ATE511695T1 - System zur verabreichung eines stabilisierten röntgenstrahls - Google Patents

System zur verabreichung eines stabilisierten röntgenstrahls

Info

Publication number
ATE511695T1
ATE511695T1 AT07823313T AT07823313T ATE511695T1 AT E511695 T1 ATE511695 T1 AT E511695T1 AT 07823313 T AT07823313 T AT 07823313T AT 07823313 T AT07823313 T AT 07823313T AT E511695 T1 ATE511695 T1 AT E511695T1
Authority
AT
Austria
Prior art keywords
source
conditioning
ray
stabilized
administration
Prior art date
Application number
AT07823313T
Other languages
English (en)
Inventor
Pascal Boulee
Dan Mihai Cenda
Peter Hoghoj
Original Assignee
Xenocs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xenocs filed Critical Xenocs
Application granted granted Critical
Publication of ATE511695T1 publication Critical patent/ATE511695T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT07823313T 2006-07-24 2007-07-20 System zur verabreichung eines stabilisierten röntgenstrahls ATE511695T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0606766A FR2904176A1 (fr) 2006-07-24 2006-07-24 Systeme de delivrance de faisceau de rayons x stabilise
PCT/FR2007/001252 WO2008012419A2 (fr) 2006-07-24 2007-07-20 Système de délivrance de faisceau de rayons x stabilisé

Publications (1)

Publication Number Publication Date
ATE511695T1 true ATE511695T1 (de) 2011-06-15

Family

ID=37708129

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07823313T ATE511695T1 (de) 2006-07-24 2007-07-20 System zur verabreichung eines stabilisierten röntgenstrahls

Country Status (4)

Country Link
EP (1) EP2050100B1 (de)
AT (1) ATE511695T1 (de)
FR (1) FR2904176A1 (de)
WO (1) WO2008012419A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9666322B2 (en) 2014-02-23 2017-05-30 Bruker Jv Israel Ltd X-ray source assembly
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6377655B1 (en) * 1998-05-08 2002-04-23 Nikon Corporation Reflective mirror for soft x-ray exposure apparatus
US20040051984A1 (en) * 2002-06-25 2004-03-18 Nikon Corporation Devices and methods for cooling optical elements in optical systems, including optical systems used in vacuum environments
GB0306829D0 (en) * 2003-03-25 2003-04-30 Oxford Diffraction Ltd High flux x-ray source
US7483223B2 (en) * 2004-05-06 2009-01-27 Carl Zeiss Smt Ag Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component
ATE430369T1 (de) * 2005-11-02 2009-05-15 Univ Dublin Spiegel für hochleistungs-euv-lampensystem

Also Published As

Publication number Publication date
WO2008012419A3 (fr) 2008-08-21
FR2904176A1 (fr) 2008-01-25
EP2050100A2 (de) 2009-04-22
WO2008012419A2 (fr) 2008-01-31
EP2050100B1 (de) 2011-06-01

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Legal Events

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