Composite piezoelectric transducer and method of fabricating the same
US7109642B2 (en) * 2003-11-29 2006-09-19 Walter Guy Scott Composite piezoelectric apparatus and method
US7082655B2 (en) * 2003-12-18 2006-08-01 Ge Inspection Technologies, Lp Process for plating a piezoelectric composite
JP4805254B2 (ja) 2004-04-20 2011-11-02 ビジュアルソニックス インコーポレイテッド 配列された超音波トランスデューサ
GB0427052D0 (en) * 2004-12-10 2005-01-12 Univ Paisley The Ultrawideband ultrasonic transducer
WO2006088708A2 (en) * 2005-02-15 2006-08-24 The Ultran Group, Inc. Multi-layer gas matrix piezoelectric composite transducer
DE602006020865D1 (de) * 2005-06-07 2011-05-05 Fujifilm Corp Struktur zur formung eines musters für eine funktionelle folie und verfahren zur herstellung der funktionellen folie
JP2007144992A (ja) * 2005-10-28 2007-06-14 Fujifilm Corp 凹凸構造体とその製造方法、圧電素子、インクジェット式記録ヘッド、インクジェット式記録装置
US7901358B2 (en) 2005-11-02 2011-03-08 Visualsonics Inc. High frequency array ultrasound system
JP5036284B2 (ja) * 2006-11-22 2012-09-26 日本碍子株式会社 セラミックス構造体の製造方法
JP2009061112A (ja) * 2007-09-06 2009-03-26 Ge Medical Systems Global Technology Co Llc 超音波探触子および超音波撮像装置
EP3309823B1 (de) 2008-09-18 2020-02-12 FUJIFILM SonoSite, Inc. Ultraschallwandler
US9173047B2 (en) 2008-09-18 2015-10-27 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US9184369B2 (en) 2008-09-18 2015-11-10 Fujifilm Sonosite, Inc. Methods for manufacturing ultrasound transducers and other components
US8209857B2 (en) * 2009-06-19 2012-07-03 The Regents Of The University Of Michigan Method of making a thin film device
US9211106B2 (en) 2010-04-29 2015-12-15 Neorad As Coupling an ultrasound probe to the skin
JP5738671B2 (ja) * 2011-05-18 2015-06-24 株式会社東芝 超音波トランスデューサ、超音波プローブおよび超音波トランスデューサの製造方法
JP5875857B2 (ja) * 2011-12-26 2016-03-02 オリンパス株式会社 超音波振動デバイスおよび超音波医療装置
WO2017031679A1 (zh) * 2015-08-25 2017-03-02 深圳迈瑞生物医疗电子股份有限公司 超声换能器
WO2017141996A1 (ja) * 2016-02-18 2017-08-24 コニカミノルタ株式会社 圧電素子の製造方法及び圧電素子
CN105784848A (zh) * 2016-03-07 2016-07-20 北京工业大学 一种基于面内剪切的压电传感器
US11090688B2 (en) 2016-08-10 2021-08-17 The Ultran Group, Inc. Gas matrix piezoelectric ultrasound array transducer
JP6907539B2 (ja) * 2017-01-06 2021-07-21 セイコーエプソン株式会社 超音波デバイス、超音波プローブ、及び超音波装置
US11883846B2 (en) * 2019-06-14 2024-01-30 GE Precision Healthcare LLC Method for manufacturing an ultrasound transducer and ultrasound probe
CN112242797B (zh) * 2020-10-09 2021-08-27 中国科学院合肥物质科学研究院 双折叠十字多维压电马达及其控制方法和扫描探针显微镜
CN114071346B (zh) * 2021-11-16 2022-09-23 北京信息科技大学 双金属板夹持压电小柱阵列结构敏感元件及其制备工艺
CA3247040A1 (en) * 2022-03-31 2023-10-05 Kbr Wyle Services, Llc ULTRASONIC SYSTEM FOR A POINT OF INTERVENTION AND RELATED METHODS

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821883A (ja) 1981-08-03 1983-02-08 Hitachi Medical Corp 複合圧電材料の製造方法
US4514247A (en) * 1983-08-15 1985-04-30 North American Philips Corporation Method for fabricating composite transducers
JPS6085699A (ja) 1983-10-17 1985-05-15 Hitachi Ltd 複合圧電材料の形成方法
US4613784A (en) * 1984-12-21 1986-09-23 The United States Of America As Represented By The Secretary Of The Navy Transversely reinforced piezoelectric composites
JPS62141791A (ja) * 1985-12-16 1987-06-25 Nec Corp セラミツク変位素子
JPS6359200A (ja) 1986-08-28 1988-03-15 Shimadzu Corp 超音波探触子の製造方法
US4728845A (en) * 1987-06-30 1988-03-01 The United States Of America As Represented By The Secretary Of The Navy 1-3-0 Connectivity piezoelectric composite with void
JPH023995A (ja) * 1988-06-21 1990-01-09 Fuji Electric Co Ltd 圧電素子の貼着方法
JPH0251289A (ja) 1988-08-15 1990-02-21 Sekisui Plastics Co Ltd レーザー光線による複合圧電素子材料の製作方法
JP2794720B2 (ja) * 1988-08-23 1998-09-10 松下電器産業株式会社 複合圧電振動子
US5065068A (en) * 1989-06-07 1991-11-12 Oakley Clyde G Ferroelectric ceramic transducer
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
JP3208845B2 (ja) 1992-06-16 2001-09-17 松下電器産業株式会社 超音波探触子
JPH0750548A (ja) 1993-05-31 1995-02-21 Canon Inc 弾性表面波素子
US5625149A (en) * 1994-07-27 1997-04-29 Hewlett-Packard Company Ultrasonic transductor
US6225728B1 (en) * 1994-08-18 2001-05-01 Agilent Technologies, Inc. Composite piezoelectric transducer arrays with improved acoustical and electrical impedance
JPH0888896A (ja) 1994-09-20 1996-04-02 Hitachi Metals Ltd 複合圧電スピーカー
JPH0888898A (ja) 1994-09-20 1996-04-02 Hitachi Metals Ltd 複合圧電スピーカー
JPH0888897A (ja) 1994-09-20 1996-04-02 Hitachi Metals Ltd 複合圧電スピーカー
JPH08256398A (ja) 1995-03-16 1996-10-01 Olympus Optical Co Ltd 超音波トランスデューサとその製造方法
JP3405375B2 (ja) 1995-03-20 2003-05-12 住友電気工業株式会社 複合体基材および表面弾性波素子
JPH1056690A (ja) 1996-08-08 1998-02-24 Toshiba Corp 超音波トランスデューサ
US5704105A (en) * 1996-09-04 1998-01-06 General Electric Company Method of manufacturing multilayer array ultrasonic transducers
KR100287567B1 (ko) * 1996-10-31 2001-04-16 사토 히로시 판독/기록헤드,판독/기록헤드위치선정기구,및판독/기록시스템
US5844349A (en) * 1997-02-11 1998-12-01 Tetrad Corporation Composite autoclavable ultrasonic transducers and methods of making
JP3602684B2 (ja) 1997-04-09 2004-12-15 オリンパス株式会社 超音波トランスデューサ及びその製造方法
JP2000028595A (ja) 1998-07-10 2000-01-28 Olympus Optical Co Ltd 圧電構造体の製造方法および複合圧電振動子
JP4234846B2 (ja) 1999-05-12 2009-03-04 上田日本無線株式会社 複合圧電体及び角柱状圧電セラミック焼結体
JP2001025094A (ja) 1999-07-12 2001-01-26 Tayca Corp 1−3複合圧電体
US6255761B1 (en) * 1999-10-04 2001-07-03 The United States Of America As Represented By The Secretary Of The Navy Shaped piezoelectric composite transducer
US7288069B2 (en) * 2000-02-07 2007-10-30 Kabushiki Kaisha Toshiba Ultrasonic probe and method of manufacturing the same
US6441538B1 (en) * 2000-05-19 2002-08-27 Acuson Corporation Ultrasound stacked transducer and method for stacking

Also Published As

Publication number Publication date
EP1318551A3 (de) 2005-12-07
EP1318551B1 (de) 2011-02-16
DE60239182D1 (de) 2011-03-31
EP1318551A2 (de) 2003-06-11
CN1423125A (zh) 2003-06-11
US20030127949A1 (en) 2003-07-10
US6919668B2 (en) 2005-07-19
CN1263173C (zh) 2006-07-05

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