ATE518411T1 - Verfahren zum einbetten von leitendem material und danach hergestellte vorrichtungen - Google Patents

Verfahren zum einbetten von leitendem material und danach hergestellte vorrichtungen

Info

Publication number
ATE518411T1
ATE518411T1 AT06005244T AT06005244T ATE518411T1 AT E518411 T1 ATE518411 T1 AT E518411T1 AT 06005244 T AT06005244 T AT 06005244T AT 06005244 T AT06005244 T AT 06005244T AT E518411 T1 ATE518411 T1 AT E518411T1
Authority
AT
Austria
Prior art keywords
flexible
stretchable
patterned
sacrificial layer
layer
Prior art date
Application number
AT06005244T
Other languages
English (en)
Inventor
Jan Vanfleteren
Dominique Brosteaux
Fabrice Axisa
Original Assignee
Imec
Univ Gent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec, Univ Gent filed Critical Imec
Application granted granted Critical
Publication of ATE518411T1 publication Critical patent/ATE518411T1/de

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/205Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a pattern electroplated or electroformed on a metallic carrier
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0393Flexible materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0133Elastomeric or compliant polymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/098Special shape of the cross-section of conductors, e.g. very thick plated conductors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126Assembling bases
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • Y10T29/49158Manufacturing circuit on or in base with molding of insulated base

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Structure Of Printed Boards (AREA)
  • Laminated Bodies (AREA)
  • Conductive Materials (AREA)
  • Silicon Polymers (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
AT06005244T 2005-03-22 2006-03-15 Verfahren zum einbetten von leitendem material und danach hergestellte vorrichtungen ATE518411T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0505826.8A GB0505826D0 (en) 2005-03-22 2005-03-22 Methods for embedding of conducting material and devices resulting from said methods

Publications (1)

Publication Number Publication Date
ATE518411T1 true ATE518411T1 (de) 2011-08-15

Family

ID=34531644

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06005244T ATE518411T1 (de) 2005-03-22 2006-03-15 Verfahren zum einbetten von leitendem material und danach hergestellte vorrichtungen

Country Status (4)

