ATE514061T1 - Herstellungsverfahren eines bolometrischen detektors - Google Patents

Herstellungsverfahren eines bolometrischen detektors

Info

Publication number
ATE514061T1
ATE514061T1 AT10354002T AT10354002T ATE514061T1 AT E514061 T1 ATE514061 T1 AT E514061T1 AT 10354002 T AT10354002 T AT 10354002T AT 10354002 T AT10354002 T AT 10354002T AT E514061 T1 ATE514061 T1 AT E514061T1
Authority
AT
Austria
Prior art keywords
iron oxide
semi
thin layer
conductor
local
Prior art date
Application number
AT10354002T
Other languages
English (en)
Inventor
Jean-Louis Ouvrier-Buffet
Christophe Dubarry
Laurent Puech
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE514061T1 publication Critical patent/ATE514061T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0837—Microantennas, e.g. bow-tie

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Light Receiving Elements (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
AT10354002T 2009-01-19 2010-01-05 Herstellungsverfahren eines bolometrischen detektors ATE514061T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0900215A FR2941297B1 (fr) 2009-01-19 2009-01-19 Procede de fabrication d'un detecteur bolometrique

Publications (1)

Publication Number Publication Date
ATE514061T1 true ATE514061T1 (de) 2011-07-15

Family

ID=41078179

Family Applications (1)

Application Number Title Priority Date Filing Date
AT10354002T ATE514061T1 (de) 2009-01-19 2010-01-05 Herstellungsverfahren eines bolometrischen detektors

Country Status (6)

Country Link
US (1) US7927908B2 (de)
EP (1) EP2208975B1 (de)
JP (1) JP5546879B2 (de)
CN (1) CN101782441B (de)
AT (1) ATE514061T1 (de)
FR (1) FR2941297B1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2864065B1 (fr) * 2003-12-22 2006-02-24 Univ Toulouse Utilisation de ferrites spinelles comme materiau sensible pour dispositifs bolometriques de detection de l'infrarouge.
FR2941297B1 (fr) * 2009-01-19 2011-02-11 Commissariat Energie Atomique Procede de fabrication d'un detecteur bolometrique
US8354642B2 (en) * 2010-10-13 2013-01-15 International Business Machines Corporation Monolithic passive THz detector with energy concentration on sub-pixel suspended MEMS thermal sensor
WO2011151756A2 (en) 2010-05-30 2011-12-08 Technion R&D Foundation Sensing device having a therhal antenna and a method for sensing electromagnetic radiation
JP2013152114A (ja) * 2012-01-24 2013-08-08 Seiko Epson Corp 熱型電磁波検出素子チップおよび熱型電磁波検出器並びに電子機器
JP5906757B2 (ja) * 2012-01-24 2016-04-20 セイコーエプソン株式会社 熱型電磁波検出器およびその製造方法並びに電子機器
CN103117287B (zh) * 2013-01-25 2015-09-16 四川大学 非制冷薄膜型红外焦平面阵列探测器结构及其制备方法
US9766127B2 (en) 2013-07-15 2017-09-19 The Aerospace Corporation Terahertz detection assembly and methods for use in detecting terahertz radiation
FR3017456B1 (fr) 2014-02-12 2017-06-23 Commissariat Energie Atomique Detecteur bolometrique a structure mim incluant un element thermometre
CN106611806A (zh) * 2015-10-23 2017-05-03 上海巨哥电子科技有限公司 一种红外探测器结构及其制备方法
WO2017119978A2 (en) * 2015-12-07 2017-07-13 Georgetown University Epitaxial graphene quantum dots for high-performance terahertz bolometers
CN107290067B (zh) * 2016-04-01 2021-07-30 上海巨哥科技股份有限公司 一种低时间常数的非制冷红外探测器
CN109216500B (zh) * 2017-06-26 2021-08-17 苏州科技大学 太赫兹波探测器用衬底及其制备方法
CN108458789A (zh) * 2018-04-20 2018-08-28 国家纳米科学中心 一种基于硫化钽薄膜的测辐射热计及其制备方法和用途
FR3087886B1 (fr) * 2018-10-24 2020-10-09 Commissariat Energie Atomique Procede de fabrication d'un microbolometre a materiau thermistance a base d'oxyde de vanadium presentant des performances ameliorees
CN111504480B (zh) * 2020-06-30 2020-10-09 北京北方高业科技有限公司 一种红外探测器
KR102708213B1 (ko) * 2022-03-29 2024-09-23 한국생산기술연구원 밴드패스필터 일체형 mems 기반의 적외선 센서 및 이의 제조방법

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9623139D0 (en) * 1996-11-06 1997-01-08 Euratom A temperature sensor
US6225656B1 (en) * 1998-12-01 2001-05-01 Symetrix Corporation Ferroelectric integrated circuit with protective layer incorporating oxygen and method for fabricating same
FR2822541B1 (fr) * 2001-03-21 2003-10-03 Commissariat Energie Atomique Procedes et dispositifs de fabrication de detecteurs de rayonnement
JP2004006814A (ja) * 2002-04-26 2004-01-08 Matsushita Electric Ind Co Ltd 抵抗変化材料の製造方法およびセンサ
FR2845157B1 (fr) * 2002-10-01 2004-11-05 Commissariat Energie Atomique Detecteur bolometrique a antenne comportant un interrupteur et dispositif d'imagerie le comportant.
US7054052B2 (en) * 2003-09-04 2006-05-30 Frank Niklaus Adhesive sacrificial bonding of spatial light modulators
FR2864065B1 (fr) 2003-12-22 2006-02-24 Univ Toulouse Utilisation de ferrites spinelles comme materiau sensible pour dispositifs bolometriques de detection de l'infrarouge.
US20050136917A1 (en) * 2003-12-23 2005-06-23 Taylor Scott P. Content delivery coordinator apparatus and method
FR2877492B1 (fr) * 2004-10-28 2006-12-08 Commissariat Energie Atomique Detecteur bolometrique a isolation thermique par constriction et dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique
JP4962837B2 (ja) * 2006-02-27 2012-06-27 独立行政法人産業技術総合研究所 赤外線センサの製造方法
WO2007104328A1 (de) * 2006-03-14 2007-09-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. B0l0meter mit organischer halbleiterschichtanordnung
WO2008028512A1 (de) * 2006-09-08 2008-03-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bolometer und verfahren zum herstellen eines bolometers
FR2910125B1 (fr) * 2006-12-14 2013-07-05 Commissariat Energie Atomique Utilisation d'association de monoxyde de fer et d'oxydes spinelles comme materiau sensible destine a la detection de rayonnements infrarouges
DE102007043648A1 (de) * 2007-09-13 2009-03-19 Siemens Ag Organischer Photodetektor zur Detektion infraroter Strahlung, Verfahren zur Herstellung dazu und Verwendung
US8058615B2 (en) * 2008-02-29 2011-11-15 Sionyx, Inc. Wide spectral range hybrid image detector
US20090295277A1 (en) * 2008-05-28 2009-12-03 Stephan Lvovich Logunov Glass packages and methods of controlling laser beam characteristics for sealing them
FR2941297B1 (fr) * 2009-01-19 2011-02-11 Commissariat Energie Atomique Procede de fabrication d'un detecteur bolometrique
FR2945119B1 (fr) * 2009-04-30 2011-04-08 Commissariat Energie Atomique Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz et dispositif de detection matriciel comportant de tels detecteurs

Also Published As

Publication number Publication date
US20100184245A1 (en) 2010-07-22
JP2010181405A (ja) 2010-08-19
EP2208975A1 (de) 2010-07-21
FR2941297A1 (fr) 2010-07-23
EP2208975B1 (de) 2011-06-22
CN101782441A (zh) 2010-07-21
JP5546879B2 (ja) 2014-07-09
US7927908B2 (en) 2011-04-19
FR2941297B1 (fr) 2011-02-11
CN101782441B (zh) 2014-03-12

Similar Documents

Publication Publication Date Title
ATE514061T1 (de) Herstellungsverfahren eines bolometrischen detektors
WO2011008456A3 (en) Methods of forming oxide layers on substrates
Fried et al. Leading on behalf of an aging society.
JP2011029619A5 (ja) 基板の処理方法
JP2013175717A5 (de)
BR112015030091A2 (pt) novo processo de manufaturação de metal duro e um produto obtido deste
PL2147131T3 (pl) Sposób termochemicznej pasywacji stali szlachetnej
JP2012199530A5 (de)
ATE531076T1 (de) Verfahren zur verbesserung der mobilität einer inversionsschicht in einem siliciumcarbid-mosfet
TW200746299A (en) A method of forming an oxide layer
RU2015141001A (ru) Способ получения поверхностно-обработанного материала из металлического титана или материала из титанового сплава и поверхностно-обработанный материал
DK2072629T3 (da) Ultrapassivering af chromholdig legering
ATE489009T1 (de) Rauchfreie zigarette
JP2013105966A5 (de)
MX2017012154A (es) Tira o lamina metalica que tiene un recubrimiento de nitruro de cromo, placa bipolar y su metodo de fabricacion asociado.
WO2011073577A3 (fr) Procede d'obtention d'un recipient de cuisson avec fond diffuseur et article culinaire ou appareil electrique de cuisson comportant un tel recipient de cuisson
DK2015350T3 (da) Halvlederkomponent med bufferlag
WO2009028452A1 (ja) 金属酸化物半導体の製造方法およびこれを用い作製された酸化物半導体薄膜を用いた薄膜トランジスタ
TW200802694A (en) Method of producing SIMOX wafer
BR112017004702A2 (pt) processo de fabricação e controle de uma peça.
JP2007189207A5 (de)
WO2009128067A3 (en) Localized plasmon transducers and methods of fabrication thereof
TW200614340A (en) Method for manufacturing semi-conductor devices
Xiao et al. Research on the inner crack healing of 45 steel by heat treatment
PL407110A1 (pl) Sposób wytwarzania warstwy nawęglonej 3C-SiC na podłożu Si

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties