ATE528420T1 - Tieftemperaturverfahren zur herstellung eines mit zinkoxid beschichteten gegenstands - Google Patents

Tieftemperaturverfahren zur herstellung eines mit zinkoxid beschichteten gegenstands

Info

Publication number
ATE528420T1
ATE528420T1 AT07794485T AT07794485T ATE528420T1 AT E528420 T1 ATE528420 T1 AT E528420T1 AT 07794485 T AT07794485 T AT 07794485T AT 07794485 T AT07794485 T AT 07794485T AT E528420 T1 ATE528420 T1 AT E528420T1
Authority
AT
Austria
Prior art keywords
zinc oxide
oxide coated
producing
low temperature
temperature process
Prior art date
Application number
AT07794485T
Other languages
English (en)
Inventor
Michael Abrams
Roman Korotkov
Gary Silverman
Ryan Smith
Jeffery Stricker
Original Assignee
Pilkington Group Ltd
Arkema Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilkington Group Ltd, Arkema Inc filed Critical Pilkington Group Ltd
Application granted granted Critical
Publication of ATE528420T1 publication Critical patent/ATE528420T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/216—ZnO
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Glass Compositions (AREA)
AT07794485T 2006-09-08 2007-05-03 Tieftemperaturverfahren zur herstellung eines mit zinkoxid beschichteten gegenstands ATE528420T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US84318506P 2006-09-08 2006-09-08
PCT/US2007/010620 WO2008030276A1 (en) 2006-09-08 2007-05-03 Low temperature method of making a zinc oxide coated article

Publications (1)

Publication Number Publication Date
ATE528420T1 true ATE528420T1 (de) 2011-10-15

Family

ID=38596307

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07794485T ATE528420T1 (de) 2006-09-08 2007-05-03 Tieftemperaturverfahren zur herstellung eines mit zinkoxid beschichteten gegenstands

Country Status (15)

Country Link
US (1) US7740901B2 (de)
EP (1) EP2074239B1 (de)
JP (1) JP5406717B2 (de)
KR (1) KR101473024B1 (de)
CN (1) CN101512043B (de)
AT (1) ATE528420T1 (de)
AU (1) AU2007293468B2 (de)
BR (1) BRPI0716189A2 (de)
ES (1) ES2374744T3 (de)
MX (1) MX2009002461A (de)
MY (1) MY150461A (de)
PL (1) PL2074239T3 (de)
PT (1) PT2074239E (de)
RU (1) RU2446232C2 (de)
WO (1) WO2008030276A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000007460A (ko) * 1998-07-03 2000-02-07 차동천 트리메틸올프로판 디알릴 에테르의 제조방법
DE102008005283B4 (de) * 2008-01-19 2009-10-29 Schott Solar Gmbh Verfahren zur Herstellung einer mit einem transparenten, Metalloxid beschichtetn Glasscheibe für ein photovoltaisches Modul und eine solche beschichtete Glasscheibe
IT1393401B1 (it) * 2008-07-28 2012-04-20 Enea Ente Per Le Nuova Tecnologie L En E L Ambiente Metodo per la fabbricazione in linea di strati sottili di zno b trasparente conduttivo e testurizzato su larga area e relativo apparato
WO2010151430A1 (en) * 2009-06-22 2010-12-29 Arkema Inc. Chemical vapor deposition using n,o polydentate ligand complexes of metals
DE102009039777A1 (de) * 2009-09-02 2011-03-03 Forschungszentrum Jülich GmbH Verfahren zur Herstellung und Strukturierung einer Zinkoxidschicht und Zinkoxidschicht
AU2010306798B2 (en) * 2009-10-15 2015-05-28 Arkema Inc. Deposition of doped ZnO films on polymer substrates by UV-assisted chemical vapor deposition
JP5614558B2 (ja) * 2010-06-01 2014-10-29 東芝三菱電機産業システム株式会社 金属酸化膜の成膜装置、金属酸化膜の成膜方法
JP5932251B2 (ja) * 2011-06-17 2016-06-08 キヤノン株式会社 フッ化膜形成方法及び光学素子の製造方法
KR20130054812A (ko) * 2011-11-17 2013-05-27 삼성코닝정밀소재 주식회사 산화아연 전구체 및 이를 이용한 산화아연계 박막 증착방법
JP6293679B2 (ja) * 2012-03-16 2018-03-14 ピルキントン グループ リミテッド 酸化亜鉛コーティングを蒸着させるための化学蒸着過程、導電性ガラス物品を形成するための方法、およびそれによって生成されるコーティングされたガラス物品
IL293196B2 (en) 2019-11-27 2025-08-01 Adeka Corp Compound, thin-film forming raw material, and method of producing thin-film

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
CH640571A5 (fr) * 1981-03-06 1984-01-13 Battelle Memorial Institute Procede et dispositif pour deposer sur un substrat une couche de matiere minerale.
JPH0682625B2 (ja) * 1985-06-04 1994-10-19 シーメンス ソーラー インダストリーズ，エル．ピー． 酸化亜鉛膜の蒸着方法
US5306522A (en) * 1986-03-24 1994-04-26 Ensci, Inc. Process for coating a substrate with zinc oxide and uses for coated substrates
US4990286A (en) 1989-03-17 1991-02-05 President And Fellows Of Harvard College Zinc oxyfluoride transparent conductor
US5090985A (en) * 1989-10-17 1992-02-25 Libbey-Owens-Ford Co. Method for preparing vaporized reactants for chemical vapor deposition
US5470743A (en) * 1991-03-06 1995-11-28 Becton, Dickinson And Company Transmembrane cell culture device
US6071561A (en) * 1997-08-13 2000-06-06 President And Fellows Of Harvard College Chemical vapor deposition of fluorine-doped zinc oxide
US6416841B1 (en) * 1997-12-10 2002-07-09 Pechiney Emballage Flexible Europe Tear tape for plastic packaging
US6426125B1 (en) * 1999-03-17 2002-07-30 General Electric Company Multilayer article and method of making by ARC plasma deposition
DE10026299A1 (de) * 2000-05-26 2001-11-29 Sunyx Surface Nanotechnologies Substrat mit gering lichtstreuender, ultraphober Oberfläche und Verfahren zu seiner Herstellung
WO2002016679A1 (en) * 2000-08-18 2002-02-28 Tohoku Techno Arch Co., Ltd. Polycrystalline semiconductor material and method of manufacture thereof
JP2002155371A (ja) * 2000-11-15 2002-05-31 Sekisui Chem Co Ltd 半導体素子の製造方法及びその装置
US6416814B1 (en) 2000-12-07 2002-07-09 First Solar, Llc Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films
CN1265434C (zh) * 2003-11-04 2006-07-19 浙江大学 一种制备p型ZnO晶体薄膜的方法
US7115304B2 (en) * 2004-02-19 2006-10-03 Nanosolar, Inc. High throughput surface treatment on coiled flexible substrates

Also Published As

Publication number Publication date
RU2446232C2 (ru) 2012-03-27
CN101512043B (zh) 2012-11-07
EP2074239A1 (de) 2009-07-01
EP2074239B1 (de) 2011-10-12
BRPI0716189A2 (pt) 2013-01-01
KR101473024B1 (ko) 2014-12-15
MY150461A (en) 2014-01-30
WO2008030276A1 (en) 2008-03-13
CN101512043A (zh) 2009-08-19
PL2074239T3 (pl) 2012-07-31
KR20090061650A (ko) 2009-06-16
AU2007293468B2 (en) 2011-08-04
AU2007293468A1 (en) 2008-03-13
RU2009112714A (ru) 2010-10-20
MX2009002461A (es) 2009-03-20
JP5406717B2 (ja) 2014-02-05
US20080063793A1 (en) 2008-03-13
US7740901B2 (en) 2010-06-22
JP2010502558A (ja) 2010-01-28
PT2074239E (pt) 2011-11-02
ES2374744T3 (es) 2012-02-21

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