Country Link
US (2) US7487587B2 (de)
EP (1) EP1746869B1 (de)
AT (1) ATE518411T1 (de)
GB (1) GB0505826D0 (de)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4902248B2 (ja) * 2006-04-07 2012-03-21 株式会社日本マイクロニクス 電気的接続装置
JP4884821B2 (ja) * 2006-04-14 2012-02-29 株式会社日本マイクロニクス プローブシートおよび電気的接続装置
JP4841298B2 (ja) * 2006-04-14 2011-12-21 株式会社日本マイクロニクス プローブシートの製造方法
JP2008082912A (ja) * 2006-09-28 2008-04-10 Micronics Japan Co Ltd 電気的接続装置
DE102006055576A1 (de) * 2006-11-21 2008-05-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen eines dehnbaren Schaltungsträgers und dehnbarer Schaltungsträger
TWI723953B (zh) * 2008-03-05 2021-04-11 美國伊利諾大學理事會 可延展且可折疊的電子裝置
US8207473B2 (en) * 2008-06-24 2012-06-26 Imec Method for manufacturing a stretchable electronic device
US8886334B2 (en) 2008-10-07 2014-11-11 Mc10, Inc. Systems, methods, and devices using stretchable or flexible electronics for medical applications
US9123614B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Methods and applications of non-planar imaging arrays
US8372726B2 (en) 2008-10-07 2013-02-12 Mc10, Inc. Methods and applications of non-planar imaging arrays
US8389862B2 (en) 2008-10-07 2013-03-05 Mc10, Inc. Extremely stretchable electronics
US9545216B2 (en) 2011-08-05 2017-01-17 Mc10, Inc. Catheter balloon methods and apparatus employing sensing elements
US8097926B2 (en) 2008-10-07 2012-01-17 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US9119533B2 (en) 2008-10-07 2015-09-01 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
US9289132B2 (en) 2008-10-07 2016-03-22 Mc10, Inc. Catheter balloon having stretchable integrated circuitry and sensor array
WO2010086033A1 (en) 2009-01-30 2010-08-05 Interuniversitair Microelektronica Centrum Vzw Stretchable electronic device
WO2010086416A1 (en) 2009-01-30 2010-08-05 Imec Stretchable electronic device
JP4944145B2 (ja) * 2009-03-19 2012-05-30 太陽誘電株式会社 圧電薄膜共振子、フィルタ、通信モジュール、通信装置
WO2011008459A2 (en) * 2009-06-29 2011-01-20 Infinite Corridor Technology, Llc Structured material substrates for flexible, stretchable electronics
WO2011041727A1 (en) 2009-10-01 2011-04-07 Mc10, Inc. Protective cases with integrated electronics
US20110218756A1 (en) * 2009-10-01 2011-09-08 Mc10, Inc. Methods and apparatus for conformal sensing of force and/or acceleration at a person's head
EP2355144A1 (de) * 2010-02-09 2011-08-10 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Bestückung auf flexiblen und/oder dehnbaren Substraten
TWI419278B (zh) * 2010-10-26 2013-12-11 欣興電子股份有限公司 封裝基板及其製法
EP2461658A1 (de) 2010-12-03 2012-06-06 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Verfahren und Vorrichtung zur Anordnung elektrischer Komponenten auf einem flexiblen Substrat sowie Anordnung einer elektrischen Komponente mit einem flexiblen Substrat
WO2012125494A2 (en) 2011-03-11 2012-09-20 Mc10, Inc. Integrated devices to facilitate quantitative assays and diagnostics
WO2012166686A2 (en) 2011-05-27 2012-12-06 Mc10, Inc. Electronic, optical and/or mechanical apparatus and systems and methods for fabricating same
FR2975985B1 (fr) * 2011-05-30 2016-02-12 Univ Paris Sud 11 Procede pour la realisation de supports fonctionnels souples.
US9757050B2 (en) 2011-08-05 2017-09-12 Mc10, Inc. Catheter balloon employing force sensing elements
EP2786131B1 (de) 2011-09-01 2018-11-07 Mc10, Inc. Elektronik zur erfassung des zustandes von gewebe
DE112012004146T5 (de) 2011-10-05 2014-11-06 Mc10, Inc. Herzkatheter mit Verwendung oberflächentreuer Elektronik zur Abbildung
US9121106B2 (en) * 2012-02-28 2015-09-01 Texas Instruments Incorporated Method of forming a laminated magnetic core with sputter deposited and electroplated layers
US9947609B2 (en) 2012-03-09 2018-04-17 Honeywell International Inc. Integrated circuit stack
US9226402B2 (en) 2012-06-11 2015-12-29 Mc10, Inc. Strain isolation structures for stretchable electronics
US9247637B2 (en) 2012-06-11 2016-01-26 Mc10, Inc. Strain relief structures for stretchable interconnects
US9295842B2 (en) 2012-07-05 2016-03-29 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
JP2015521894A (ja) 2012-07-05 2015-08-03 エムシー10 インコーポレイテッドMc10,Inc. 流量センシングを含むカテーテルデバイス
CN105008949A (zh) 2012-10-09 2015-10-28 Mc10股份有限公司 与服装整合的保形电子装置
US9171794B2 (en) 2012-10-09 2015-10-27 Mc10, Inc. Embedding thin chips in polymer
US9706647B2 (en) 2013-05-14 2017-07-11 Mc10, Inc. Conformal electronics including nested serpentine interconnects
KR20160040670A (ko) 2013-08-05 2016-04-14 엠씨10, 인크 곡면부착형 전자기기를 포함하는 유연한 온도 센서
US10467926B2 (en) 2013-10-07 2019-11-05 Mc10, Inc. Conformal sensor systems for sensing and analysis
JP6711750B2 (ja) 2013-11-22 2020-06-17 エムシー10 インコーポレイテッドMc10,Inc. 心臓活動の検知および分析のためのコンフォーマルセンサシステム
WO2015103580A2 (en) 2014-01-06 2015-07-09 Mc10, Inc. Encapsulated conformal electronic systems and devices, and methods of making and using the same
KR20160129007A (ko) 2014-03-04 2016-11-08 엠씨10, 인크 전자 디바이스를 위한 다부분 유연성 봉지 하우징
JP6661242B2 (ja) 2014-03-12 2020-03-11 エムシー10 インコーポレイテッドMc10,Inc. アッセイの変化の定量化のための測定装置および方法
US10103037B2 (en) 2014-05-09 2018-10-16 Intel Corporation Flexible microelectronic systems and methods of fabricating the same
BR112015015380A2 (pt) 2014-07-11 2017-07-11 Intel Corp dispositivos eletrônicos inclináveis e estiráveis e métodos
KR101924560B1 (ko) 2014-09-29 2019-02-27 엘지디스플레이 주식회사 벤딩 스트레스를 감소시키는 와이어들을 구비한 플렉서블 디스플레이 장치
US9899330B2 (en) 2014-10-03 2018-02-20 Mc10, Inc. Flexible electronic circuits with embedded integrated circuit die
US10297572B2 (en) 2014-10-06 2019-05-21 Mc10, Inc. Discrete flexible interconnects for modules of integrated circuits
USD781270S1 (en) 2014-10-15 2017-03-14 Mc10, Inc. Electronic device having antenna
EP3258837A4 (de) 2015-02-20 2018-10-10 Mc10, Inc. Automatische erkennung und konfiguration von am körper tragbaren vorrichtungen auf basis von status, position und/oder ausrichtung am körper
US10398343B2 (en) 2015-03-02 2019-09-03 Mc10, Inc. Perspiration sensor
US9548277B2 (en) 2015-04-21 2017-01-17 Honeywell International Inc. Integrated circuit stack including a patterned array of electrically conductive pillars
JP6484133B2 (ja) * 2015-07-09 2019-03-13 日東電工株式会社 配線回路基板の製造方法
JP6491556B2 (ja) * 2015-07-09 2019-03-27 日東電工株式会社 配線回路基板
US10653332B2 (en) 2015-07-17 2020-05-19 Mc10, Inc. Conductive stiffener, method of making a conductive stiffener, and conductive adhesive and encapsulation layers
US10709384B2 (en) 2015-08-19 2020-07-14 Mc10, Inc. Wearable heat flux devices and methods of use
CN108290070A (zh) 2015-10-01 2018-07-17 Mc10股份有限公司 用于与虚拟环境相互作用的方法和系统
WO2017062508A1 (en) 2015-10-05 2017-04-13 Mc10, Inc. Method and System for Neuromodulation and Stimulation
TWI587763B (zh) * 2015-11-17 2017-06-11 The use of gravure printing method to form conductive totem
US10080290B2 (en) * 2015-11-17 2018-09-18 Intel Corporation Stretchable embedded electronic package
CN108781313B (zh) 2016-02-22 2022-04-08 美谛达解决方案公司 用以贴身获取传感器信息的耦接的集线器和传感器节点的系统、装置和方法
EP3420732B8 (de) 2016-02-22 2020-12-30 Medidata Solutions, Inc. System, vorrichtungen und verfahren zur daten- und leistungsübertragung auf dem körper
US10076025B2 (en) * 2016-02-22 2018-09-11 Nippon Mektron, Ltd. Stretchable circuit board and method for manufacturing the same
CN109310340A (zh) 2016-04-19 2019-02-05 Mc10股份有限公司 用于测量汗液的方法和系统
US10447347B2 (en) 2016-08-12 2019-10-15 Mc10, Inc. Wireless charger and high speed data off-loader
EP3322267B1 (de) * 2016-11-10 2025-02-19 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Komponententräger mit haftfördernder form von verdrahtungsstruktur
CN108156763B (zh) * 2016-12-05 2020-08-07 鹏鼎控股(深圳)股份有限公司 透明电路板及其制作方法
CN108401361B (zh) * 2017-02-04 2020-08-07 欣兴电子股份有限公司 电路板与其制作方法
US10512165B2 (en) 2017-03-23 2019-12-17 Unimicron Technology Corp. Method for manufacturing a circuit board
FR3083918B1 (fr) * 2018-07-13 2020-10-23 Commissariat Energie Atomique Procede de transfert de structures
US11749455B2 (en) * 2022-01-10 2023-09-05 Bh Electronics, Inc. Methods of fabricating ultra-miniature laminated magnetic cores and devices
CN118748864B (zh) * 2024-08-13 2025-01-17 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) 可拉伸电路及其制备方法、柔性电子集成系统

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3279969A (en) 1962-11-29 1966-10-18 Amphenol Corp Method of making electronic circuit elements
US4584039A (en) * 1984-12-26 1986-04-22 Hughes Aircraft Co. Fine line flexible cable fabrication process
ES2063151T3 (es) * 1988-03-30 1995-01-01 Rhone Poulenc Chimie Procedimiento de preparacion de oxido de titanio.
US5147519A (en) * 1990-07-27 1992-09-15 Motorola, Inc. Method of manufacturing elastomers containing fine line conductors
DE69218344T2 (de) 1991-11-29 1997-10-23 Hitachi Chemical Co., Ltd., Tokio/Tokyo Herstellungsverfahren für eine gedruckte Schaltung
US5436412A (en) * 1992-10-30 1995-07-25 International Business Machines Corporation Interconnect structure having improved metallization
DE19617055C1 (de) * 1996-04-29 1997-06-26 Semikron Elektronik Gmbh Halbleiterleistungsmodul hoher Packungsdichte in Mehrschichtbauweise
JP4066522B2 (ja) * 1998-07-22 2008-03-26 イビデン株式会社 プリント配線板
JP3935309B2 (ja) * 2000-06-08 2007-06-20 日東電工株式会社 配線回路基板およびその製造方法
JP4459406B2 (ja) * 2000-07-27 2010-04-28 ソニーケミカル&インフォメーションデバイス株式会社 フレキシブル配線板製造方法
US6663786B2 (en) * 2001-06-14 2003-12-16 International Business Machines Corporation Structure having embedded flush circuitry features and method of fabricating
US7491892B2 (en) * 2003-03-28 2009-02-17 Princeton University Stretchable and elastic interconnects
US7337012B2 (en) * 2003-04-30 2008-02-26 Lawrence Livermore National Security, Llc Stretchable polymer-based electronic device
US7056759B2 (en) * 2004-04-27 2006-06-06 Hewlett-Packard Development Company, L.P. Method for making a microelectromechanical system using a flexure protection layer
KR100643756B1 (ko) * 2004-09-10 2006-11-10 삼성전자주식회사 유연소자, 유연압력센서, 및 이들의 제조방법
TWI370714B (en) * 2008-01-09 2012-08-11 Ind Tech Res Inst Circuit structure and menufacturing method thereof

Also Published As

Publication number Publication date
US7487587B2 (en) 2009-02-10
US20060231288A1 (en) 2006-10-19
EP1746869B1 (de) 2011-07-27
GB0505826D0 (en) 2005-04-27
US20090107704A1 (en) 2009-04-30
EP1746869A1 (de) 2007-01-24
US8431828B2 (en) 2013-04-30

Similar Documents

Publication Publication Date Title
GB0505826D0 (en) Methods for embedding of conducting material and devices resulting from said methods
WO2008101225A3 (en) Flexible circuit electrode array with wire or film support
EP1427007A3 (de) Anschlüsse für Halbleiterbauelement und Verfahren zu deren Herstellung
JP2004266244A5 (de)
WO2008040760A3 (en) Method of an apparatus for manufacturing a panel and produced panel
WO2006072871A3 (fr) Procede d'elaboration de structures empilees mixtes, a zones isolantes diverses et/ou zones de conduction electrique verticale localisees
EP1843383A3 (de) Strukturen leitfähiger Objekte auf einem Substrat und Herstellungsverfahren dafür
WO2004100214A3 (en) Metal sacrificial layer
WO2006056643A3 (en) Method for manufacturing an electronics module
EP2096688A3 (de) Piezoelektrisches Substrat, Herstellung und zugehörige Verfahren
EP1717857A3 (de) Halbleiteranordnung und ihre Herstellungsmethode
WO2007119200A3 (en) An electro-optic device and a method for producing the same
UA99715C2 (ru) Способ и устройство изготовления панели большой поверхности, большая поверхностная панель и набор индивидуальных панелей
WO2008129480A3 (en) An electronic component, and a method of manufacturing an electronic component
WO2006124769A3 (en) Method for functionalizing surfaces
WO2007081522A3 (en) A probe array structure and a method of making a probe array structure
TW200731900A (en) Method for producing a circuit substrate and a circuit board and a method for producing the same
ATE371225T1 (de) Sicherheitselement zur rf-identifikation
EP1467216A3 (de) Verfahren zur Herstellung eines Magnetfelddetektors
DE502008000620D1 (de) Verfahren zur Herstellung einer Spule und eine Spule
DE50313093D1 (de) Verfahren zur herstellung dünner metallhaltiger schichten mit geringem elektrischen widerstand
ATE412256T1 (de) Verfahren zur herstellung strukturierter schichten
ATE353457T1 (de) Verfahren zum zusammenbauen eines elektronischen komponent auf einem substrat
TW200746456A (en) Nitride-based semiconductor device and production method thereof
EP2372802A3 (de) Elektromechanischer Wandler und Verfahren zur Herstellung des elektromechanischen Wandlers

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties