ATE522792T1 - Thermischer durchflussmesser mit vertiefungen in einem substrat - Google Patents

Thermischer durchflussmesser mit vertiefungen in einem substrat

Info

Publication number
ATE522792T1
ATE522792T1 AT05254054T AT05254054T ATE522792T1 AT E522792 T1 ATE522792 T1 AT E522792T1 AT 05254054 T AT05254054 T AT 05254054T AT 05254054 T AT05254054 T AT 05254054T AT E522792 T1 ATE522792 T1 AT E522792T1
Authority
AT
Austria
Prior art keywords
substrate
thermal flow
recesses
flow meter
conduit
Prior art date
Application number
AT05254054T
Other languages
English (en)
Inventor
Herbert Keppner
Rudolf Buser
Frank Zumkehr
Juergen Burger
Original Assignee
Codman & Shurtleff
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Codman & Shurtleff filed Critical Codman & Shurtleff
Application granted granted Critical
Publication of ATE522792T1 publication Critical patent/ATE522792T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
AT05254054T 2004-06-30 2005-06-29 Thermischer durchflussmesser mit vertiefungen in einem substrat ATE522792T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/881,771 US7036369B2 (en) 2004-06-30 2004-06-30 Thermal flow sensor having recesses in a substrate

Publications (1)

Publication Number Publication Date
ATE522792T1 true ATE522792T1 (de) 2011-09-15

Family

ID=35064645

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05254054T ATE522792T1 (de) 2004-06-30 2005-06-29 Thermischer durchflussmesser mit vertiefungen in einem substrat

Country Status (5)

Country Link
US (1) US7036369B2 (de)
EP (1) EP1612523B1 (de)
JP (1) JP5242004B2 (de)
AT (1) ATE522792T1 (de)
ES (1) ES2370021T3 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9694166B2 (en) 2002-03-26 2017-07-04 Medtronics Ps Medical, Inc. Method of draining cerebrospinal fluid
US20030216710A1 (en) * 2002-03-26 2003-11-20 Hurt Robert F. Catheter
US20050204811A1 (en) * 2004-02-03 2005-09-22 Neff Samuel R System and method for measuring flow in implanted cerebrospinal fluid shunts
JP4962489B2 (ja) * 2006-03-28 2012-06-27 株式会社島津製作所 熱式質量流量計
US20080013291A1 (en) * 2006-07-17 2008-01-17 Toralf Bork Thermal flow sensor having streamlined packaging
CN101641576B (zh) * 2007-02-28 2011-11-09 株式会社山武 流量传感器
EP2128573A1 (de) * 2007-02-28 2009-12-02 Yamatake Corporation Sensor, sensortemperaturregelverfahren und abnormitätsbehebungsverfahren
US7712347B2 (en) * 2007-08-29 2010-05-11 Honeywell International Inc. Self diagnostic measurement method to detect microbridge null drift and performance
US7500392B1 (en) 2007-10-11 2009-03-10 Memsys, Inc. Solid state microanemometer device and method of fabrication
US7603898B2 (en) * 2007-12-19 2009-10-20 Honeywell International Inc. MEMS structure for flow sensor
US8485030B2 (en) * 2008-01-18 2013-07-16 Waters Technologies Corporation Thermal loop flow sensor
US20090204019A1 (en) 2008-02-13 2009-08-13 Alec Ginggen Combined Pressure and Flow Sensor Integrated in a Shunt System
FR2928553B1 (fr) 2008-03-14 2012-03-02 Sophysa Sa Procede de regulation du drainage du lcr
WO2011075571A1 (en) * 2009-12-18 2011-06-23 Waters Technologies Corporation Flow sensors and flow sensing methods with extended linear range
US9295842B2 (en) 2012-07-05 2016-03-29 Mc10, Inc. Catheter or guidewire device including flow sensing and use thereof
JP2015521894A (ja) * 2012-07-05 2015-08-03 エムシー１０ インコーポレイテッドＭｃ１０，Ｉｎｃ． 流量センシングを含むカテーテルデバイス
WO2014145858A2 (en) 2013-03-15 2014-09-18 Bitol Designs, Llc Occlusion resistant catheter and method of use
US20160370809A1 (en) * 2015-06-19 2016-12-22 Hni Technologies Inc. Fluid flow system

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618750A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Gas detector
US4555940A (en) * 1982-11-01 1985-12-03 Renger Herman L Method and apparatus for measuring fluid flow rates and volumes through fluid flow paths
EP0131318B1 (de) * 1983-05-18 1991-12-27 Bronkhorst High-Tech B.V. Durchflussmessgerät
US4542650A (en) * 1983-08-26 1985-09-24 Innovus Thermal mass flow meter
JP3324855B2 (ja) * 1993-12-04 2002-09-17 株式会社エステック 質量流量センサ
JP3312227B2 (ja) * 1994-02-23 2002-08-05 本田技研工業株式会社 ガス式角速度センサ
JPH08105777A (ja) * 1994-10-06 1996-04-23 Fuji Electric Co Ltd マスフローセンサ
DE4439222C2 (de) * 1994-11-03 1998-05-28 Bosch Gmbh Robert Massenflußsensor mit Druckkompensation
US5623097A (en) * 1994-11-24 1997-04-22 Ricoh Company, Ltd. Thermal-type flow sensor
JP3543820B2 (ja) * 1995-12-13 2004-07-21 松下電器産業株式会社 超音波流量計
JP3659394B2 (ja) * 1998-06-30 2005-06-15 株式会社日本自動車部品総合研究所 液密計測装置
JP2000111377A (ja) * 1998-10-06 2000-04-18 Mitsubishi Electric Corp 流量センサ並びに流量センサの製造方法
JP3514666B2 (ja) * 1999-06-30 2004-03-31 株式会社日立製作所 熱式空気流量センサ
JP2001264139A (ja) * 2000-03-22 2001-09-26 Seiko Instruments Inc 容積式流量計および流量検出用プローブ
JP2002062306A (ja) * 2000-08-23 2002-02-28 Tokyo Gas Co Ltd 流速検出装置
US6527835B1 (en) * 2001-12-21 2003-03-04 Sandia Corporation Chemical preconcentrator with integral thermal flow sensor
US20040068201A1 (en) * 2002-02-15 2004-04-08 Eunoe, Inc. Systems and methods for flow detection and measurement in CSF shunts
JP2003285298A (ja) * 2002-03-26 2003-10-07 Seiko Instruments Inc マイクロ流路デバイスおよびマイクロ流路デバイスの作製法
EP1365216B1 (de) * 2002-05-10 2018-01-17 Azbil Corporation Durchflusssensor und Verfahren zu dessen Herstellung
JP3683868B2 (ja) * 2002-05-10 2005-08-17 株式会社山武 熱式フローセンサ

Also Published As

Publication number Publication date
JP2006017723A (ja) 2006-01-19
JP5242004B2 (ja) 2013-07-24
US7036369B2 (en) 2006-05-02
EP1612523A3 (de) 2006-07-05
EP1612523A2 (de) 2006-01-04
US20060000273A1 (en) 2006-01-05
EP1612523B1 (de) 2011-08-31
ES2370021T3 (es) 2011-12-12

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