ATE518411T1 - Verfahren zum einbetten von leitendem material und danach hergestellte vorrichtungen - Google Patents

Verfahren zum einbetten von leitendem material und danach hergestellte vorrichtungen

Info

Publication number
ATE518411T1
ATE518411T1 AT06005244T AT06005244T ATE518411T1 AT E518411 T1 ATE518411 T1 AT E518411T1 AT 06005244 T AT06005244 T AT 06005244T AT 06005244 T AT06005244 T AT 06005244T AT E518411 T1 ATE518411 T1 AT E518411T1
Authority
AT
Austria
Prior art keywords
flexible
stretchable
patterned
sacrificial layer
layer
Prior art date
Application number
AT06005244T
Other languages
English (en)
Inventor
Jan Vanfleteren
Dominique Brosteaux
Fabrice Axisa
Original Assignee
Imec
Univ Gent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec, Univ Gent filed Critical Imec
Application granted granted Critical
Publication of ATE518411T1 publication Critical patent/ATE518411T1/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/205Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0133Elastomeric or compliant polymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/098Special shape of the cross-section of conductors, e.g. very thick plated conductors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126Assembling bases
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49158Manufacturing circuit on or in base with molding of insulated base

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Structure Of Printed Boards (AREA)
  • Laminated Bodies (AREA)
  • Silicon Polymers (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
  • Conductive Materials (AREA)
AT06005244T 2005-03-22 2006-03-15 Verfahren zum einbetten von leitendem material und danach hergestellte vorrichtungen ATE518411T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0505826.8A GB0505826D0 (en) 2005-03-22 2005-03-22 Methods for embedding of conducting material and devices resulting from said methods

Publications (1)

Publication Number Publication Date
ATE518411T1 true ATE518411T1 (de) 2011-08-15

Family

ID=34531644

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06005244T ATE518411T1 (de) 2005-03-22 2006-03-15 Verfahren zum einbetten von leitendem material und danach hergestellte vorrichtungen

Country Status (4)

