ATE506597T1 - Pneumatischer sensor mit erhöhter druckempfindlichkeit durch düsenoberflächenrauhigkeit - Google Patents

Pneumatischer sensor mit erhöhter druckempfindlichkeit durch düsenoberflächenrauhigkeit

Info

Publication number
ATE506597T1
ATE506597T1 AT08159163T AT08159163T ATE506597T1 AT E506597 T1 ATE506597 T1 AT E506597T1 AT 08159163 T AT08159163 T AT 08159163T AT 08159163 T AT08159163 T AT 08159163T AT E506597 T1 ATE506597 T1 AT E506597T1
Authority
AT
Austria
Prior art keywords
gas
nozzle
surface roughness
increased pressure
nozzle surface
Prior art date
Application number
AT08159163T
Other languages
English (en)
Inventor
Herman Vogel
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Application granted granted Critical
Publication of ATE506597T1 publication Critical patent/ATE506597T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/12—Measuring arrangements characterised by the use of fluids for measuring distance or clearance between spaced objects or spaced apertures
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06C—FINISHING, DRESSING, TENTERING OR STRETCHING TEXTILE FABRICS
    • D06C13/00—Shearing, clipping or cropping surfaces of textile fabrics; Pile cutting; Trimming seamed edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
AT08159163T 2007-06-27 2008-06-27 Pneumatischer sensor mit erhöhter druckempfindlichkeit durch düsenoberflächenrauhigkeit ATE506597T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/769,421 US7578168B2 (en) 2007-06-27 2007-06-27 Increasing gas gauge pressure sensitivity using nozzle-face surface roughness

Publications (1)

Publication Number Publication Date
ATE506597T1 true ATE506597T1 (de) 2011-05-15

Family

ID=39705297

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08159163T ATE506597T1 (de) 2007-06-27 2008-06-27 Pneumatischer sensor mit erhöhter druckempfindlichkeit durch düsenoberflächenrauhigkeit

Country Status (9)

Country Link
US (1) US7578168B2 (de)
EP (1) EP2009391B1 (de)
JP (1) JP5155031B2 (de)
KR (1) KR100994542B1 (de)
CN (1) CN101334273B (de)
AT (1) ATE506597T1 (de)
DE (1) DE602008006298D1 (de)
SG (1) SG148932A1 (de)
TW (1) TWI385367B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100206295A1 (en) * 2009-02-03 2010-08-19 Xiao Dong Xiang Systems and methods of solar thermal concentration for 2-dimensional focusing concentrators including features of sequential heating, thermal loss reduction, and/or adjustment of operation or operating parameters
CN101586949B (zh) * 2009-05-20 2012-10-17 大连现代辅机开发制造有限公司 定位销切换、检测方法及装置
KR101321322B1 (ko) * 2011-04-22 2013-10-23 시바우라 메카트로닉스 가부시끼가이샤 기판 반송 장치 및 반송 방법
GB2509323B (en) * 2012-12-28 2015-01-07 Glide Talk Ltd Reduced latency server-mediated audio-video communication
CN105352456A (zh) * 2015-11-10 2016-02-24 常州市西夏墅企业创新发展中心 一种厚度测量装置
JP6883325B2 (ja) * 2017-08-09 2021-06-09 アドバンス電気工業株式会社 液マイクロメータ
CN112771451B (zh) * 2018-09-27 2024-05-07 Asml荷兰有限公司 水平传感器和包括水平传感器的光刻设备
CN112997117B (zh) 2018-11-05 2024-12-17 Asml控股股份有限公司 测量光刻设备中的图案形成装置的变形的设备和方法

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2276036A (en) * 1940-11-23 1942-03-10 Westinghouse Electric & Mfg Co Pneumatic thickness gauge
NL73735C (de) * 1949-06-30
US2986924A (en) * 1955-09-16 1961-06-06 Becker Wilhelm Fritz Kurt Device for location of surfaces
US3127764A (en) * 1961-09-18 1964-04-07 G P E Controls Inc Concentric double aperture air nozzle
GB1094833A (en) * 1965-09-24 1967-12-13 Burchell James Gladwyn Improvements in or relating to gauges
US3495442A (en) * 1967-06-21 1970-02-17 Pillsbury Co Thickness measuring instrument
FR1577249A (de) * 1967-12-06 1969-08-08
US3597961A (en) * 1968-07-26 1971-08-10 Ite Imperial Corp Fluid operated sensing device
US3545256A (en) * 1969-02-10 1970-12-08 Pitney Bowes Inc High sensitivity fluidic proximity detector
SE331199B (de) * 1970-03-11 1970-12-14 Mecman Ab
US3709027A (en) * 1971-01-22 1973-01-09 Automatic Switch Co Proximity sensing device
US4059130A (en) * 1973-09-14 1977-11-22 Bailey Meter Company Proximity sensor with zero adjustment
US3894552A (en) * 1974-01-31 1975-07-15 Foxboro Co Transducer nozzle
US3942556A (en) * 1974-09-30 1976-03-09 Dana Corporation Fluidic sensor
JPS5271826A (en) * 1975-12-10 1977-06-15 Saito Chiyuuji Noise silencing shielding material
US4090406A (en) * 1977-06-23 1978-05-23 Rodder Jerome A Sensor
US4142401A (en) * 1977-10-03 1979-03-06 Wilson Gardner P Gage
US4203022A (en) * 1977-10-31 1980-05-13 Hypertherm, Incorporated Method and apparatus for positioning a plasma arc cutting torch
US4348889A (en) * 1979-10-08 1982-09-14 Sussex Instruments Limited Measuring sheet thickness
US4421970A (en) * 1981-01-30 1983-12-20 Hypertherm, Incorporated Height sensing system for a plasma arc cutting tool
US4458519A (en) * 1981-03-09 1984-07-10 Vacuumatic Limited Air pressure operated proximity sensor
US4391127A (en) * 1981-03-20 1983-07-05 E. I. Du Pont De Nemours And Company Proximity sensor
JPS57191507A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Distance measuring device
US4581918A (en) * 1984-01-09 1986-04-15 Esselte Security Systems Apparatus for non-contact thickness gauging of disc or sheet objects
DE3409165A1 (de) 1984-03-13 1985-09-19 Siemens AG, 1000 Berlin und 8000 München Sensor
DE3409168A1 (de) 1984-03-13 1985-09-19 Siemens AG, 1000 Berlin und 8000 München Sensor
CH666128A5 (de) * 1984-03-26 1988-06-30 Alusuisse Vorrichtung zum beruehrungslosen messen der temperatur an einer oberflaeche eines werkstuecks.
US4550592A (en) * 1984-05-07 1985-11-05 Dechape Michel L Pneumatic gauging circuit
GB8722871D0 (en) * 1987-09-29 1987-11-04 Bnf Metals Tech Centre Measuring apparatus
US4953388A (en) * 1989-01-25 1990-09-04 The Perkin-Elmer Corporation Air gauge sensor
US5022258A (en) * 1990-05-07 1991-06-11 Wilson Gardner P Gas gage with zero net gas flow
JPH0737068Y2 (ja) * 1991-11-29 1995-08-23 木村工機株式会社 空気調和機における消音機構
US5298073A (en) * 1992-02-28 1994-03-29 Libbey-Owens-Ford Co. Two sensor for determining spacing between surfaces
CA2078727A1 (en) * 1992-09-21 1994-03-22 Karoly G. Nemeth Method and apparatus for detecting thickness variations in sheet material
DE19618432A1 (de) * 1996-05-08 1997-11-13 Mann & Hummel Filter Ansaugvorrichtung für einen Verbrennungsmotor
US5789661A (en) * 1997-02-14 1998-08-04 Sigmatech, Inc. Extended range and ultra-precision non-contact dimensional gauge
JPH1183145A (ja) * 1997-09-04 1999-03-26 Onoda Autoclaved Light Weight Concrete Co Ltd 箱型消音装置
US6029361A (en) * 1998-03-25 2000-02-29 Ultratech Stepper, Inc. Air-guage nozzle probe structure for microlithographic image focusing
US6220080B1 (en) * 2000-05-12 2001-04-24 Sigma Tech, Inc. Extended range and ultra precision non contact dimensional gauge for ultra thin wafers and work pieces
JP2002090191A (ja) * 2000-09-12 2002-03-27 Matsushita Electric Ind Co Ltd 流量測定装置
US6807845B2 (en) * 2001-10-12 2004-10-26 I F M Electronic Gmbh Measurement apparatus and process for determining the position of an object relative to a reference surface
JP2003328723A (ja) * 2002-05-13 2003-11-19 Naoki Hara 高効率消音器
US7010958B2 (en) 2002-12-19 2006-03-14 Asml Holding N.V. High-resolution gas gauge proximity sensor
SG107157A1 (en) * 2002-12-19 2004-11-29 Asml Holding Nv Liquid flow proximity sensor for use in immersion lithography
US6918740B2 (en) * 2003-01-28 2005-07-19 Dresser-Rand Company Gas compression apparatus and method with noise attenuation
US20050044963A1 (en) 2003-08-25 2005-03-03 Asml Holding N.V. High-resolution gas gauge proximity sensor
US7021121B2 (en) 2004-05-27 2006-04-04 Asml Holding N.V. Gas gauge proximity sensor with a modulated gas flow
US7134321B2 (en) * 2004-07-20 2006-11-14 Asml Holding N.V. Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
US7017390B1 (en) * 2004-12-07 2006-03-28 Asml Holding N.V. Proximity sensor nozzle shroud with flow curtain

Also Published As

Publication number Publication date
JP5155031B2 (ja) 2013-02-27
EP2009391B1 (de) 2011-04-20
CN101334273A (zh) 2008-12-31
DE602008006298D1 (de) 2011-06-01
TW200912268A (en) 2009-03-16
KR20080114616A (ko) 2008-12-31
EP2009391A1 (de) 2008-12-31
US20090000353A1 (en) 2009-01-01
CN101334273B (zh) 2012-12-19
TWI385367B (zh) 2013-02-11
JP2009008677A (ja) 2009-01-15
SG148932A1 (en) 2009-01-29
US7578168B2 (en) 2009-08-25
KR100994542B1 (ko) 2010-11-15

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