ATE511210T1 - Verfahren für das herstellen eines soi wafers - Google Patents

Verfahren für das herstellen eines soi wafers

Info

Publication number
ATE511210T1
ATE511210T1 AT04291457T AT04291457T ATE511210T1 AT E511210 T1 ATE511210 T1 AT E511210T1 AT 04291457 T AT04291457 T AT 04291457T AT 04291457 T AT04291457 T AT 04291457T AT E511210 T1 ATE511210 T1 AT E511210T1
Authority
AT
Austria
Prior art keywords
source
handle
compound
substrate
splitting area
Prior art date
Application number
AT04291457T
Other languages
English (en)
Inventor
Thibaut Maurice
Phuong Nguyen
Eric Guiot
Original Assignee
Soitec Silicon On Insulator
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soitec Silicon On Insulator filed Critical Soitec Silicon On Insulator
Application granted granted Critical
Publication of ATE511210T1 publication Critical patent/ATE511210T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H10P90/1914—Preparing SOI wafers using bonding
    • H10P90/1916—Preparing SOI wafers using bonding with separation or delamination along an ion implanted layer, e.g. Smart-cut
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)
AT04291457T 2004-06-10 2004-06-10 Verfahren für das herstellen eines soi wafers ATE511210T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04291457A EP1605504B1 (de) 2004-06-10 2004-06-10 Verfahren für das Herstellen eines SOI Wafers

Publications (1)

Publication Number Publication Date
ATE511210T1 true ATE511210T1 (de) 2011-06-15

Family

ID=34931164

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04291457T ATE511210T1 (de) 2004-06-10 2004-06-10 Verfahren für das herstellen eines soi wafers

Country Status (4)

Country Link
US (1) US7256103B2 (de)
EP (2) EP1605504B1 (de)
JP (1) JP4508955B2 (de)
AT (1) ATE511210T1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5249511B2 (ja) * 2006-11-22 2013-07-31 信越化学工業株式会社 Ｓｏｑ基板およびｓｏｑ基板の製造方法
FR2914496B1 (fr) 2007-03-29 2009-10-02 Soitec Silicon On Insulator Amelioration de la defectivite post decollement d'une couche mince par modification de son recuit de decollement.
FR3093859B1 (fr) * 2019-03-15 2021-02-12 Soitec Silicon On Insulator Procédé de transfert d’une couche utile sur une substrat support
DE102023200122A1 (de) * 2023-01-10 2024-07-11 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung eines vertikalen Halbleiterbauelements mit epitaktisch gewachsener III-V-Epitaxie unter mehrmaliger Verwendung des Substrats sowie entsprechendes Halbleiterelement, insbesondere auf der Basis von Galliumnitrid

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2849178B2 (ja) * 1990-07-27 1999-01-20 信越半導体株式会社 ウェーハの保管方法
US6037988A (en) * 1996-03-22 2000-03-14 Microsoft Corp Method for generating sprites for object-based coding sytems using masks and rounding average
FR2748851B1 (fr) * 1996-05-15 1998-08-07 Commissariat Energie Atomique Procede de realisation d'une couche mince de materiau semiconducteur
SG65697A1 (en) * 1996-11-15 1999-06-22 Canon Kk Process for producing semiconductor article
US6027988A (en) * 1997-05-28 2000-02-22 The Regents Of The University Of California Method of separating films from bulk substrates by plasma immersion ion implantation
US5909627A (en) * 1998-05-18 1999-06-01 Philips Electronics North America Corporation Process for production of thin layers of semiconductor material
JP2000012864A (ja) * 1998-06-22 2000-01-14 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
JP2000150835A (ja) * 1998-11-05 2000-05-30 Fujitsu Ltd 非単結晶シリコン薄膜の製造方法
TW484184B (en) * 1998-11-06 2002-04-21 Canon Kk Sample separating apparatus and method, and substrate manufacturing method
FR2797347B1 (fr) 1999-08-04 2001-11-23 Commissariat Energie Atomique Procede de transfert d'une couche mince comportant une etape de surfragililisation
EP1212787B1 (de) * 1999-08-10 2014-10-08 Silicon Genesis Corporation Spaltprozess für die herstellung mehrlagiger substrate mit geringer implantationsdosis
EP1158581B1 (de) * 1999-10-14 2016-04-27 Shin-Etsu Handotai Co., Ltd. Soi-scheibenherstellung undsoi-scheibe
JP2004063730A (ja) * 2002-07-29 2004-02-26 Shin Etsu Handotai Co Ltd Ｓｏｉウェーハの製造方法
FR2847076B1 (fr) * 2002-11-07 2005-02-18 Soitec Silicon On Insulator Procede de detachement d'une couche mince a temperature moderee apres co-implantation

Also Published As

Publication number Publication date
EP1605504A1 (de) 2005-12-14
EP1605504B1 (de) 2011-05-25
EP2293326A2 (de) 2011-03-09
US7256103B2 (en) 2007-08-14
JP2005354078A (ja) 2005-12-22
EP2293326A3 (de) 2012-01-25
US20050277267A1 (en) 2005-12-15
JP4508955B2 (ja) 2010-07-21

Similar Documents

Publication Publication Date Title
ATE515794T1 (de) Verfahren zur herstellung eines geoi-wafers (germanium on insulator)
TW200605195A (en) Production method of compound semiconductor device wafer
TW200741831A (en) Method of manufacturing semiconductor device
EP1429381A3 (de) Verfahren zur Herstellung eines Verbundmaterials
TW200520087A (en) Process for obtaining a thin layer of increased quality by co-implantation and thermal annealing
DK1989740T3 (da) Fremgangsmåde til solcellemarkering og solcelle
WO2005086226A8 (fr) Traitement thermique d’amelioration de la qualite d’une couche mince prelevee
JP2007251129A5 (de)
TW200703462A (en) Wafer separation technique for the fabrication of free-standing (Al, In, Ga)N wafers
TW200639969A (en) Treatmeny of a removed layer of Si1-yGey
GB2541146A (en) Method of manufacturing a germanium-on-insulator substrate
ATE535937T1 (de) Herstellungsverfahren für ein hybrid- halbleitersubstrat
SG142130A1 (en) Method of providing for an automated split runcard processing
DE602006000423D1 (de) Verfahren zur Herstellung eines Verbundmaterials und Verfahren zur Auswahl eines Wafers
TW200636098A (en) Method for growing silicon single crystal, and silicon wafer and SOI substrate using the same
EP2293326A3 (de) Verfahren für das Herstellen eines SOI Wafers
ATE393473T1 (de) Verfahren zur herstellung eines verbundsubstrats
PL380915A1 (pl) Sposób wytwarzania azotkowego podłoża półprzewodnikowego oraz azotkowe podłoże półprzewodnikowe
EP4227448A4 (de) Gaas wafer und verfahren zur herstellung eines gaas blocks
DE60315670D1 (de) Verfahren zur herstellung von substraten, insbesondere für die optik, elektronik und optoelektronik
TW200629378A (en) Semiconductor wafer having a silicon-germanium layer, and a method for its production
FR2937463B1 (fr) Procede de fabrication de composants empiles et auto-alignes sur un substrat
TW200943003A (en) Method of manufacturing the substrate
EP4130220A4 (de) Verfahren zur reinigung eines halbleitersubstrats, verfahren zur herstellung eines verarbeiteten halbleitersubstrats und abbeizzusammensetzung
TWI256674B (en) Method for dicing a wafer

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties