ATE512467T1 - Verfahren zur herstellung einer dünnschichtsiliziumsolarzelle - Google Patents
Verfahren zur herstellung einer dünnschichtsiliziumsolarzelleInfo
- Publication number
- ATE512467T1 ATE512467T1 AT04747712T AT04747712T ATE512467T1 AT E512467 T1 ATE512467 T1 AT E512467T1 AT 04747712 T AT04747712 T AT 04747712T AT 04747712 T AT04747712 T AT 04747712T AT E512467 T1 ATE512467 T1 AT E512467T1
- Authority
- AT
- Austria
- Prior art keywords
- solar cell
- thin film
- silicon based
- producing
- silicon solar
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 4
- 229910052710 silicon Inorganic materials 0.000 title abstract 4
- 239000010703 silicon Substances 0.000 title abstract 4
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/17—Photovoltaic cells having only PIN junction potential barriers
- H10F10/174—Photovoltaic cells having only PIN junction potential barriers comprising monocrystalline or polycrystalline materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/17—Photovoltaic cells having only PIN junction potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/17—Photovoltaic cells having only PIN junction potential barriers
- H10F10/172—Photovoltaic cells having only PIN junction potential barriers comprising multiple PIN junctions, e.g. tandem cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/40—Optical elements or arrangements
- H10F77/42—Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
- H10F77/48—Back surface reflectors [BSR]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003279491 | 2003-07-24 | ||
| JP2003358362 | 2003-10-17 | ||
| PCT/JP2004/010248 WO2005011002A1 (ja) | 2003-07-24 | 2004-07-12 | シリコン系薄膜太陽電池 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE512467T1 true ATE512467T1 (de) | 2011-06-15 |
Family
ID=34106897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT04747712T ATE512467T1 (de) | 2003-07-24 | 2004-07-12 | Verfahren zur herstellung einer dünnschichtsiliziumsolarzelle |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7847186B2 (de) |
| EP (1) | EP1650812B2 (de) |
| JP (1) | JP4257332B2 (de) |
| KR (1) | KR101024288B1 (de) |
| CN (1) | CN1826699B (de) |
| AT (1) | ATE512467T1 (de) |
| AU (1) | AU2004259486B2 (de) |
| WO (1) | WO2005011002A1 (de) |
Families Citing this family (77)
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| US20080092947A1 (en) * | 2006-10-24 | 2008-04-24 | Applied Materials, Inc. | Pulse plating of a low stress film on a solar cell substrate |
| US7736928B2 (en) * | 2006-12-01 | 2010-06-15 | Applied Materials, Inc. | Precision printing electroplating through plating mask on a solar cell substrate |
| US7799182B2 (en) | 2006-12-01 | 2010-09-21 | Applied Materials, Inc. | Electroplating on roll-to-roll flexible solar cell substrates |
| US20080128019A1 (en) * | 2006-12-01 | 2008-06-05 | Applied Materials, Inc. | Method of metallizing a solar cell substrate |
| US7704352B2 (en) * | 2006-12-01 | 2010-04-27 | Applied Materials, Inc. | High-aspect ratio anode and apparatus for high-speed electroplating on a solar cell substrate |
| US7821637B1 (en) | 2007-02-22 | 2010-10-26 | J.A. Woollam Co., Inc. | System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing |
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| JP2010534938A (ja) * | 2007-07-24 | 2010-11-11 | アプライド マテリアルズ インコーポレイテッド | 多接合太陽電池および多接合太陽電池を形成するための方法および装置 |
| KR101098152B1 (ko) * | 2007-10-30 | 2011-12-26 | 산요덴키가부시키가이샤 | 태양 전지 |
| US7998762B1 (en) | 2007-11-14 | 2011-08-16 | Stion Corporation | Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration |
| WO2009082137A2 (en) * | 2007-12-21 | 2009-07-02 | Jusung Engineering Co., Ltd. | Thin film type solar cell and method for manufacturing the same |
| KR101494153B1 (ko) * | 2007-12-21 | 2015-02-23 | 주성엔지니어링(주) | 박막형 태양전지 및 그 제조방법 |
| US8772078B1 (en) | 2008-03-03 | 2014-07-08 | Stion Corporation | Method and system for laser separation for exclusion region of multi-junction photovoltaic materials |
| RU2455730C2 (ru) * | 2008-04-25 | 2012-07-10 | Улвак, Инк. | Солнечный элемент |
| KR100876613B1 (ko) | 2008-05-27 | 2008-12-31 | 한국철강 주식회사 | 탄뎀 박막 실리콘 태양전지 및 그 제조방법 |
| JP5400322B2 (ja) * | 2008-05-30 | 2014-01-29 | 株式会社カネカ | シリコン系薄膜太陽電池およびその製造方法 |
| US7939454B1 (en) | 2008-05-31 | 2011-05-10 | Stion Corporation | Module and lamination process for multijunction cells |
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| DE112009002056T5 (de) | 2008-08-27 | 2011-07-14 | Mitsubishi Materials Corporation | Transparenter elektrisch leitfähiger Film für Solarzellen, Zusammensetzung für transparente elektrisch leitfähige Filme und Mehrfach-Solarzellen |
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| US8394662B1 (en) | 2008-09-29 | 2013-03-12 | Stion Corporation | Chloride species surface treatment of thin film photovoltaic cell and manufacturing method |
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| US7947524B2 (en) | 2008-09-30 | 2011-05-24 | Stion Corporation | Humidity control and method for thin film photovoltaic materials |
| US8425739B1 (en) | 2008-09-30 | 2013-04-23 | Stion Corporation | In chamber sodium doping process and system for large scale cigs based thin film photovoltaic materials |
| US8383450B2 (en) | 2008-09-30 | 2013-02-26 | Stion Corporation | Large scale chemical bath system and method for cadmium sulfide processing of thin film photovoltaic materials |
| US8741689B2 (en) | 2008-10-01 | 2014-06-03 | Stion Corporation | Thermal pre-treatment process for soda lime glass substrate for thin film photovoltaic materials |
| US20110018103A1 (en) | 2008-10-02 | 2011-01-27 | Stion Corporation | System and method for transferring substrates in large scale processing of cigs and/or cis devices |
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| US8168463B2 (en) | 2008-10-17 | 2012-05-01 | Stion Corporation | Zinc oxide film method and structure for CIGS cell |
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| TW201021229A (en) * | 2008-11-21 | 2010-06-01 | Ind Tech Res Inst | Solar cell having reflective structure |
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| MY152718A (en) * | 2009-03-30 | 2014-11-28 | Sanyo Electric Co | Solar cell |
| US8418418B2 (en) | 2009-04-29 | 2013-04-16 | 3Form, Inc. | Architectural panels with organic photovoltaic interlayers and methods of forming the same |
| USD662040S1 (en) | 2009-06-12 | 2012-06-19 | Stion Corporation | Pin striped thin film solar module for garden lamp |
| JP5374250B2 (ja) * | 2009-06-19 | 2013-12-25 | 株式会社カネカ | 結晶シリコン太陽電池 |
| US8507786B1 (en) | 2009-06-27 | 2013-08-13 | Stion Corporation | Manufacturing method for patterning CIGS/CIS solar cells |
| US8398772B1 (en) | 2009-08-18 | 2013-03-19 | Stion Corporation | Method and structure for processing thin film PV cells with improved temperature uniformity |
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| DE102009042018A1 (de) * | 2009-09-21 | 2011-03-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Solarzelle |
| US8809096B1 (en) | 2009-10-22 | 2014-08-19 | Stion Corporation | Bell jar extraction tool method and apparatus for thin film photovoltaic materials |
| US8859880B2 (en) | 2010-01-22 | 2014-10-14 | Stion Corporation | Method and structure for tiling industrial thin-film solar devices |
| US8263494B2 (en) | 2010-01-25 | 2012-09-11 | Stion Corporation | Method for improved patterning accuracy for thin film photovoltaic panels |
| JP2011159934A (ja) * | 2010-02-04 | 2011-08-18 | Mitsubishi Chemicals Corp | 有機太陽電池セル、太陽電池モジュール及び有機太陽電池セルの製造方法 |
| KR101584376B1 (ko) * | 2010-02-10 | 2016-01-12 | 엘지전자 주식회사 | 실리콘 박막 태양전지 |
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| US8389377B2 (en) * | 2010-04-02 | 2013-03-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Sensor element isolation in a backside illuminated image sensor |
| WO2012001857A1 (ja) | 2010-06-21 | 2012-01-05 | 三菱電機株式会社 | 光電変換装置 |
| US8461061B2 (en) | 2010-07-23 | 2013-06-11 | Stion Corporation | Quartz boat method and apparatus for thin film thermal treatment |
| JP2012033565A (ja) * | 2010-07-28 | 2012-02-16 | Kaneka Corp | シリコン系薄膜光電変換装置の製造方法 |
| KR101117127B1 (ko) * | 2010-08-06 | 2012-02-24 | 한국과학기술연구원 | 비정질 실리콘 태양전지와 유기 태양전지를 이용한 탠덤형 태양전지 |
| TWI436490B (zh) * | 2010-09-03 | 2014-05-01 | Univ Tatung | 光伏電池結構 |
| US8628997B2 (en) | 2010-10-01 | 2014-01-14 | Stion Corporation | Method and device for cadmium-free solar cells |
| DE102010053382A1 (de) | 2010-12-03 | 2012-06-06 | Forschungszentrum Jülich GmbH | Verfahren zur Herstellung einer Solarzelle und eine Solarzelle |
| TWI488322B (zh) * | 2010-12-27 | 2015-06-11 | Nexpower Technology Corp | 薄膜太陽能電池堆疊製造方法及其薄膜太陽能電池 |
| WO2012089685A2 (en) * | 2010-12-29 | 2012-07-05 | Oerlikon Solar Ag, Truebbach | Siox n-layer for microcrystalline pin junction |
| US8728200B1 (en) | 2011-01-14 | 2014-05-20 | Stion Corporation | Method and system for recycling processing gas for selenization of thin film photovoltaic materials |
| JP5636325B2 (ja) * | 2011-03-31 | 2014-12-03 | 株式会社カネカ | 薄膜太陽電池及びその製造方法 |
| JP2013008866A (ja) * | 2011-06-24 | 2013-01-10 | Kaneka Corp | 薄膜光電変換装置 |
| JP5367780B2 (ja) * | 2011-08-24 | 2013-12-11 | シャープ株式会社 | 光電変換素子 |
| JP5367781B2 (ja) * | 2011-08-25 | 2013-12-11 | シャープ株式会社 | 光電変換素子 |
| JP5770294B2 (ja) * | 2011-09-01 | 2015-08-26 | シャープ株式会社 | 光電変換装置およびその製造方法 |
| CN103078001A (zh) * | 2012-12-28 | 2013-05-01 | 福建铂阳精工设备有限公司 | 硅基薄膜叠层太阳能电池的制造方法 |
| CN103296122A (zh) * | 2013-06-05 | 2013-09-11 | 福建铂阳精工设备有限公司 | 薄膜太阳能电池 |
| CN107681020A (zh) * | 2017-09-26 | 2018-02-09 | 南开大学 | 一种提高平面硅异质结太阳电池长波长光响应的方法 |
| US11721801B2 (en) | 2020-08-17 | 2023-08-08 | International Business Machines Corporation, Armonk | Low resistance composite silicon-based electrode |
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|---|---|---|---|---|
| JPS5935016A (ja) * | 1982-08-18 | 1984-02-25 | Agency Of Ind Science & Technol | 含水素シリコン層の製造方法 |
| JPS62234379A (ja) | 1986-04-04 | 1987-10-14 | Kanegafuchi Chem Ind Co Ltd | 半導体装置 |
| US4718947A (en) * | 1986-04-17 | 1988-01-12 | Solarex Corporation | Superlattice doped layers for amorphous silicon photovoltaic cells |
| US4776894A (en) * | 1986-08-18 | 1988-10-11 | Sanyo Electric Co., Ltd. | Photovoltaic device |
| JPH073876B2 (ja) | 1986-11-10 | 1995-01-18 | 三洋電機株式会社 | 光起電力装置 |
| JPS6384075A (ja) * | 1986-09-26 | 1988-04-14 | Sanyo Electric Co Ltd | 光起電力装置 |
| US5055141A (en) * | 1990-01-19 | 1991-10-08 | Solarex Corporation | Enhancement of short-circuit current by use of wide bandgap n-layers in p-i-n amorphous silicon photovoltaic cells |
| JP3047666B2 (ja) | 1993-03-16 | 2000-05-29 | 富士電機株式会社 | シリコンオキサイド半導体膜の成膜方法 |
| US5419783A (en) * | 1992-03-26 | 1995-05-30 | Sanyo Electric Co., Ltd. | Photovoltaic device and manufacturing method therefor |
| JPH11186574A (ja) | 1997-12-24 | 1999-07-09 | Kanegafuchi Chem Ind Co Ltd | シリコン系薄膜光電変換装置 |
| JP2000138384A (ja) * | 1998-10-30 | 2000-05-16 | Sanyo Electric Co Ltd | 非晶質半導体素子及びその製造方法 |
| JP4158267B2 (ja) | 1999-03-15 | 2008-10-01 | 富士電機ホールディングス株式会社 | 非単結晶太陽電池 |
| JP2001203374A (ja) | 2000-01-21 | 2001-07-27 | Fuji Electric Corp Res & Dev Ltd | 非単結晶薄膜太陽電池およびその製造方法 |
| JP2003258297A (ja) | 2002-02-27 | 2003-09-12 | Shiro Sakai | 窒化ガリウム系化合物半導体装置 |
| JP4284582B2 (ja) † | 2002-03-04 | 2009-06-24 | 富士電機システムズ株式会社 | 多接合型薄膜太陽電池とその製造方法 |
| JP3955225B2 (ja) † | 2002-03-27 | 2007-08-08 | 日立ソフトウエアエンジニアリング株式会社 | 半導体ナノ粒子を用いる反応の反応測定方法及び該測定方法を用いる半導体ナノ粒子の品質評価方法 |
-
2004
- 2004-07-12 JP JP2005512009A patent/JP4257332B2/ja not_active Expired - Fee Related
- 2004-07-12 CN CN2004800210593A patent/CN1826699B/zh not_active Ceased
- 2004-07-12 AT AT04747712T patent/ATE512467T1/de not_active IP Right Cessation
- 2004-07-12 WO PCT/JP2004/010248 patent/WO2005011002A1/ja not_active Ceased
- 2004-07-12 KR KR1020067000752A patent/KR101024288B1/ko not_active Expired - Fee Related
- 2004-07-12 EP EP04747712.0A patent/EP1650812B2/de not_active Expired - Lifetime
- 2004-07-12 AU AU2004259486A patent/AU2004259486B2/en not_active Ceased
- 2004-07-12 US US10/563,009 patent/US7847186B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060035751A (ko) | 2006-04-26 |
| EP1650812A1 (de) | 2006-04-26 |
| KR101024288B1 (ko) | 2011-03-29 |
| EP1650812B1 (de) | 2011-06-08 |
| CN1826699A (zh) | 2006-08-30 |
| JPWO2005011002A1 (ja) | 2006-09-14 |
| US20060174935A1 (en) | 2006-08-10 |
| EP1650812B2 (de) | 2019-10-23 |
| EP1650812A4 (de) | 2009-08-12 |
| AU2004259486A1 (en) | 2005-02-03 |
| US7847186B2 (en) | 2010-12-07 |
| JP4257332B2 (ja) | 2009-04-22 |
| WO2005011002A1 (ja) | 2005-02-03 |
| CN1826699B (zh) | 2010-12-29 |
| AU2004259486B2 (en) | 2010-02-18 |
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