Country Link
US (2) US7487587B2 (de)
EP (1) EP1746869B1 (de)
AT (1) ATE518411T1 (de)
GB (1) GB0505826D0 (de)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4902248B2 (ja) * 2006-04-07 2012-03-21 株式会社日本マイクロニクス 電気的接続装置
JP4884821B2 (ja) * 2006-04-14 2012-02-29 株式会社日本マイクロニクス プローブシートおよび電気的接続装置
JP4841298B2 (ja) * 2006-04-14 2011-12-21 株式会社日本マイクロニクス プローブシートの製造方法
JP2008082912A (ja) * 2006-09-28 2008-04-10 Micronics Japan Co Ltd 電気的接続装置
DE102006055576A1 (de) * 2006-11-21 2008-05-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen eines dehnbaren Schaltungsträgers und dehnbarer Schaltungsträger
EP2255378B1 (de) * 2008-03-05 2015-08-05 The Board of Trustees of the University of Illinois Streckbare und klappbare elektronische anordnungen
US8207473B2 (en) * 2008-06-24 2012-06-26 Imec Method for manufacturing a stretchable electronic device
US8372726B2 (en) 2008-10-07 2013-02-12 Mc10, Inc. Methods and applications of non-planar imaging arrays
US9123614B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Methods and applications of non-planar imaging arrays
US8886334B2 (en) 2008-10-07 2014-11-11 Mc10, Inc. Systems, methods, and devices using stretchable or flexible electronics for medical applications
US8389862B2 (en) 2008-10-07 2013-03-05 Mc10, Inc. Extremely stretchable electronics
US9119533B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US9545216B2 (en) 2011-08-05 2017-01-17 Mc10, Inc. Catheter balloon methods and apparatus employing sensing elements
US8097926B2 (en) 2008-10-07 2012-01-17 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
JP5646492B2 (ja) 2008-10-07 2014-12-24 エムシー10 インコーポレイテッドMc10,Inc. 伸縮可能な集積回路およびセンサアレイを有する装置
WO2010086033A1 (en) 2009-01-30 2010-08-05 Interuniversitair Microelektronica Centrum Vzw Stretchable electronic device
WO2010086416A1 (en) 2009-01-30 2010-08-05 Imec Stretchable electronic device
JP4944145B2 (ja) * 2009-03-19 2012-05-30 太陽誘電株式会社 圧電薄膜共振子、フィルタ、通信モジュール、通信装置
US8883287B2 (en) * 2009-06-29 2014-11-11 Infinite Corridor Technology, Llc Structured material substrates for flexible, stretchable electronics
WO2011041727A1 (en) 2009-10-01 2011-04-07 Mc10, Inc. Protective cases with integrated electronics
US20110218756A1 (en) * 2009-10-01 2011-09-08 Mc10, Inc. Methods and apparatus for conformal sensing of force and/or acceleration at a person's head
EP2355144A1 (de) 2010-02-09 2011-08-10 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Bestückung auf flexiblen und/oder dehnbaren Substraten
TWI419278B (zh) * 2010-10-26 2013-12-11 欣興電子股份有限公司 封裝基板及其製法
EP2461658A1 (de) 2010-12-03 2012-06-06 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Verfahren und Vorrichtung zur Anordnung elektrischer Komponenten auf einem flexiblen Substrat sowie Anordnung einer elektrischen Komponente mit einem flexiblen Substrat
EP2681538B1 (de) 2011-03-11 2019-03-06 Mc10, Inc. Integrierte vorrichtungen zur ermöglichung quantitativer assays und diagnosen
KR102000302B1 (ko) 2011-05-27 2019-07-15 엠씨10, 인크 전자, 광학, 및/또는 기계 장치 및 시스템, 그리고 이를 제조하기 위한 방법
FR2975985B1 (fr) * 2011-05-30 2016-02-12 Univ Paris Sud 11 Procede pour la realisation de supports fonctionnels souples.
US9757050B2 (en) 2011-08-05 2017-09-12 Mc10, Inc. Catheter balloon employing force sensing elements
EP3470830A1 (de) 2011-09-01 2019-04-17 MC10 Inc. Elektronik zur erfassung des zustandes von gewebe
JP6277130B2 (ja) 2011-10-05 2018-02-14 エムシーテン、インコーポレイテッド 医療用の装置およびそれの製造方法
US9121106B2 (en) * 2012-02-28 2015-09-01 Texas Instruments Incorporated Method of forming a laminated magnetic core with sputter deposited and electroplated layers
US9947609B2 (en) 2012-03-09 2018-04-17 Honeywell International Inc. Integrated circuit stack
US9226402B2 (en) 2012-06-11 2015-12-29 Mc10, Inc. Strain isolation structures for stretchable electronics
US9247637B2 (en) 2012-06-11 2016-01-26 Mc10, Inc. Strain relief structures for stretchable interconnects
KR20150031324A (ko) 2012-07-05 2015-03-23 엠씨10, 인크 유동 감지를 포함하는 카테터 장치
US9295842B2 (en) 2012-07-05 2016-03-29 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
US9171794B2 (en) 2012-10-09 2015-10-27 Mc10, Inc. Embedding thin chips in polymer
WO2014058473A1 (en) 2012-10-09 2014-04-17 Mc10, Inc. Conformal electronics integrated with apparel
US9706647B2 (en) 2013-05-14 2017-07-11 Mc10, Inc. Conformal electronics including nested serpentine interconnects
JP2016527649A (ja) 2013-08-05 2016-09-08 エムシー10 インコーポレイテッドMc10,Inc. 適合する電子機器を含む可撓性温度センサ
US10467926B2 (en) 2013-10-07 2019-11-05 Mc10, Inc. Conformal sensor systems for sensing and analysis
JP6711750B2 (ja) 2013-11-22 2020-06-17 エムシー10 インコーポレイテッドMc10,Inc. 心臓活動の検知および分析のためのコンフォーマルセンサシステム
CA2935372C (en) 2014-01-06 2023-08-08 Mc10, Inc. Encapsulated conformal electronic systems and devices, and methods of making and using the same
US10485118B2 (en) 2014-03-04 2019-11-19 Mc10, Inc. Multi-part flexible encapsulation housing for electronic devices and methods of making the same
US9810623B2 (en) 2014-03-12 2017-11-07 Mc10, Inc. Quantification of a change in assay
US10103037B2 (en) * 2014-05-09 2018-10-16 Intel Corporation Flexible microelectronic systems and methods of fabricating the same
KR101691485B1 (ko) * 2014-07-11 2017-01-02 인텔 코포레이션 굽힘 및 펼침이 가능한 전자 장치들 및 방법들
EP3201964B1 (de) * 2014-09-29 2020-11-18 LG Display Co., Ltd. Flexible anzeigevorrichtung mit drähten mit reduzierter biegespannung
US9899330B2 (en) 2014-10-03 2018-02-20 Mc10, Inc. Flexible electronic circuits with embedded integrated circuit die
US10297572B2 (en) 2014-10-06 2019-05-21 Mc10, Inc. Discrete flexible interconnects for modules of integrated circuits
USD781270S1 (en) 2014-10-15 2017-03-14 Mc10, Inc. Electronic device having antenna
WO2016134306A1 (en) 2015-02-20 2016-08-25 Mc10, Inc. Automated detection and configuration of wearable devices based on on-body status, location, and/or orientation
WO2016140961A1 (en) 2015-03-02 2016-09-09 Mc10, Inc. Perspiration sensor
US9548277B2 (en) 2015-04-21 2017-01-17 Honeywell International Inc. Integrated circuit stack including a patterned array of electrically conductive pillars
JP6491556B2 (ja) * 2015-07-09 2019-03-27 日東電工株式会社 配線回路基板
JP6484133B2 (ja) * 2015-07-09 2019-03-13 日東電工株式会社 配線回路基板の製造方法
US10653332B2 (en) 2015-07-17 2020-05-19 Mc10, Inc. Conductive stiffener, method of making a conductive stiffener, and conductive adhesive and encapsulation layers
US10709384B2 (en) 2015-08-19 2020-07-14 Mc10, Inc. Wearable heat flux devices and methods of use
US10300371B2 (en) 2015-10-01 2019-05-28 Mc10, Inc. Method and system for interacting with a virtual environment
CN108289630A (zh) 2015-10-05 2018-07-17 Mc10股份有限公司 用于神经调节和刺激的方法和系统
TWI587763B (zh) * 2015-11-17 2017-06-11 The use of gravure printing method to form conductive totem
US10080290B2 (en) * 2015-11-17 2018-09-18 Intel Corporation Stretchable embedded electronic package
US10076025B2 (en) * 2016-02-22 2018-09-11 Nippon Mektron, Ltd. Stretchable circuit board and method for manufacturing the same
WO2017147053A1 (en) 2016-02-22 2017-08-31 Mc10, Inc. System, device, and method for coupled hub and sensor node on-body acquisition of sensor information
US10277386B2 (en) 2016-02-22 2019-04-30 Mc10, Inc. System, devices, and method for on-body data and power transmission
CN109310340A (zh) 2016-04-19 2019-02-05 Mc10股份有限公司 用于测量汗液的方法和系统
US10447347B2 (en) 2016-08-12 2019-10-15 Mc10, Inc. Wireless charger and high speed data off-loader
EP3322267B1 (de) * 2016-11-10 2025-02-19 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Komponententräger mit haftfördernder form von verdrahtungsstruktur
CN108156763B (zh) * 2016-12-05 2020-08-07 鹏鼎控股(深圳)股份有限公司 透明电路板及其制作方法
CN108401361B (zh) * 2017-02-04 2020-08-07 欣兴电子股份有限公司 电路板与其制作方法
US10512165B2 (en) 2017-03-23 2019-12-17 Unimicron Technology Corp. Method for manufacturing a circuit board
FR3083918B1 (fr) * 2018-07-13 2020-10-23 Commissariat Energie Atomique Procede de transfert de structures
US11749455B2 (en) * 2022-01-10 2023-09-05 Bh Electronics, Inc. Methods of fabricating ultra-miniature laminated magnetic cores and devices
CN118748864B (zh) * 2024-08-13 2025-01-17 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) 可拉伸电路及其制备方法、柔性电子集成系统

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3279969A (en) 1962-11-29 1966-10-18 Amphenol Corp Method of making electronic circuit elements
US4584039A (en) * 1984-12-26 1986-04-22 Hughes Aircraft Co. Fine line flexible cable fabrication process
DE68917766T2 (de) * 1988-03-30 1994-12-22 Rhone Poulenc Chimie Verfahren zur Herstellung von Titanoxid.
US5147519A (en) * 1990-07-27 1992-09-15 Motorola, Inc. Method of manufacturing elastomers containing fine line conductors
KR100274764B1 (ko) 1991-11-29 2001-01-15 이사오 우치가사키 배선판의 제조법
US5436412A (en) * 1992-10-30 1995-07-25 International Business Machines Corporation Interconnect structure having improved metallization
DE19617055C1 (de) * 1996-04-29 1997-06-26 Semikron Elektronik Gmbh Halbleiterleistungsmodul hoher Packungsdichte in Mehrschichtbauweise
JP4066522B2 (ja) * 1998-07-22 2008-03-26 イビデン株式会社 プリント配線板
JP3935309B2 (ja) * 2000-06-08 2007-06-20 日東電工株式会社 配線回路基板およびその製造方法
JP4459406B2 (ja) * 2000-07-27 2010-04-28 ソニーケミカル&インフォメーションデバイス株式会社 フレキシブル配線板製造方法
US6663786B2 (en) * 2001-06-14 2003-12-16 International Business Machines Corporation Structure having embedded flush circuitry features and method of fabricating
US7491892B2 (en) * 2003-03-28 2009-02-17 Princeton University Stretchable and elastic interconnects
US7337012B2 (en) * 2003-04-30 2008-02-26 Lawrence Livermore National Security, Llc Stretchable polymer-based electronic device
US7056759B2 (en) * 2004-04-27 2006-06-06 Hewlett-Packard Development Company, L.P. Method for making a microelectromechanical system using a flexure protection layer
KR100643756B1 (ko) * 2004-09-10 2006-11-10 삼성전자주식회사 유연소자, 유연압력센서, 및 이들의 제조방법
TWI370714B (en) * 2008-01-09 2012-08-11 Ind Tech Res Inst Circuit structure and menufacturing method thereof

Also Published As

Publication number Publication date
US20060231288A1 (en) 2006-10-19
US7487587B2 (en) 2009-02-10
EP1746869B1 (de) 2011-07-27
US8431828B2 (en) 2013-04-30
US20090107704A1 (en) 2009-04-30
GB0505826D0 (en) 2005-04-27
EP1746869A1 (de) 2007-01-24

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